[Scan]
initial_time=2016-02-15T17:34:50
final_time=2016-02-15T17:35:10
ip_count=19
run=1030
dataset=1
scan=42
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.80937E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.68728E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=4.32587E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.94775E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=8.78918E-10
mult1=-9.34305E-9
mult2=-2.60284E-9
rf_tmon=-4.96304E-3
rf_agc=3.32194E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.31049E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20149E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.97477E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.49052E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03006E0
lens1_imon=1.49205E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.5547E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.98883E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.2367E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=2.87134E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=1.89449E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26744E0
cs_ionrep_imon=1.23793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93271E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.05442E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=8.01361E-10
tplens_vset=1.4E-1
tplens_vmon=1.61371E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.51329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.87542E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.8913E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.47496E-1
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.633E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.09045E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=3.66199E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.81942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.15541E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.60461E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.79409E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=5.99772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33859E1
os_fil1_imon=5.23272E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.83649E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6634E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=9.99513E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62918E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66448E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.97734E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22358E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.68612E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.149E3	3.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80018E1	-5.48363E-4	-8.80006E1	4.29153E-4	5.57899E-3	9.31978E-2	2.73186E1	-3.2648E1	-3.26383E1	2.68232E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.52709E-2
2.0E0	2.935E3	3.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80022E1	-5.00679E-4	-8.80001E1	2.14577E-4	5.65052E-3	9.32455E-2	2.73027E1	-3.2675E1	-3.26354E1	2.6807E1	1.69949E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.51613E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80019E1	-4.76837E-4	-8.80003E1	-1.66893E-4	5.34058E-3	9.32693E-2	2.73003E1	-3.26488E1	-3.26188E1	2.67842E1	1.69949E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.51395E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80017E1	-4.52995E-4	-8.80002E1	2.38419E-5	5.57899E-3	9.3174E-2	2.73063E1	-3.26681E1	-3.26122E1	2.68232E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51832E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80019E1	-6.19888E-4	-8.80004E1	1.90735E-4	5.57899E-3	9.32693E-2	2.73177E1	-3.26843E1	-3.26266E1	2.67637E1	1.701E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.53216E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80016E1	-6.4373E-4	-8.80002E1	7.15256E-5	5.45979E-3	9.32932E-2	2.73045E1	-3.26585E1	-3.26056E1	2.68184E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.52928E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80015E1	-5.48363E-4	-8.80004E1	-7.15256E-5	5.60284E-3	9.34124E-2	2.73069E1	-3.26789E1	-3.2593E1	2.68058E1	1.70059E-8	2.51826E-3	2.51826E-3	6.3074E-3	2.51723E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80014E1	-4.29153E-4	-8.80003E1	1.19209E-4	5.65052E-3	9.35316E-2	2.72961E1	-3.26657E1	-3.26224E1	2.67854E1					
1.2E1	7.2E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80015E1	-3.8147E-4	-8.80002E1	1.66893E-4	5.05447E-3	9.34839E-2	2.73087E1	-3.2653E1	-3.26182E1	2.68118E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.50741E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80018E1	-3.8147E-4	-8.80001E1	4.76837E-5	5.55515E-3	9.34362E-2	2.73177E1	-3.26573E1	-3.26164E1	2.6783E1	1.69875E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.50959E-2
1.4E1	4.0E1	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80017E1	-3.33786E-4	-8.80002E1	-1.43051E-4	5.79357E-3	9.33647E-2	2.73201E1	-3.26705E1	-3.26008E1	2.67854E1	1.70096E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.50959E-2
1.5E1	3.3E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80018E1	-3.57628E-4	-8.80001E1	1.43051E-4	5.50747E-3	9.35793E-2	2.73141E1	-3.26524E1	-3.26452E1	2.6813E1	1.70318E-8	2.52647E-3	2.52647E-3	6.32386E-3	2.51832E-2
1.6E1	2.34E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80015E1	-2.6226E-4	-8.79998E1	3.8147E-4	5.14984E-3	9.34362E-2	2.72913E1	-3.26789E1	-3.26146E1	2.6798E1	1.70466E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.52051E-2
1.7E1	3.2E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80015E1	-9.05991E-4	-8.80004E1	3.09944E-4	5.29289E-3	9.33409E-2	2.73075E1	-3.26615E1	-3.26302E1	2.67692E1	1.71729E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.52489E-2
1.8E1	1.431E3	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80019E1	-5.96046E-4	-8.80003E1	1.43051E-4	5.60284E-3	9.34362E-2	2.72913E1	-3.26633E1	-3.26158E1	2.67631E1	1.70096E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.51613E-2
1.9E1	2.527E3	3.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80023E1	-7.86781E-4	-8.80002E1	2.14577E-4	5.34058E-3	9.31263E-2	2.7311E1	-3.26732E1	-3.26201E1	2.6816E1	1.70318E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.51613E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80021E1	-4.52995E-4	-8.80001E1	1.43051E-4	5.31673E-3	9.29356E-2	2.72991E1	-3.26609E1	-3.26362E1	2.67677E1	1.70023E-8	2.52538E-3	2.52538E-3	6.32386E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-5.24521E-4	-8.80004E1	2.38419E-4	5.29289E-3	9.30786E-2	2.72921E1	-3.26815E1	-3.26189E1	2.6816E1	1.70173E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.52785E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80018E1	-5.72205E-4	-8.80006E1	3.33786E-4	5.34058E-3	9.36031E-2	2.73339E1	-3.26657E1	-3.2638E1	2.67878E1	1.70172E-8	2.51972E-3	2.51972E-3	6.31555E-3	2.51445E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80019E1	-7.15256E-4	-8.80005E1	1.66893E-4	5.29289E-3	9.31978E-2	2.73147E1	-3.26518E1	-3.2641E1	2.68004E1