[Scan]
initial_time=2016-02-15T17:40:10
final_time=2016-02-15T17:40:29
ip_count=19
run=1030
dataset=1
scan=54
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.75421E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.41894E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=4.45879E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.02097E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.64327E-10
mult1=-1.04096E-8
mult2=-2.75657E-9
rf_tmon=-4.58616E-3
rf_agc=3.35982E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=4.25804E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61206E0
bslens_imon=2.67835E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.9714E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.50182E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03475E0
lens1_imon=1.46348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64493E1
os_ef1alow_imon=2.98634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.55877E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.99017E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.39405E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.86332E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14873E1
os_ea1_imon=1.89475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63068E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=1.22675E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=3.0562E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=8.19707E-10
tplens_vset=1.4E-1
tplens_vmon=1.62341E0
tplens_imon=-4.68779E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27204E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98566E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=4.54712E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26051E0
ionrepsh_imon=1.8879E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.19937E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46917E-1
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.18408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61349E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52053E-1
os_ef2bup_imon=-5.34088E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10683E1
os_restr2_imon=2.86471E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.32307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.26314E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73234E1
iondef1_imon=1.10959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.04731E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=4.3695E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10813E0
cs_ionaccel_imon=-1.88648E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47174E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.61486E-6
window_vset=0.0E0
window_vmon=1.96255E-1
window_imon=-9.75966E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.2149E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33855E1
os_fil1_imon=4.77365E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79712E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66524E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30777E1
cs_fil1_imon=9.97752E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62239E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=5.9176E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9183E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30401E-1
cs_fil2_imon=-2.33324E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22373E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.52489E-2
chamber_ion_pmon=1.7017E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31028E-1
res40_imon=-2.67536E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.126E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80019E1	-5.24521E-4	-8.8E1	-3.33786E-4	5.31673E-3	9.33409E-2	2.73311E1	-3.26679E1	-3.26083E1	2.67926E1	1.69955E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.51494E-2
2.0E0	2.932E3	3.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80018E1	-3.8147E-4	-8.80002E1	-1.43051E-4	5.29289E-3	9.32693E-2	2.72919E1	-3.26458E1	-3.26314E1	2.68208E1	1.701E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.5021E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80018E1	-5.72205E-4	-8.80003E1	7.15256E-5	5.36442E-3	9.3174E-2	2.73015E1	-3.26518E1	-3.26374E1	2.67974E1	1.70023E-8	2.51443E-3	2.51443E-3	6.29645E-3	2.51613E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-2.86102E-4	-8.79999E1	1.90735E-4	5.43594E-3	9.32932E-2	2.73134E1	-3.26903E1	-3.26266E1	2.67752E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.52051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80017E1	-6.67572E-4	-8.80001E1	1.90735E-4	5.65052E-3	9.31263E-2	2.72865E1	-3.26879E1	-3.26446E1	2.68064E1	1.70096E-8	2.5188E-3	2.5188E-3	6.34588E-3	2.50088E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.8002E1	-6.19888E-4	-8.80002E1	1.19209E-4	5.36442E-3	9.32693E-2	2.72931E1	-3.26482E1	-3.25791E1	2.67955E1	1.70173E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.50424E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80018E1	-6.67572E-4	-8.80003E1	2.38419E-4	5.50747E-3	9.30786E-2	2.72817E1	-3.26621E1	-3.26675E1	2.67982E1	1.70057E-8	2.51787E-3	2.51787E-3	6.33234E-3	2.50903E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80018E1	-6.91414E-4	-8.80002E1	4.76837E-5	5.50747E-3	9.34124E-2	2.72883E1	-3.2596E1	-3.26633E1	2.67878E1					
1.2E1	5.7E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80015E1	-5.96046E-4	-8.80001E1	-4.76837E-5	5.4121E-3	9.31978E-2	2.73009E1	-3.26212E1	-3.26116E1	2.68286E1	1.69949E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.50305E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80014E1	-1.90735E-4	-8.8E1	2.14577E-4	5.26905E-3	9.31978E-2	2.7269E1	-3.25846E1	-3.2605E1	2.68298E1	1.70173E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.50424E-2
1.4E1	2.9E1	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80019E1	-5.72205E-4	-8.80004E1	-4.76837E-5	5.38826E-3	9.30786E-2	2.72979E1	-3.26711E1	-3.26422E1	2.67692E1	1.69641E-8	2.51915E-3	2.51915E-3	6.29624E-3	2.50847E-2
1.5E1	4.5E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80018E1	-4.29153E-4	-8.80002E1	-4.76837E-5	5.76973E-3	9.31978E-2	2.72978E1	-3.26493E1	-3.26168E1	2.67583E1	1.70028E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.51924E-2
1.6E1	2.44E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80019E1	-5.48363E-4	-8.80001E1	4.76837E-5	5.48363E-3	9.30548E-2	2.72921E1	-3.26649E1	-3.26136E1	2.67932E1	1.70092E-8	2.51248E-3	2.51248E-3	6.3074E-3	2.52854E-2
1.7E1	3.0E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80021E1	1.66893E-4	-8.8E1	-2.6226E-4	5.48363E-3	9.33409E-2	2.73248E1	-3.26735E1	-3.26411E1	2.67981E1	1.69883E-8	2.51417E-3	2.51417E-3	6.33436E-3	2.51709E-2
1.8E1	1.356E3	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80018E1	1.43051E-4	-8.80002E1	-3.09944E-4	5.43594E-3	9.3317E-2	2.73088E1	-3.26666E1	-3.26429E1	2.68263E1	1.69891E-8	2.52342E-3	2.52342E-3	6.29684E-3	2.52435E-2
1.9E1	2.401E3	2.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80023E1	0.0E0	-8.80003E1	-9.53674E-5	5.43594E-3	9.31263E-2	2.73339E1	-3.26861E1	-3.26266E1	2.67866E1	1.70165E-8	2.52407E-3	2.52407E-3	6.3131E-3	2.53233E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80024E1	-2.14577E-4	-8.80003E1	-9.53674E-5	5.10216E-3	9.29356E-2	2.72865E1	-3.26434E1	-3.26392E1	2.6828E1	1.69875E-8	2.51007E-3	2.51007E-3	6.34037E-3	2.50959E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80021E1	-3.8147E-4	-8.80001E1	-1.90735E-4	5.05447E-3	9.30309E-2	2.73188E1	-3.2626E1	-3.26419E1	2.67746E1	1.70096E-8	2.52428E-3	2.52428E-3	6.32936E-3	2.51395E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80017E1	-7.15256E-5	-8.80003E1	-4.76837E-5	5.72205E-3	9.29117E-2	2.73155E1	-3.26297E1	-3.26285E1	2.67914E1	1.70104E-8	2.51919E-3	2.51919E-3	6.30212E-3	2.5159E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80016E1	-1.90735E-4	-8.80003E1	1.19209E-4	5.34058E-3	9.27925E-2	2.73234E1	-3.27204E1	-3.26484E1	2.68184E1	1.7017E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.52489E-2