[Scan]
initial_time=2016-02-15T17:37:04
final_time=2016-02-15T17:37:23
ip_count=19
run=1030
dataset=1
scan=47
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13143E-2
qbias_imon=-3.76403E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.20317E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=4.53377E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.95814E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.98135E-10
mult1=-9.34305E-9
mult2=-2.79247E-9
rf_tmon=-4.206E-3
rf_agc=3.2901E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.70412E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6084E0
bslens_imon=2.30966E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19547E1
lens5a_imon=2.00704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.05309E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.98414E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.01891E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04522E1
cs_ea1_imon=2.48663E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07548E0
lens1_imon=1.82476E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.53488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.98666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=4.25625E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=2.85007E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14444E1
os_ea1_imon=1.85697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.24501E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93685E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.04973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.84695E-10
tplens_vset=1.4E-1
tplens_vmon=1.58362E0
tplens_imon=-6.28052E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.60638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03001E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.68528E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22378E0
ionrepsh_imon=1.86653E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34171E1
lens5b_imon=2.2233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.04126E-1
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00244E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64381E0
os_ef2alow_imon=-2.75285E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43965E-1
os_ef2bup_imon=-5.49907E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.8753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.33503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.25722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.15991E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=4.57633E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.3296E-1
window_imon=-1.21035E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86122E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.21528E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=7.02769E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=6.87195E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64474E0
defgridb_imon=6.34104E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3386E1
os_fil1_imon=5.45497E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.31101E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66366E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=9.98846E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62162E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67064E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=5.71595E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.51924E-2
chamber_ion_pmon=1.69955E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6621E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.137E3	2.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80017E1	-5.24521E-4	-8.80005E1	2.38419E-5	5.76973E-3	9.3317E-2	2.7252E1	-3.26579E1	-3.2698E1	2.67764E1	1.70173E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.50852E-2
2.0E0	2.863E3	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.8002E1	-2.14577E-4	-8.8E1	9.53674E-5	5.17368E-3	9.36031E-2	2.73033E1	-3.26543E1	-3.26314E1	2.68058E1	1.7017E-8	2.5188E-3	2.5188E-3	6.34037E-3	2.52051E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80019E1	-6.91414E-4	-8.80001E1	0.0E0	5.48363E-3	9.32932E-2	2.73002E1	-3.26493E1	-3.26113E1	2.68292E1	1.70023E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.51832E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80018E1	-4.52995E-4	-8.80005E1	2.38419E-5	5.55515E-3	9.34124E-2	2.73261E1	-3.26404E1	-3.26368E1	2.67854E1	1.70168E-8	2.51581E-3	2.51581E-3	6.31299E-3	2.51737E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80018E1	-4.76837E-5	-8.80002E1	-1.43051E-4	5.55515E-3	9.33886E-2	2.73175E1	-3.26614E1	-3.26384E1	2.68484E1	1.70463E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.52354E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80021E1	0.0E0	-8.80003E1	7.15256E-5	5.36442E-3	9.34124E-2	2.72877E1	-3.26963E1	-3.26056E1	2.67668E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.51832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80019E1	-2.6226E-4	-8.80005E1	4.29153E-4	5.24521E-3	9.28879E-2	2.72666E1	-3.26825E1	-3.26086E1	2.68118E1	1.69949E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80018E1	-3.57628E-4	-8.80003E1	4.05312E-4	5.24521E-3	9.27925E-2	2.73231E1	-3.26903E1	-3.26272E1	2.68128E1	1.7017E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.51395E-2
1.2E1	6.7E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80018E1	0.0E0	-8.80005E1	2.38419E-4	5.03063E-3	9.29117E-2	2.729E1	-3.26561E1	-3.26191E1	2.67998E1	1.70318E-8	2.52599E-3	2.52599E-3	6.33436E-3	2.50852E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80019E1	-2.86102E-4	-8.80001E1	2.38419E-4	5.31673E-3	9.29594E-2	2.73255E1	-3.26837E1	-3.26416E1	2.68128E1	1.69955E-8	2.51525E-3	2.51525E-3	6.29665E-3	2.52785E-2
1.4E1	5.2E1	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80018E1	-2.14577E-4	-8.8E1	3.09944E-4	5.4121E-3	9.31978E-2	2.73057E1	-3.26726E1	-3.26225E1	2.67824E1	1.70245E-8	2.52243E-3	2.52243E-3	6.32371E-3	2.50581E-2
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80018E1	-4.76837E-5	-8.8E1	3.57628E-4	5.60284E-3	9.31263E-2	2.72967E1	-3.26302E1	-3.2629E1	2.6804E1					
1.6E1	2.52E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80019E1	4.76837E-5	-8.8E1	3.33786E-4	5.48363E-3	9.30309E-2	2.73075E1	-3.26639E1	-3.26128E1	2.67565E1	1.701E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.51066E-2
1.7E1	3.7E2	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80019E1	-3.8147E-4	-8.8E1	9.53674E-5	5.48363E-3	9.32693E-2	2.73165E1	-3.26909E1	-3.26272E1	2.68208E1	1.70096E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.50088E-2
1.8E1	1.367E3	2.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80019E1	4.76837E-5	-8.80001E1	3.09944E-4	5.53131E-3	9.3174E-2	2.73057E1	-3.26855E1	-3.26236E1	2.6834E1	1.70168E-8	2.52362E-3	2.52362E-3	6.31858E-3	2.50847E-2
1.9E1	2.509E3	2.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80021E1	-6.19888E-4	-8.80001E1	2.38419E-4	5.74589E-3	9.33886E-2	2.72973E1	-3.26879E1	-3.26242E1	2.67956E1	1.69875E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.50959E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.8002E1	-4.76837E-4	-8.79999E1	3.09944E-4	5.74589E-3	9.33409E-2	2.72913E1	-3.26651E1	-3.26447E1	2.67779E1	1.701E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.51494E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80016E1	-1.66893E-4	-8.79999E1	1.43051E-4	5.45979E-3	9.3317E-2	2.73057E1	-3.26921E1	-3.26054E1	2.681E1	1.69789E-8	2.51694E-3	2.51694E-3	6.30478E-3	2.52055E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80021E1	-1.90735E-4	-8.8E1	1.19209E-4	5.14984E-3	9.3174E-2	2.72949E1	-3.26711E1	-3.26116E1	2.6774E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.13143E-2	-8.80017E1	-4.05312E-4	-8.79999E1	1.90735E-4	4.95911E-3	9.33647E-2	2.73351E1	-3.26681E1	-3.26206E1	2.6807E1	1.69955E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.51924E-2