[Scan]
initial_time=2016-02-15T17:36:37
final_time=2016-02-15T17:36:57
ip_count=19
run=1030
dataset=1
scan=46
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.76177E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.44743E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=4.3292E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.9946E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.94451E-10
mult1=-9.34568E-9
mult2=-2.77421E-9
rf_tmon=-5.18196E-3
rf_agc=3.2554E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.00913E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67624E0
bslens_imon=2.7627E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19907E1
lens5a_imon=1.96598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.00216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05354E1
cs_ea1_imon=2.47389E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97638E0
lens1_imon=1.42834E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.57453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.99207E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.90017E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=2.86521E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15695E1
os_ea1_imon=1.90723E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.21103E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.05586E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.94268E-10
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-5.82074E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.47578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98633E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.49121E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=1.89272E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33487E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51035E-1
os_ea2_imon=-4.05069E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00782E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58674E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33153E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.85404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6814E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.00298E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=3.39568E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.53029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.5888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.16927E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25201E0
defgridb_imon=6.26318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.60804E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.77042E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66361E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=1.0001E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62672E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66715E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.28755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.8572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6939E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22397E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.5128E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.0314E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.176E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80018E1	-9.53674E-5	-8.79999E1	7.15256E-5	5.48363E-3	9.31025E-2	2.73195E1	-3.26645E1	-3.26428E1	2.67804E1	1.70244E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.53148E-2
2.0E0	3.067E3	1.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80017E1	-3.09944E-4	-8.8E1	2.38419E-5	5.38826E-3	9.30548E-2	2.73116E1	-3.26679E1	-3.26012E1	2.6825E1	1.701E-8	2.52276E-3	2.52276E-3	6.32896E-3	2.51709E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80021E1	-3.57628E-4	-8.80001E1	3.33786E-4	5.126E-3	9.29356E-2	2.73351E1	-3.26554E1	-3.26217E1	2.67668E1	1.7017E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.50741E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80019E1	-4.52995E-4	-8.80004E1	3.09944E-4	5.29289E-3	9.30071E-2	2.73149E1	-3.26955E1	-3.26127E1	2.67962E1	1.69727E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.50305E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80018E1	-2.38419E-4	-8.80002E1	1.66893E-4	5.26905E-3	9.32217E-2	2.72935E1	-3.26817E1	-3.26407E1	2.67962E1	1.70028E-8	2.51739E-3	2.51739E-3	6.33977E-3	2.50852E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80017E1	-5.48363E-4	-8.80001E1	2.38419E-4	5.65052E-3	9.31501E-2	2.73069E1	-3.26873E1	-3.26374E1	2.684E1	1.70096E-8	2.52757E-3	2.52757E-3	6.31837E-3	2.51177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.80014E1	-8.34465E-4	-8.80004E1	2.6226E-4	5.45979E-3	9.31025E-2	2.72968E1	-3.26301E1	-3.2629E1	2.67949E1	1.69875E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.51395E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80017E1	-2.86102E-4	-8.80002E1	1.90735E-4	5.26905E-3	9.33647E-2	2.72883E1	-3.26825E1	-3.2632E1	2.68057E1	1.70096E-8	2.52209E-3	2.52209E-3	6.29098E-3	2.50305E-2
1.2E1	5.6E1	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80016E1	-4.76837E-5	-8.8E1	2.14577E-4	5.26905E-3	9.31501E-2	2.72799E1	-3.26633E1	-3.26158E1	2.6807E1	1.69949E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.5227E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80018E1	-4.29153E-4	-8.79999E1	-4.76837E-5	5.10216E-3	9.30309E-2	2.73213E1	-3.26663E1	-3.26428E1	2.67776E1	1.70023E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.51832E-2
1.4E1	5.0E1	0.0E0	5.66E2	3.82E2	-7.09279E-2	-8.80018E1	-4.29153E-4	-8.8E1	2.14577E-4	5.36442E-3	9.32693E-2	2.73231E1	-3.26783E1	-3.26206E1	2.67982E1	1.70023E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.51832E-2
1.5E1	4.3E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.80018E1	-1.90735E-4	-8.79999E1	2.38419E-4	5.34058E-3	9.33409E-2	2.73087E1	-3.26633E1	-3.26182E1	2.68278E1	1.69949E-8	2.52099E-3	2.52099E-3	6.34037E-3	2.50305E-2
1.6E1	2.44E2	0.0E0	6.47E2	4.41E2	-7.14689E-2	-8.80018E1	-5.24521E-4	-8.80002E1	1.90735E-4	5.38826E-3	9.34839E-2	2.73111E1	-3.26717E1	-3.26188E1	2.67949E1	1.70318E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.50959E-2
1.7E1	3.53E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80017E1	-4.76837E-4	-8.80004E1	2.38419E-5	5.19753E-3	9.32455E-2	2.72962E1	-3.26437E1	-3.25947E1	2.68004E1	1.70023E-8	2.52099E-3	2.52099E-3	6.28006E-3	2.51613E-2
1.8E1	1.373E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80016E1	-1.90735E-4	-8.8E1	3.33786E-4	5.6982E-3	9.33409E-2	2.72925E1	-3.26693E1	-3.2626E1	2.68208E1	1.70028E-8	2.51954E-3	2.51954E-3	6.30202E-3	2.50852E-2
1.9E1	2.521E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80021E1	-5.72205E-4	-8.80003E1	1.90735E-4	5.29289E-3	9.3317E-2	2.73393E1	-3.26679E1	-3.26319E1	2.67932E1	1.701E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.52139E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80017E1	-4.76837E-5	-8.80001E1	2.86102E-4	5.76973E-3	9.34124E-2	2.73263E1	-3.26679E1	-3.26419E1	2.67538E1	1.7017E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.52928E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80017E1	-2.6226E-4	-8.80001E1	1.66893E-4	5.07832E-3	9.31025E-2	2.73069E1	-3.26603E1	-3.2629E1	2.68346E1	1.70173E-8	2.52492E-3	2.52492E-3	6.31278E-3	2.51494E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80018E1	-4.76837E-5	-8.80002E1	9.53674E-5	5.45979E-3	9.30548E-2	2.72919E1	-3.26675E1	-3.26224E1	2.6768E1	1.70023E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.50523E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.8002E1	-7.15256E-5	-8.8E1	1.90735E-4	5.19753E-3	9.30309E-2	2.72992E1	-3.26579E1	-3.26248E1	2.6814E1	1.70173E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.5128E-2