[Scan]
initial_time=2016-02-15T17:40:37
final_time=2016-02-15T17:40:56
ip_count=19
run=1030
dataset=1
scan=55
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.72494E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.90312E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=4.48489E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.97408E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=8.40831E-10
mult1=-9.64406E-9
mult2=-2.69665E-9
rf_tmon=-4.8609E-3
rf_agc=3.32555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.29308E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65352E0
bslens_imon=2.78289E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19496E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.97657E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02377E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.50291E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00651E0
lens1_imon=1.54279E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.55048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.99495E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.04477E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.89619E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=1.22747E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=3.0591E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=8.05318E-10
tplens_vset=1.4E-1
tplens_vmon=1.6156E0
tplens_imon=-1.80383E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.7487E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.8706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.20442E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55929E-1
os_ea2_imon=-5.30063E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63179E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36156E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10625E1
os_restr2_imon=2.86521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.26119E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72961E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67885E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.08049E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=3.71182E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.62434E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.75915E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.29269E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33844E1
os_fil1_imon=4.46388E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80355E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66387E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00055E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63465E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66582E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.01628E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68629E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22327E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.52709E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65299E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.075E3	2.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80016E1	-3.8147E-4	-8.80002E1	2.38419E-5	5.67436E-3	9.33647E-2	2.73063E1	-3.26524E1	-3.2629E1	2.67885E1	1.70244E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.5227E-2
2.0E0	2.984E3	2.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80018E1	-2.14577E-4	-8.80002E1	-4.76837E-5	5.79357E-3	9.31263E-2	2.73087E1	-3.26747E1	-3.26386E1	2.68022E1	1.70246E-8	2.52384E-3	2.52384E-3	6.31817E-3	2.51494E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80017E1	-4.76837E-4	-8.80003E1	7.15256E-5	5.45979E-3	9.28164E-2	2.73075E1	-3.26732E1	-3.26201E1	2.68094E1	1.70023E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.51395E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80019E1	-6.4373E-4	-8.80004E1	-1.19209E-4	5.29289E-3	9.3174E-2	2.72992E1	-3.2659E1	-3.26284E1	2.67758E1	1.701E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.52354E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80017E1	-6.19888E-4	-8.80002E1	-2.6226E-4	5.4121E-3	9.31978E-2	2.72886E1	-3.26156E1	-3.2634E1	2.68442E1	1.701E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.51924E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80018E1	-2.86102E-4	-8.80002E1	-1.66893E-4	5.6982E-3	9.31978E-2	2.73045E1	-3.26506E1	-3.26128E1	2.67824E1	1.70092E-8	2.51915E-3	2.51915E-3	6.33538E-3	2.51292E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80017E1	-1.19209E-4	-8.80001E1	0.0E0	5.36442E-3	9.2864E-2	2.72997E1	-3.26506E1	-3.26206E1	2.68232E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.53148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.8002E1	-3.57628E-4	-8.80002E1	-2.38419E-5	5.38826E-3	9.29832E-2	2.72809E1	-3.26154E1	-3.26119E1	2.67845E1	1.70096E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.52928E-2
1.2E1	7.9E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80017E1	-5.96046E-4	-8.80002E1	-2.14577E-4	5.55515E-3	9.32455E-2	2.72811E1	-3.26494E1	-3.2629E1	2.684E1	1.69811E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.52354E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80017E1	-4.29153E-4	-8.80002E1	4.76837E-5	5.55515E-3	9.30309E-2	2.72727E1	-3.26207E1	-3.26455E1	2.67782E1	1.70096E-8	2.50898E-3	2.50898E-3	6.3074E-3	2.51832E-2
1.4E1	4.6E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80017E1	-5.72205E-4	-8.80004E1	9.53674E-5	5.26905E-3	9.29832E-2	2.73207E1	-3.2653E1	-3.26506E1	2.68004E1	1.70173E-8	2.52707E-3	2.52707E-3	6.3074E-3	2.53E-2
1.5E1	2.9E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80019E1	-5.00679E-4	-8.80003E1	7.15256E-5	5.26905E-3	9.30786E-2	2.73087E1	-3.26458E1	-3.26392E1	2.68328E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52709E-2
1.6E1	2.05E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.8002E1	-6.19888E-4	-8.80004E1	1.43051E-4	5.53131E-3	9.32693E-2	2.73063E1	-3.26555E1	-3.26219E1	2.68106E1	1.70023E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.50959E-2
1.7E1	3.49E2	1.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80022E1	-4.76837E-4	-8.80004E1	-9.53674E-5	5.45979E-3	9.32932E-2	2.73051E1	-3.26511E1	-3.26205E1	2.6818E1	1.701E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.5128E-2
1.8E1	1.317E3	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80019E1	-3.57628E-4	-8.80004E1	1.90735E-4	5.62668E-3	9.31501E-2	2.72803E1	-3.2672E1	-3.26419E1	2.67966E1	1.70017E-8	2.51915E-3	2.51915E-3	6.31299E-3	2.51292E-2
1.9E1	2.416E3	2.0E0	7.68E2	5.29E2	-7.34782E-2	-8.8002E1	-6.91414E-4	-8.8E1	2.38419E-5	5.4121E-3	9.29594E-2	2.73333E1	-3.26933E1	-3.25888E1	2.68106E1	1.70246E-8	2.51954E-3	2.51954E-3	6.33977E-3	2.52354E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80018E1	-5.72205E-4	-8.80006E1	1.19209E-4	5.55515E-3	9.3174E-2	2.72991E1	-3.26567E1	-3.26284E1	2.6834E1	1.69801E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52489E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80018E1	-6.19888E-4	-8.80003E1	-1.19209E-4	5.62668E-3	9.30071E-2	2.7312E1	-3.26787E1	-3.26353E1	2.67541E1	1.70244E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.52709E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.8002E1	-4.76837E-4	-8.80005E1	-3.33786E-4	5.84126E-3	9.29356E-2	2.73123E1	-3.26789E1	-3.2629E1	2.68058E1	1.70247E-8	2.51814E-3	2.51814E-3	6.3445E-3	2.52012E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.8002E1	-5.24521E-4	-8.80005E1	-2.38419E-5	5.07832E-3	9.30786E-2	2.72961E1	-3.26416E1	-3.25948E1	2.67885E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.52709E-2