[Scan]
initial_time=2016-02-15T17:41:30
final_time=2016-02-15T17:41:49
ip_count=19
run=1030
dataset=1
scan=57
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.70125E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.97632E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=4.44698E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.86858E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=9.48286E-10
mult1=-9.48754E-9
mult2=-2.67669E-9
rf_tmon=-5.38963E-3
rf_agc=3.29551E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.42111E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69498E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.96612E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.47983E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01011E0
lens1_imon=1.6293E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64356E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.55444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.98775E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.17852E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=2.87891E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14795E1
os_ea1_imon=1.87456E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.23973E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=3.05802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=8.13496E-10
tplens_vset=1.4E-1
tplens_vmon=1.615E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.58797E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.56786E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23047E0
ionrepsh_imon=1.87745E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.10004E-1
os_ea2_imon=-4.86804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6342E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49371E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.3119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02067E1
cs_anode2_imon=2.27272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.11031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.10174E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.97372E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.77935E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.75555E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40758E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33884E1
os_fil1_imon=6.2058E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.34705E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66394E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=1.00126E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61699E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66779E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.91727E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64375E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22353E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.50741E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33774E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.026E3	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80019E1	-2.6226E-4	-8.80005E1	-4.05312E-4	5.126E-3	9.29117E-2	2.73039E1	-3.26272E1	-3.2626E1	2.68227E1	1.7017E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.52709E-2
2.0E0	2.937E3	8.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80018E1	-3.57628E-4	-8.80003E1	-1.19209E-4	5.4121E-3	9.30548E-2	2.72955E1	-3.26765E1	-3.26392E1	2.68176E1	1.70246E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.51709E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80018E1	-7.62939E-4	-8.80005E1	2.6226E-4	5.48363E-3	9.32217E-2	2.72943E1	-3.26789E1	-3.26248E1	2.68238E1	1.69727E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.50959E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80017E1	-6.67572E-4	-8.80001E1	2.38419E-5	5.17368E-3	9.33647E-2	2.73045E1	-3.26585E1	-3.26142E1	2.68166E1	1.7017E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.50959E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80015E1	-5.00679E-4	-8.80003E1	1.43051E-4	5.43594E-3	9.33409E-2	2.73093E1	-3.26783E1	-3.26386E1	2.68046E1	1.69883E-8	2.52276E-3	2.52276E-3	6.29665E-3	2.50852E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80017E1	-2.86102E-4	-8.80006E1	1.43051E-4	5.36442E-3	9.29594E-2	2.72892E1	-3.26885E1	-3.26307E1	2.67864E1	1.7017E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.53589E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47149E-2	-8.80016E1	-1.90735E-4	-8.80005E1	1.43051E-4	5.45979E-3	9.29832E-2	2.73063E1	-3.26482E1	-3.26254E1	2.68412E1	1.69955E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.52785E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.47149E-2	-8.8002E1	-4.76837E-4	-8.80002E1	-1.90735E-4	5.76973E-3	9.30309E-2	2.72823E1	-3.26518E1	-3.26284E1	2.67734E1	1.70096E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.51395E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80017E1	-5.00679E-4	-8.79999E1	-2.38419E-5	5.60284E-3	9.31501E-2	2.72829E1	-3.26374E1	-3.26332E1	2.67692E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.53148E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80017E1	-5.24521E-4	-8.79999E1	-2.38419E-5	5.14984E-3	9.32455E-2	2.73111E1	-3.26591E1	-3.26158E1	2.681E1	1.70244E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.51395E-2
1.4E1	4.7E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80019E1	-6.4373E-4	-8.80003E1	4.76837E-5	5.60284E-3	9.29594E-2	2.73246E1	-3.26331E1	-3.26225E1	2.68028E1	1.7017E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.53368E-2
1.5E1	4.8E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80016E1	2.38419E-5	-8.80002E1	2.38419E-5	5.79357E-3	9.34124E-2	2.73189E1	-3.2611E1	-3.26579E1	2.68226E1	1.69955E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.53E-2
1.6E1	2.4E2	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80017E1	-3.8147E-4	-8.80003E1	4.76837E-5	5.6982E-3	9.29117E-2	2.72997E1	-3.26633E1	-3.26134E1	2.67854E1	1.69949E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.5227E-2
1.7E1	3.36E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80018E1	-3.57628E-4	-8.80001E1	4.76837E-5	5.93662E-3	9.30786E-2	2.73116E1	-3.26561E1	-3.26413E1	2.67897E1	1.70096E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.52928E-2
1.8E1	1.346E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80017E1	-5.96046E-4	-8.80004E1	-1.43051E-4	5.45979E-3	9.31501E-2	2.73051E1	-3.26639E1	-3.2629E1	2.68142E1	1.70028E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.51924E-2
1.9E1	2.452E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80016E1	-5.48363E-4	-8.80006E1	-7.15256E-5	5.24521E-3	9.31025E-2	2.73165E1	-3.26182E1	-3.25395E1	2.6783E1	1.69875E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.51177E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80016E1	-2.6226E-4	-8.80004E1	-1.90735E-4	5.03063E-3	9.30071E-2	2.72853E1	-3.26651E1	-3.26284E1	2.68076E1	1.69801E-8	2.52647E-3	2.52647E-3	6.32936E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80017E1	-4.76837E-4	-8.80005E1	4.76837E-5	5.36442E-3	9.30786E-2	2.73139E1	-3.26644E1	-3.26272E1	2.67914E1	1.70023E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.53368E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80018E1	-3.8147E-4	-8.80004E1	-1.90735E-4	5.67436E-3	9.30071E-2	2.73027E1	-3.26464E1	-3.2632E1	2.68094E1	1.69883E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.53216E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80017E1	-1.66893E-4	-8.80005E1	-1.43051E-4	5.65052E-3	9.30548E-2	2.73195E1	-3.26669E1	-3.26158E1	2.68082E1	1.70023E-8	2.51334E-3	2.51334E-3	6.29098E-3	2.50741E-2