[Scan]
initial_time=2016-02-15T17:36:10
final_time=2016-02-15T17:36:30
ip_count=19
run=1030
dataset=1
scan=45
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.80881E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.24847E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=4.52125E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.94905E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=9.00686E-10
mult1=-9.77651E-9
mult2=-2.75254E-9
rf_tmon=-4.75876E-3
rf_agc=3.27688E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=4.53663E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60899E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2009E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=2.96549E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.4884E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.48851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.54763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84151E1
cs_ef1a_imon=2.97592E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.45437E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1132E1
os_restr1_imon=2.86262E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=1.89272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27392E0
cs_ionrep_imon=1.23793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=3.05481E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.94697E-10
tplens_vset=1.4E-1
tplens_vmon=1.5848E0
tplens_imon=-3.62597E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26825E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.62914E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24502E0
ionrepsh_imon=1.8913E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.12709E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59294E-1
os_ea2_imon=-6.31592E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06047E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17401E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62045E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41048E-1
os_ef2bup_imon=-5.41734E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=2.87096E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.31521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.25654E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67686E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.15437E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.76773E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09075E0
cs_ionaccel_imon=-1.81003E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.63571E-6
window_vset=0.0E0
window_vmon=2.15948E-1
window_imon=-1.21923E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86431E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.26483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.41183E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.47012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55615E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3387E1
os_fil1_imon=4.34503E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.03835E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66518E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=9.99038E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62476E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66811E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.2072E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64202E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31899E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.39285E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22411E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.53148E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.61726E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.142E3	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80018E1	-2.6226E-4	-8.80004E1	2.6226E-4	5.24521E-3	9.35316E-2	2.73141E1	-3.26494E1	-3.26554E1	2.68454E1	1.70173E-8	2.51417E-3	2.51417E-3	6.34518E-3	2.50852E-2
2.0E0	2.946E3	1.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80016E1	-5.96046E-4	-8.8E1	2.38419E-4	4.88758E-3	9.31263E-2	2.72974E1	-3.26596E1	-3.26166E1	2.67601E1	1.70173E-8	2.51954E-3	2.51954E-3	6.33977E-3	2.51066E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.8002E1	-3.57628E-4	-8.8E1	2.6226E-4	4.88758E-3	9.30548E-2	2.73086E1	-3.26762E1	-3.26207E1	2.68018E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.50523E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80017E1	-3.33786E-4	-8.80003E1	-2.38419E-5	5.34058E-3	9.31501E-2	2.72901E1	-3.26386E1	-3.26044E1	2.67968E1	1.69883E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.5128E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80015E1	-5.24521E-4	-8.80001E1	2.38419E-5	5.34058E-3	9.32455E-2	2.7302E1	-3.26438E1	-3.26217E1	2.67842E1	1.71134E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.50523E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80018E1	-2.86102E-4	-8.80002E1	-9.53674E-5	5.29289E-3	9.33409E-2	2.73063E1	-3.26506E1	-3.26476E1	2.67704E1	1.70017E-8	2.51359E-3	2.51359E-3	6.31858E-3	2.50847E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.8002E1	-5.24521E-4	-8.8E1	-7.15256E-5	4.91142E-3	9.3317E-2	2.7265E1	-3.26673E1	-3.26337E1	2.67794E1	1.70466E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.50741E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.45602E-2	-8.80018E1	-4.76837E-4	-8.80003E1	9.53674E-5	5.43594E-3	9.32217E-2	2.73135E1	-3.26585E1	-3.2611E1	2.67776E1	1.70318E-8	2.52599E-3	2.52599E-3	6.32896E-3	2.51494E-2
1.2E1	7.2E1	0.0E0	4.85E2	3.23E2	-7.47149E-2	-8.80019E1	-4.29153E-4	-8.8E1	2.86102E-4	5.38826E-3	9.35078E-2	2.72806E1	-3.26603E1	-3.26058E1	2.68232E1	1.70244E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51832E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80018E1	-5.48363E-4	-8.8E1	2.38419E-5	5.84126E-3	9.34362E-2	2.72992E1	-3.26478E1	-3.26272E1	2.67968E1	1.70763E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.50741E-2
1.4E1	4.9E1	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80017E1	-5.72205E-4	-8.79999E1	-1.43051E-4	5.50747E-3	9.33409E-2	2.73186E1	-3.26725E1	-3.26291E1	2.68013E1	1.71282E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.51395E-2
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80019E1	-5.24521E-4	-8.79998E1	1.66893E-4	5.36442E-3	9.34124E-2	2.72954E1	-3.26636E1	-3.26368E1	2.67903E1	1.70771E-8	2.5225E-3	2.5225E-3	6.33538E-3	2.53526E-2
1.6E1	2.81E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80018E1	-4.29153E-4	-8.79999E1	5.72205E-4	5.48363E-3	9.32932E-2	2.73051E1	-3.26747E1	-3.26351E1	2.68134E1	1.70318E-8	2.51679E-3	2.51679E-3	6.3126E-3	2.51062E-2
1.7E1	3.55E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80017E1	-4.05312E-4	-8.80002E1	4.52995E-4	5.74589E-3	9.32455E-2	2.73128E1	-3.26803E1	-3.26236E1	2.67902E1	1.69919E-8	2.52266E-3	2.52266E-3	6.28377E-3	2.52612E-2
1.8E1	1.373E3	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80018E1	-7.15256E-5	-8.80001E1	1.90735E-4	5.53131E-3	9.34362E-2	2.73117E1	-3.26398E1	-3.26236E1	2.68508E1	1.70028E-8	2.52384E-3	2.52384E-3	6.31817E-3	2.51494E-2
1.9E1	2.561E3	2.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80019E1	-2.14577E-4	-8.80001E1	3.8147E-4	5.8651E-3	9.31025E-2	2.72919E1	-3.26687E1	-3.26116E1	2.67758E1	1.70023E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.52051E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80016E1	-2.14577E-4	-8.80003E1	2.14577E-4	5.48363E-3	9.30309E-2	2.73087E1	-3.26729E1	-3.26302E1	2.6822E1	1.70318E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.52928E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80016E1	-5.24521E-4	-8.8E1	2.14577E-4	5.48363E-3	9.3317E-2	2.73057E1	-3.26573E1	-3.26325E1	2.68064E1	1.70023E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.5227E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80016E1	-5.00679E-4	-8.79998E1	2.14577E-4	5.53131E-3	9.33886E-2	2.72991E1	-3.26452E1	-3.26332E1	2.6801E1	1.701E-8	2.52384E-3	2.52384E-3	6.32896E-3	2.52569E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.8002E1	-5.48363E-4	-8.79999E1	-1.43051E-4	5.76973E-3	9.32217E-2	2.73081E1	-3.26825E1	-3.2635E1	2.67686E1	1.70096E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.53148E-2