[Scan]
initial_time=2016-02-15T17:34:24
final_time=2016-02-15T17:34:43
ip_count=19
run=1030
dataset=1
scan=41
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.81275E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.98967E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.64928E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.99181E-9
ql4_vset=
ql4_vmon=-3.09944E-4
ql4_imon=9.25875E-10
mult1=-1.12135E-8
mult2=-2.79381E-9
rf_tmon=-4.3384E-3
rf_agc=3.34743E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.39262E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05189E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53365E1
cs_ef1b_imon=2.96226E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=2.49088E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02475E0
lens1_imon=1.54161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.99199E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.53205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84179E1
cs_ef1a_imon=2.9842E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=4.39E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11377E1
os_restr1_imon=2.8738E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=1.87891E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6345E1
os_ef1bup_imon=3.08894E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.21669E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01909E1
cs_anode1_imon=3.04577E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.79498E-10
tplens_vset=1.4E-1
tplens_vmon=1.6202E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26938E1
iondef2_imon=1.58373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.51827E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=1.88281E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.19958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.12397E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76991E-1
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71146E1
cs_ef2a_imon=3.1912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62395E0
os_ef2alow_imon=-2.5701E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.12108E-1
os_ef2bup_imon=-5.31239E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10646E1
os_restr2_imon=2.86885E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.32123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.26696E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.07061E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.1006E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=3.48365E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0806E0
cs_ionaccel_imon=-1.77395E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47163E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56269E1
einzel_imon=7.80815E-6
window_vset=0.0E0
window_vmon=1.9953E-1
window_imon=-1.09811E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86444E1
mask2_imon=-7.478E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.6242E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.11617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.40338E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76489E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6649E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.97885E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66734E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.53786E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.23398E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61164E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31749E-1
cs_fil2_imon=-2.52017E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21878E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22389E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.51924E-2
chamber_ion_pmon=1.69883E-8
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.42107E-1
res40_imon=-2.58779E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.151E3	1.0E0	1.47E2	4.1E1	-7.286E-2	-8.80023E1	-4.76837E-5	-8.80001E1	2.14577E-4	5.55515E-3	9.29594E-2	2.73057E1	-3.2662E1	-3.26172E1	2.67758E1	1.70827E-8	2.52276E-3	2.52276E-3	6.29665E-3	2.5128E-2
2.0E0	3.043E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80022E1	-5.48363E-4	-8.80003E1	-2.38419E-5	5.62668E-3	9.32932E-2	2.73253E1	-3.26627E1	-3.26395E1	2.6831E1	1.7017E-8	2.52647E-3	2.52647E-3	6.32386E-3	2.51395E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80022E1	-7.15256E-5	-8.80005E1	2.38419E-4	5.43594E-3	9.3317E-2	2.72962E1	-3.26467E1	-3.26266E1	2.68184E1	1.70244E-8	2.52428E-3	2.52428E-3	6.32936E-3	2.50741E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80022E1	-2.38419E-5	-8.80007E1	9.53674E-5	5.14984E-3	9.29594E-2	2.72913E1	-3.26591E1	-3.26002E1	2.67992E1	1.70173E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.50638E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80021E1	2.38419E-5	-8.80004E1	1.19209E-4	5.38826E-3	9.29594E-2	2.72861E1	-3.26487E1	-3.26425E1	2.67583E1	1.70243E-8	2.52473E-3	2.52473E-3	6.32978E-3	2.5107E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80023E1	-4.76837E-5	-8.80002E1	0.0E0	5.126E-3	9.32455E-2	2.7311E1	-3.26708E1	-3.26254E1	2.68058E1	1.7017E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.51613E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80022E1	-1.43051E-4	-8.80003E1	-9.53674E-5	5.55515E-3	9.33886E-2	2.73045E1	-3.26374E1	-3.26591E1	2.6786E1	1.70028E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.51066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80018E1	-2.6226E-4	-8.80004E1	1.90735E-4	5.67436E-3	9.36031E-2	2.72853E1	-3.26627E1	-3.26098E1	2.68028E1	1.70244E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.50959E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80019E1	-5.72205E-4	-8.80005E1	9.53674E-5	5.62668E-3	9.31978E-2	2.73458E1	-3.26555E1	-3.26325E1	2.67974E1	1.7017E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.51395E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.8002E1	-3.57628E-4	-8.8E1	2.14577E-4	5.96046E-3	9.34601E-2	2.72871E1	-3.26518E1	-3.26585E1	2.67908E1	1.70096E-8	2.52428E-3	2.52428E-3	6.32386E-3	2.51177E-2
1.4E1	5.2E1	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80018E1	-4.05312E-4	-8.79998E1	0.0E0	5.74589E-3	9.30071E-2	2.72907E1	-3.26488E1	-3.26368E1	2.67914E1	1.70028E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.50424E-2
1.5E1	2.8E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.8002E1	-8.10623E-4	-8.79999E1	2.38419E-5	5.79357E-3	9.31978E-2	2.72656E1	-3.26714E1	-3.26107E1	2.67842E1	1.71953E-8	2.51552E-3	2.51552E-3	6.34588E-3	2.51177E-2
1.6E1	2.66E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80019E1	-2.38419E-4	-8.79998E1	4.76837E-5	5.88894E-3	9.32217E-2	2.72967E1	-3.26549E1	-3.2647E1	2.678E1	1.70763E-8	2.52647E-3	2.52647E-3	6.31837E-3	2.51832E-2
1.7E1	3.38E2	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80017E1	2.14577E-4	-8.79999E1	7.15256E-5	5.38826E-3	9.32217E-2	2.73111E1	-3.26837E1	-3.26158E1	2.68112E1	1.70028E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.50852E-2
1.8E1	1.467E3	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80015E1	4.76837E-5	-8.8E1	1.43051E-4	5.19753E-3	9.27925E-2	2.72769E1	-3.26548E1	-3.26487E1	2.68064E1	1.70017E-8	2.52362E-3	2.52362E-3	6.31858E-3	2.5107E-2
1.9E1	2.5E3	2.0E0	7.68E2	5.29E2	-7.286E-2	-8.80016E1	-1.19209E-4	-8.80002E1	-2.38419E-4	5.79357E-3	9.30786E-2	2.73213E1	-3.26554E1	-3.26056E1	2.67884E1	1.70244E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.51832E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80017E1	-2.38419E-5	-8.80002E1	-2.6226E-4	5.60284E-3	9.30309E-2	2.72968E1	-3.26638E1	-3.26413E1	2.68022E1	1.70763E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.51832E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80016E1	-4.76837E-5	-8.80002E1	-1.43051E-4	5.62668E-3	9.32217E-2	2.73051E1	-3.26549E1	-3.26543E1	2.68148E1	1.70246E-8	2.52276E-3	2.52276E-3	6.29128E-3	2.52354E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80015E1	-7.86781E-4	-8.80002E1	-1.90735E-4	5.60284E-3	9.32932E-2	2.73122E1	-3.26596E1	-3.26313E1	2.67821E1	1.70096E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.52709E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80018E1	-5.72205E-4	-8.8E1	-3.09944E-4	5.57899E-3	9.31025E-2	2.73039E1	-3.26938E1	-3.26478E1	2.67902E1	1.69883E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.51924E-2