[Scan]
initial_time=2016-02-15T17:37:57
final_time=2016-02-15T17:38:16
ip_count=19
run=1030
dataset=1
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.77736E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.22952E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=4.3062E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.9612E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=8.88121E-10
mult1=-1.02461E-8
mult2=-2.78847E-9
rf_tmon=-4.39226E-3
rf_agc=3.31894E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.54617E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65253E0
bslens_imon=2.20694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19325E1
lens5a_imon=1.98759E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12555E2
lens4a_imon=2.05509E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53512E1
cs_ef1b_imon=2.96905E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04021E1
cs_ea1_imon=2.4651E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00792E0
lens1_imon=1.87868E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64502E1
os_ef1alow_imon=2.97466E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04466E1
cs_ea2_imon=1.56772E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.98589E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=4.15206E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=2.8811E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1502E1
os_ea1_imon=1.85323E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63411E1
os_ef1bup_imon=3.08245E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19421E0
cs_ionrep_imon=1.24022E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93748E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01784E1
cs_anode1_imon=3.05325E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=8.13556E-10
tplens_vset=1.4E-1
tplens_vmon=1.62489E0
tplens_imon=-5.45119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.47993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.60932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03021E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.63581E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.19739E0
ionrepsh_imon=1.85514E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33601E1
lens5b_imon=2.21432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74682E1
cs_ef2b_imon=3.13035E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.19475E-1
os_ea2_imon=-4.22975E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.0023E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71158E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61096E0
os_ef2alow_imon=-2.64542E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29642E-1
os_ef2bup_imon=-5.31388E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10762E1
os_restr2_imon=2.868E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.32028E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.26095E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.13563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.0768E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.06074E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=3.91924E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10332E0
cs_ionaccel_imon=-1.88194E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47155E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56112E1
einzel_imon=7.81883E-6
window_vset=0.0E0
window_vmon=2.17597E-1
window_imon=-1.12968E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86363E1
mask2_imon=-6.61857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.95918E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.60414E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50098E3
multb_neg_imon=6.7301E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.72302E0
defgridb_imon=6.47054E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33853E1
os_fil1_imon=4.44216E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46741E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=9.97392E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6244E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66805E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18068E-2
os_fil2_imon=-2.56894E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.55721E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78448E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34223E-1
cs_fil2_imon=-1.98884E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.17899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22386E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.52051E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.93691E-1
res40_imon=-2.59677E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.18E3	1.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80023E1	-5.48363E-4	-8.80003E1	2.86102E-4	5.03063E-3	9.31025E-2	2.72921E1	-3.26396E1	-3.26077E1	2.67891E1	1.70092E-8	2.52473E-3	2.52473E-3	6.31299E-3	2.52854E-2
2.0E0	3.033E3	7.0E0	3.16E2	1.6E2	-7.23964E-2	-8.8002E1	-5.24521E-4	-8.80003E1	5.96046E-4	5.38826E-3	9.32693E-2	2.73045E1	-3.26627E1	-3.2638E1	2.67878E1	1.69811E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.51924E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80021E1	-5.96046E-4	-8.80005E1	4.76837E-4	5.36442E-3	9.34601E-2	2.73102E1	-3.26761E1	-3.26471E1	2.67955E1	1.70168E-8	2.52362E-3	2.52362E-3	6.33538E-3	2.52183E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80022E1	-4.29153E-4	-8.80002E1	3.8147E-4	5.65052E-3	9.31263E-2	2.73003E1	-3.26909E1	-3.25918E1	2.68328E1	1.70178E-8	2.52405E-3	2.52405E-3	6.30221E-3	2.5189E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80017E1	-3.09944E-4	-8.80002E1	5.72205E-4	5.38826E-3	9.32455E-2	2.72985E1	-3.26512E1	-3.26368E1	2.67872E1	1.69883E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.50852E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.8002E1	-3.57628E-4	-8.80003E1	2.86102E-4	5.24521E-3	9.31978E-2	2.73171E1	-3.26591E1	-3.26452E1	2.67872E1	1.70614E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.53148E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80019E1	-2.86102E-4	-8.80005E1	2.38419E-4	5.53131E-3	9.35555E-2	2.73157E1	-3.26472E1	-3.26207E1	2.68244E1	1.70985E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.53148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80018E1	-3.8147E-4	-8.80002E1	4.29153E-4	5.67436E-3	9.33886E-2	2.7321E1	-3.26529E1	-3.2615E1	2.67812E1	1.69875E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.52489E-2
1.2E1	5.7E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80018E1	-4.05312E-4	-8.80002E1	5.48363E-4	5.22137E-3	9.35078E-2	2.72856E1	-3.26626E1	-3.25912E1	2.68507E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.52051E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80019E1	-5.00679E-4	-8.80002E1	2.86102E-4	5.60284E-3	9.34362E-2	2.73088E1	-3.2694E1	-3.26364E1	2.67537E1	1.7017E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.50741E-2
1.4E1	4.1E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80018E1	-6.4373E-4	-8.8E1	2.38419E-4	5.96046E-3	9.31978E-2	2.7311E1	-3.26773E1	-3.26284E1	2.68238E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.5227E-2
1.5E1	3.9E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80019E1	-6.67572E-4	-8.80003E1	7.15256E-5	5.79357E-3	9.33886E-2	2.73033E1	-3.2653E1	-3.26158E1	2.68132E1	1.70318E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.53E-2
1.6E1	2.46E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80018E1	-7.62939E-4	-8.80001E1	1.19209E-4	5.14984E-3	9.2864E-2	2.73153E1	-3.26543E1	-3.26458E1	2.6801E1	1.70092E-8	2.52027E-3	2.52027E-3	6.31858E-3	2.5107E-2
1.7E1	3.31E2	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.8002E1	-6.19888E-4	-8.80003E1	2.86102E-4	5.38826E-3	9.28879E-2	2.73291E1	-3.26597E1	-3.25984E1	2.68316E1	1.7017E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.51177E-2
1.8E1	1.377E3	3.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80018E1	-4.76837E-4	-8.8E1	-9.53674E-5	5.22137E-3	9.31501E-2	2.73195E1	-3.26621E1	-3.26338E1	2.68124E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51832E-2
1.9E1	2.465E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80017E1	-4.05312E-4	-8.80002E1	-9.53674E-5	5.31673E-3	9.3174E-2	2.73069E1	-3.2638E1	-3.262E1	2.67926E1	1.70023E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.5227E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80016E1	-7.15256E-4	-8.80002E1	-4.76837E-5	5.126E-3	9.28402E-2	2.73051E1	-3.26708E1	-3.26425E1	2.67595E1	1.701E-8	2.51954E-3	2.51954E-3	6.30202E-3	2.50638E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80014E1	-8.34465E-4	-8.80004E1	1.43051E-4	5.36442E-3	9.28879E-2	2.73151E1	-3.26585E1	-3.26195E1	2.68082E1	1.70246E-8	2.51525E-3	2.51525E-3	6.29665E-3	2.52569E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80017E1	-5.72205E-4	-8.80004E1	-2.38419E-5	5.19753E-3	9.34362E-2	2.73092E1	-3.2652E1	-3.26467E1	2.68076E1	1.70028E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.51066E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80017E1	-5.96046E-4	-8.80003E1	-2.38419E-5	5.24521E-3	9.31263E-2	2.72937E1	-3.26915E1	-3.2629E1	2.68208E1	1.70023E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.52051E-2