[Scan]
initial_time=2016-02-15T17:35:44
final_time=2016-02-15T17:36:03
ip_count=19
run=1030
dataset=1
scan=44
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79074E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.39343E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=3.81768E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.92872E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=9.04942E-10
mult1=-8.92163E-9
mult2=-2.68667E-9
rf_tmon=-4.54847E-3
rf_agc=3.30332E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.32181E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65006E0
bslens_imon=2.34695E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19758E1
lens5a_imon=1.99365E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05246E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=2.97731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02177E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04756E1
cs_ea1_imon=2.50049E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0099E0
lens1_imon=1.65866E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.99121E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.54627E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84359E1
cs_ef1a_imon=2.98461E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.87526E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=2.87166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=1.89528E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24051E0
cs_ionrep_imon=1.23793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=3.04751E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.41684E-10
tplens_vset=1.4E-1
tplens_vmon=1.58408E0
tplens_imon=-2.91492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.5122E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98457E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.03857E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25442E0
ionrepsh_imon=1.88694E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33831E1
lens5b_imon=2.18971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74588E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64856E-1
os_ea2_imon=-4.89636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64014E0
os_ef2alow_imon=-2.60933E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.16721E-1
os_ef2bup_imon=-5.36174E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=2.87166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.31458E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.26697E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72925E1
iondef1_imon=1.10062E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.06245E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=3.31974E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09539E0
cs_ionaccel_imon=-1.87953E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=1.95676E-1
window_imon=-9.82917E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39046E-4
mask2_vset=0.0E0
mask2_vmon=-1.86599E1
mask2_imon=-7.70926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.41178E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.66439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.85211E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51961E0
defgridb_imon=6.16034E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33831E1
os_fil1_imon=5.3181E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53647E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6646E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3081E1
cs_fil1_imon=1.00084E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61596E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66824E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26993E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.77107E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70871E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.6576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.72849E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22375E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.51177E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.68927E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=138
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.123E3	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80018E1	-5.24521E-4	-8.80003E1	1.66893E-4	5.72205E-3	9.31501E-2	2.73177E1	-3.26765E1	-3.26242E1	2.67806E1	1.70176E-8	2.52342E-3	2.52342E-3	6.31269E-3	2.50959E-2
2.0E0	3.0E3	2.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80019E1	-9.05991E-4	-8.80003E1	3.8147E-4	5.67436E-3	9.3174E-2	2.73039E1	-3.26296E1	-3.2636E1	2.68134E1	1.7017E-8	2.52647E-3	2.52647E-3	6.30192E-3	2.50959E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80018E1	-8.82149E-4	-8.80004E1	2.38419E-5	6.10352E-3	9.34124E-2	2.72951E1	-3.26649E1	-3.26172E1	2.67631E1	1.701E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.51066E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.8002E1	-7.86781E-4	-8.80004E1	4.76837E-5	5.45979E-3	9.32932E-2	2.7298E1	-3.26679E1	-3.26384E1	2.6843E1	1.70246E-8	2.52815E-3	2.52815E-3	6.31817E-3	2.5128E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80019E1	-7.86781E-4	-8.80003E1	1.43051E-4	5.57899E-3	9.32455E-2	2.73261E1	-3.26669E1	-3.26278E1	2.67682E1	1.69738E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.52139E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80018E1	-6.19888E-4	-8.8E1	7.15256E-5	5.79357E-3	9.32455E-2	2.73243E1	-3.26585E1	-3.2635E1	2.6787E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.50523E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80019E1	-2.38419E-4	-8.79999E1	-9.53674E-5	5.57899E-3	9.34124E-2	2.73075E1	-3.2617E1	-3.26128E1	2.68334E1	1.70096E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.51832E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80018E1	-6.91414E-4	-8.80003E1	0.0E0	5.84126E-3	9.35316E-2	2.73153E1	-3.26296E1	-3.26206E1	2.6831E1	1.69801E-8	2.52538E-3	2.52538E-3	6.29645E-3	2.52709E-2
1.2E1	5.6E1	0.0E0	4.85E2	3.23E2	-7.09279E-2	-8.80017E1	-6.67572E-4	-8.80002E1	-4.76837E-5	5.60284E-3	9.34839E-2	2.72913E1	-3.26819E1	-3.2608E1	2.67637E1	1.7017E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.52709E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.07733E-2	-8.80017E1	-5.24521E-4	-8.80003E1	1.43051E-4	5.24521E-3	9.34362E-2	2.73131E1	-3.26248E1	-3.26223E1	2.68016E1	1.70096E-8	2.52647E-3	2.52647E-3	6.33486E-3	2.52709E-2
1.4E1	4.3E1	0.0E0	5.66E2	3.82E2	-7.0464E-2	-8.80016E1	-5.24521E-4	-8.79999E1	4.76837E-5	5.26905E-3	9.32217E-2	2.73128E1	-3.26767E1	-3.2652E1	2.68454E1	1.70243E-8	2.51915E-3	2.51915E-3	6.29624E-3	2.51292E-2
1.5E1	4.8E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.8002E1	-4.76837E-4	-8.79998E1	-1.66893E-4	5.14984E-3	9.31501E-2	2.73015E1	-3.26506E1	-3.26476E1	2.67522E1	1.701E-8	2.51954E-3	2.51954E-3	6.29128E-3	2.51494E-2
1.6E1	2.57E2	2.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80018E1	-7.62939E-4	-8.79999E1	4.76837E-5	5.29289E-3	9.34124E-2	2.72961E1	-3.26687E1	-3.26308E1	2.6825E1	1.70463E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.51924E-2
1.7E1	3.54E2	0.0E0	6.87E2	4.7E2	-7.11597E-2	-8.80018E1	-7.15256E-4	-8.80003E1	-2.14577E-4	5.67436E-3	9.34839E-2	2.73093E1	-3.26597E1	-3.26278E1	2.6796E1	1.70092E-8	2.51581E-3	2.51581E-3	6.3074E-3	2.50626E-2
1.8E1	1.397E3	1.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80021E1	-4.29153E-4	-8.80002E1	-1.43051E-4	5.60284E-3	9.33886E-2	2.72933E1	-3.26744E1	-3.26113E1	2.681E1	1.69955E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.5128E-2
1.9E1	2.539E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80018E1	-1.19209E-4	-8.79999E1	1.19209E-4	5.34058E-3	9.35078E-2	2.73063E1	-3.26531E1	-3.26484E1	2.67553E1	1.70318E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.51177E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.8002E1	-5.00679E-4	-8.80001E1	2.38419E-5	5.31673E-3	9.35793E-2	2.72967E1	-3.26404E1	-3.26254E1	2.68346E1	1.70173E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.50852E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80018E1	-5.00679E-4	-8.80001E1	2.14577E-4	5.19753E-3	9.35316E-2	2.73033E1	-3.26649E1	-3.26284E1	2.67619E1	1.7017E-8	2.52099E-3	2.52099E-3	6.29098E-3	2.50959E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80018E1	-6.19888E-4	-8.8E1	2.38419E-4	5.53131E-3	9.377E-2	2.72973E1	-3.26741E1	-3.26416E1	2.67908E1	1.69883E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.51924E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80018E1	-9.29832E-4	-8.80004E1	7.15256E-5	5.03063E-3	9.34362E-2	2.72925E1	-3.26597E1	-3.26314E1	2.67776E1	1.70244E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51177E-2