[Scan]
initial_time=2016-02-15T17:39:43
final_time=2016-02-15T17:40:03
ip_count=19
run=1030
dataset=1
scan=53
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.85568E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.91326E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=4.41957E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.92302E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.80194E-10
mult1=-9.61998E-9
mult2=-2.60483E-9
rf_tmon=-5.23342E-3
rf_agc=3.33756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.46033E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19606E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05157E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.97297E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.46893E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99054E0
lens1_imon=1.51683E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04245E1
cs_ea2_imon=1.56922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.9845E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.18925E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=2.87278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=1.87714E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=1.22306E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.05874E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.72381E-10
tplens_vset=1.4E-1
tplens_vmon=1.62963E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.47755E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98594E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.50468E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24974E0
ionrepsh_imon=1.88352E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28029E-1
os_ea2_imon=-3.97991E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70831E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60356E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=2.86593E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.29043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.26731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72769E1
iondef1_imon=1.10449E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.05467E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=4.16541E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.42764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.20655E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33848E1
os_fil1_imon=4.59002E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00177E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66498E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=9.99411E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62222E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66608E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80044E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.5227E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.0285E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.139E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80017E1	-1.66893E-4	-8.8E1	1.43051E-4	5.34058E-3	9.30548E-2	2.72733E1	-3.26768E1	-3.26536E1	2.6792E1	1.7017E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.52489E-2
2.0E0	2.859E3	2.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80017E1	-9.53674E-5	-8.80004E1	-1.90735E-4	5.57899E-3	9.30309E-2	2.73063E1	-3.26661E1	-3.2603E1	2.67932E1	1.7017E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.52928E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80019E1	-2.6226E-4	-8.80001E1	-2.38419E-5	5.24521E-3	9.32217E-2	2.73003E1	-3.26392E1	-3.26236E1	2.67968E1	1.7017E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.52709E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80017E1	-9.53674E-5	-8.80003E1	-2.38419E-5	5.38826E-3	9.31263E-2	2.73075E1	-3.26422E1	-3.26543E1	2.67854E1	1.7017E-8	2.52318E-3	2.52318E-3	6.29645E-3	2.51395E-2
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80018E1	-3.09944E-4	-8.80001E1	1.43051E-4	5.48363E-3	9.32932E-2	2.72907E1	-3.26711E1	-3.2608E1	2.68262E1	1.70028E-8	2.52599E-3	2.52599E-3	6.3074E-3	2.52139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80017E1	-1.90735E-4	-8.8E1	3.33786E-4	5.53131E-3	9.31025E-2	2.72903E1	-3.26573E1	-3.26467E1	2.67445E1	1.69949E-8	2.52428E-3	2.52428E-3	6.30192E-3	2.50959E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80017E1	0.0E0	-8.8E1	2.6226E-4	5.53131E-3	9.31978E-2	2.72985E1	-3.26717E1	-3.26368E1	2.6804E1	1.70244E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.50523E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80017E1	0.0E0	-8.80002E1	5.00679E-4	5.48363E-3	9.30071E-2	2.72943E1	-3.26554E1	-3.2635E1	2.6792E1	1.70173E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.52569E-2
1.2E1	5.8E1	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80018E1	-3.33786E-4	-8.8E1	2.86102E-4	5.4121E-3	9.31263E-2	2.72968E1	-3.26437E1	-3.26201E1	2.68028E1	1.7017E-8	2.52757E-3	2.52757E-3	6.31837E-3	2.5227E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80018E1	-2.6226E-4	-8.80003E1	3.57628E-4	5.36442E-3	9.27448E-2	2.72831E1	-3.26413E1	-3.26676E1	2.684E1	1.7017E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.52489E-2
1.4E1	4.6E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80016E1	-4.29153E-4	-8.80001E1	1.66893E-4	5.60284E-3	9.31025E-2	2.72961E1	-3.26675E1	-3.2632E1	2.67758E1	1.7017E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.52489E-2
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80017E1	-2.86102E-4	-8.80005E1	1.43051E-4	5.24521E-3	9.31978E-2	2.73045E1	-3.26614E1	-3.26337E1	2.67891E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.52489E-2
1.6E1	2.23E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80016E1	-4.76837E-4	-8.79999E1	1.19209E-4	5.62668E-3	9.28402E-2	2.7298E1	-3.26514E1	-3.26136E1	2.68082E1	1.701E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.5128E-2
1.7E1	3.36E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80017E1	-1.66893E-4	-8.80001E1	1.90735E-4	5.29289E-3	9.31025E-2	2.73177E1	-3.26651E1	-3.26176E1	2.684E1	1.70062E-8	2.51755E-3	2.51755E-3	6.32916E-3	2.51878E-2
1.8E1	1.31E3	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80014E1	-4.52995E-4	-8.79998E1	-9.53674E-5	5.65052E-3	9.33647E-2	2.73207E1	-3.26494E1	-3.26068E1	2.67595E1					
1.9E1	2.381E3	1.0E0	7.68E2	5.29E2	-7.201E-2	-8.80015E1	-3.8147E-4	-8.8E1	9.53674E-5	5.48363E-3	9.3174E-2	2.73261E1	-3.26512E1	-3.26098E1	2.681E1	1.70092E-8	2.52027E-3	2.52027E-3	6.29067E-3	2.52183E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80018E1	-7.39098E-4	-8.80003E1	1.90735E-4	5.6982E-3	9.32932E-2	2.72915E1	-3.26579E1	-3.26195E1	2.67642E1	1.70244E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.52489E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80018E1	-2.14577E-4	-8.80001E1	-2.38419E-5	5.29289E-3	9.32455E-2	2.72968E1	-3.26679E1	-3.26001E1	2.68124E1	1.70176E-8	2.52342E-3	2.52342E-3	6.32858E-3	2.5159E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80018E1	-1.66893E-4	-8.80003E1	-7.15256E-5	5.36442E-3	9.32932E-2	2.73187E1	-3.26526E1	-3.26337E1	2.67842E1	1.70028E-8	2.52492E-3	2.52492E-3	6.32896E-3	2.52785E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.8002E1	-1.66893E-4	-8.80003E1	2.86102E-4	5.19753E-3	9.33647E-2	2.72769E1	-3.26494E1	-3.26386E1	2.68184E1	1.70023E-8	2.52428E-3	2.52428E-3	6.32936E-3	2.5227E-2