[Scan]
initial_time=2016-02-15T17:39:17
final_time=2016-02-15T17:39:36
ip_count=19
run=1030
dataset=1
scan=52
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.75801E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.38556E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=4.11713E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.87277E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=9.02557E-10
mult1=-9.95712E-9
mult2=-2.8284E-9
rf_tmon=-4.51242E-3
rf_agc=3.29911E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=4.20487E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60663E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05383E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=2.96756E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.01951E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.48628E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05484E0
lens1_imon=1.66548E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.53488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.98054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.16374E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=2.87314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=1.23333E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=3.04649E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=8.0142E-10
tplens_vset=1.4E-1
tplens_vmon=1.60191E0
tplens_imon=-3.48439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2605E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.59399E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98332E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.51505E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=1.88104E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.68732E-1
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60116E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45166E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.86233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.32795E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.2529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.09918E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67856E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.0555E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.37136E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.40287E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.94982E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.07016E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56796E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33834E1
os_fil1_imon=5.13061E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.97775E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66499E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=9.9839E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62312E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66369E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58886E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22313E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31847E-3
inlet_lpb_pmon=2.52117E-2
chamber_ion_pmon=1.69945E-8
chamber_cvt_pmon=2.51898E-3
foreline_cvt_pmon=2.51898E-3
chamber_tmon=1.40129E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3017E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.136E3	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80019E1	-3.57628E-4	-8.80002E1	2.14577E-4	5.29289E-3	9.31025E-2	2.73169E1	-3.26738E1	-3.26366E1	2.67776E1	1.69949E-8	2.52099E-3	2.52099E-3	6.34037E-3	2.51395E-2
2.0E0	2.975E3	2.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80019E1	-6.19888E-4	-8.79999E1	3.09944E-4	5.45979E-3	9.32693E-2	2.73027E1	-3.26566E1	-3.26334E1	2.68412E1	1.70247E-8	2.52236E-3	2.52236E-3	6.3074E-3	2.50329E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80018E1	-2.86102E-4	-8.79999E1	-2.14577E-4	5.57899E-3	9.32217E-2	2.73039E1	-3.2662E1	-3.26095E1	2.68262E1	1.70165E-8	2.52066E-3	2.52066E-3	6.3131E-3	2.51185E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.8002E1	-4.05312E-4	-8.79999E1	-7.15256E-5	5.43594E-3	9.31501E-2	2.73287E1	-3.26632E1	-3.26225E1	2.67775E1	1.70173E-8	2.51203E-3	2.51203E-3	6.31278E-3	2.51709E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80018E1	-1.90735E-4	-8.80001E1	7.15256E-5	4.98295E-3	9.30786E-2	2.73123E1	-3.26573E1	-3.26068E1	2.68136E1	1.69962E-8	2.51498E-3	2.51498E-3	6.3074E-3	2.52435E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80014E1	-4.76837E-5	-8.80001E1	9.53674E-5	5.24521E-3	9.30786E-2	2.73016E1	-3.26667E1	-3.26213E1	2.6822E1	1.70096E-8	2.51935E-3	2.51935E-3	6.31837E-3	2.52161E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80015E1	-3.8147E-4	-8.80002E1	2.14577E-4	5.38826E-3	9.3174E-2	2.73147E1	-3.26524E1	-3.2593E1	2.68136E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80019E1	-6.19888E-4	-8.80003E1	7.15256E-5	5.53131E-3	9.28402E-2	2.72666E1	-3.26585E1	-3.26044E1	2.68238E1	1.70023E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.52051E-2
1.2E1	6.8E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80021E1	-4.76837E-4	-8.8E1	2.14577E-4	5.17368E-3	9.30548E-2	2.72992E1	-3.26242E1	-3.26278E1	2.68018E1	1.69949E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.51395E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80016E1	-7.15256E-5	-8.80003E1	1.43051E-4	5.45979E-3	9.32693E-2	2.73141E1	-3.26621E1	-3.25701E1	2.68352E1	1.70173E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.52354E-2
1.4E1	3.9E1	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80023E1	-2.38419E-5	-8.79998E1	3.33786E-4	5.29289E-3	9.31978E-2	2.73195E1	-3.26591E1	-3.26218E1	2.68166E1	1.701E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.50852E-2
1.5E1	4.6E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.8002E1	-2.86102E-4	-8.80003E1	2.14577E-4	5.31673E-3	9.32932E-2	2.72986E1	-3.2675E1	-3.26508E1	2.67686E1	1.70096E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.52051E-2
1.6E1	2.43E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80019E1	-5.24521E-4	-8.80004E1	1.90735E-4	5.48363E-3	9.3174E-2	2.72916E1	-3.26529E1	-3.26034E1	2.68004E1	1.70244E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.52709E-2
1.7E1	3.25E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80015E1	-5.48363E-4	-8.80005E1	-4.76837E-5	5.45979E-3	9.28164E-2	2.72973E1	-3.26452E1	-3.26236E1	2.67968E1	1.7017E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.52709E-2
1.8E1	1.264E3	1.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80016E1	-5.72205E-4	-8.80005E1	1.19209E-4	5.07832E-3	9.31025E-2	2.7321E1	-3.26461E1	-3.26349E1	2.6794E1	1.69949E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.52051E-2
1.9E1	2.57E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80017E1	-4.52995E-4	-8.80005E1	2.14577E-4	5.38826E-3	9.3174E-2	2.73099E1	-3.26675E1	-3.26362E1	2.68035E1	1.701E-8	2.51847E-3	2.51847E-3	6.33436E-3	2.52139E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80017E1	-6.19888E-4	-8.80006E1	2.6226E-4	5.53131E-3	9.32455E-2	2.72968E1	-3.26832E1	-3.26189E1	2.67968E1	1.7017E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.50959E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80014E1	-6.19888E-4	-8.80003E1	6.4373E-4	5.34058E-3	9.30786E-2	2.72966E1	-3.26812E1	-3.25873E1	2.68105E1	1.69949E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.50741E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80017E1	-7.86781E-4	-8.79999E1	4.29153E-4	5.29289E-3	9.31501E-2	2.73126E1	-3.26379E1	-3.26503E1	2.68313E1	1.70248E-8	2.51783E-3	2.51783E-3	6.3282E-3	2.51475E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80014E1	-5.48363E-4	-8.8E1	2.6226E-4	5.34058E-3	9.30071E-2	2.73393E1	-3.26765E1	-3.2605E1	2.67856E1	1.69945E-8	2.51898E-3	2.51898E-3	6.31847E-3	2.52117E-2