[Scan]
initial_time=2016-02-15T17:38:24
final_time=2016-02-15T17:38:43
ip_count=19
run=1030
dataset=1
scan=50
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.80992E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.57237E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=4.45938E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.96083E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.85165E-10
mult1=-9.43937E-9
mult2=-2.72061E-9
rf_tmon=-4.70469E-3
rf_agc=3.29911E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=4.24051E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.97045E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05233E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=2.96792E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=2.46541E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9999E0
lens1_imon=1.54279E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.57247E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.98378E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=4.03023E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15582E1
os_ea1_imon=1.88177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=1.21522E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.9364E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.06451E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=8.12554E-10
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26452E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03016E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.8939E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.88538E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54127E-1
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23543E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.27092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.11692E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=3.74055E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.75772E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.15712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=6.30853E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33868E1
os_fil1_imon=4.54797E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.25695E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66495E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=9.99309E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6658E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67855E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22399E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.52569E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37378E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.17E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80016E1	-3.8147E-4	-8.80002E1	3.57628E-4	4.93526E-3	9.36031E-2	2.73225E1	-3.26933E1	-3.26494E1	2.681E1	1.70017E-8	2.51693E-3	2.51693E-3	6.33538E-3	2.50626E-2
2.0E0	2.883E3	1.0E0	3.16E2	1.6E2	-7.27828E-2	-8.8002E1	-6.4373E-4	-8.80003E1	4.05312E-4	4.86374E-3	9.32455E-2	2.72893E1	-3.26677E1	-3.26065E1	2.68124E1	1.69883E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.50638E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80018E1	-7.15256E-4	-8.80001E1	5.72205E-4	5.55515E-3	9.31263E-2	2.72883E1	-3.26933E1	-3.2653E1	2.678E1	1.70087E-8	2.52161E-3	2.52161E-3	6.29883E-3	2.50532E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80021E1	-4.05312E-4	-8.80001E1	4.52995E-4	5.26905E-3	9.36508E-2	2.73207E1	-3.26765E1	-3.26392E1	2.67968E1	1.70244E-8	2.51334E-3	2.51334E-3	6.28552E-3	2.50959E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80017E1	-5.48363E-4	-8.80003E1	5.24521E-4	5.60284E-3	9.33647E-2	2.73104E1	-3.26242E1	-3.2659E1	2.68082E1	1.69955E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.50638E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80019E1	-3.33786E-4	-8.80002E1	1.43051E-4	5.126E-3	9.34124E-2	2.72859E1	-3.26368E1	-3.26326E1	2.67782E1	1.69738E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.51494E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.8002E1	-3.09944E-4	-8.80002E1	1.90735E-4	4.79221E-3	9.31978E-2	2.73163E1	-3.26408E1	-3.2636E1	2.67962E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.50741E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80019E1	-1.66893E-4	-8.80004E1	4.76837E-5	5.24521E-3	9.33886E-2	2.73021E1	-3.26591E1	-3.26266E1	2.67938E1	1.70244E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.50523E-2
1.2E1	5.8E1	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80018E1	-4.29153E-4	-8.80002E1	-4.76837E-5	5.38826E-3	9.32932E-2	2.73153E1	-3.26476E1	-3.2626E1	2.68274E1	1.70318E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51832E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80018E1	-9.53674E-5	-8.8E1	-9.53674E-5	5.19753E-3	9.32217E-2	2.73443E1	-3.26627E1	-3.2664E1	2.68052E1	1.69949E-8	2.52538E-3	2.52538E-3	6.29645E-3	2.5227E-2
1.4E1	4.6E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80018E1	-3.09944E-4	-8.80003E1	4.76837E-5	5.14984E-3	9.32455E-2	2.73175E1	-3.2688E1	-3.26219E1	2.67986E1	1.70023E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.52709E-2
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80019E1	-6.91414E-4	-8.80003E1	-7.15256E-5	5.24521E-3	9.33886E-2	2.73099E1	-3.26693E1	-3.26104E1	2.68004E1	1.69949E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.51613E-2
1.6E1	2.4E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-5.48363E-4	-8.80005E1	1.19209E-4	5.57899E-3	9.36508E-2	2.73281E1	-3.26632E1	-3.26372E1	2.67962E1	1.69955E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.51066E-2
1.7E1	3.47E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80017E1	-6.67572E-4	-8.80003E1	9.53674E-5	5.6982E-3	9.3627E-2	2.72979E1	-3.26627E1	-3.26482E1	2.67842E1	1.7017E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.52928E-2
1.8E1	1.434E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80017E1	-4.76837E-4	-8.80003E1	1.90735E-4	5.76973E-3	9.32217E-2	2.72901E1	-3.26543E1	-3.26272E1	2.68128E1	1.69875E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.52489E-2
1.9E1	2.507E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80019E1	-4.52995E-4	-8.8E1	7.15256E-5	5.38826E-3	9.3317E-2	2.7349E1	-3.2626E1	-3.2638E1	2.67982E1	1.69811E-8	2.51203E-3	2.51203E-3	6.33436E-3	2.52354E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80018E1	-3.33786E-4	-8.80003E1	4.76837E-5	5.72205E-3	9.31978E-2	2.73181E1	-3.26626E1	-3.26201E1	2.68215E1	1.70168E-8	2.52027E-3	2.52027E-3	6.31299E-3	2.52183E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.8002E1	-4.05312E-4	-8.80004E1	-2.38419E-5	5.6982E-3	9.33409E-2	2.73143E1	-3.26511E1	-3.2634E1	2.67451E1	1.70028E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.51494E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80017E1	-3.8147E-4	-8.80008E1	7.15256E-5	5.48363E-3	9.31263E-2	2.73411E1	-3.26372E1	-3.26679E1	2.67601E1	1.70096E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51395E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.8002E1	-5.48363E-4	-8.80004E1	3.09944E-4	5.4121E-3	9.34362E-2	2.72991E1	-3.26633E1	-3.26452E1	2.68028E1	1.70028E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.52569E-2