[Scan]
initial_time=2016-02-15T17:41:56
final_time=2016-02-15T17:42:16
ip_count=19
run=1030
dataset=1
scan=58
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.75892E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.33407E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=4.12536E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.94105E-9
ql4_vset=
ql4_vmon=-2.14577E-4
ql4_imon=8.78584E-10
mult1=-9.43937E-9
mult2=-2.70065E-9
rf_tmon=-6.00247E-3
rf_agc=3.16693E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.51791E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53571E1
cs_ef1b_imon=2.97075E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.48486E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03537E0
lens1_imon=1.44958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64676E1
os_ef1alow_imon=2.99411E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.55364E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84315E1
cs_ef1a_imon=2.98739E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.32789E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11318E1
os_restr1_imon=2.87203E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63078E1
os_ef1bup_imon=3.07655E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.21634E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93484E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01886E1
cs_anode1_imon=3.05815E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=8.31854E-10
tplens_vset=1.4E-1
tplens_vmon=1.60427E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.52364E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=1.89201E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12645E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.57524E-1
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71116E1
cs_ef2a_imon=3.18554E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62749E0
os_ef2alow_imon=-2.59487E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50441E-1
os_ef2bup_imon=-5.29469E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10893E1
os_restr2_imon=2.86566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.26554E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08371E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.0858E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.67224E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11953E0
cs_ionaccel_imon=-1.88364E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47138E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.69492E-6
window_vset=0.0E0
window_vmon=2.2371E-1
window_imon=-1.08041E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86527E1
mask2_imon=-6.84108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.18342E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93777E3
defgrida_imon=6.66667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.10744E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33876E1
os_fil1_imon=4.91645E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33438E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66588E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=9.99631E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61304E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6694E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.8507E-2
os_fil2_imon=-2.54966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.46988E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50787E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32131E-1
cs_fil2_imon=-2.30197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33673E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34907E-3
inlet_lpb_pmon=2.52305E-2
chamber_ion_pmon=1.69968E-8
chamber_cvt_pmon=2.52197E-3
foreline_cvt_pmon=2.52197E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3385E-1
res40_imon=-2.58779E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.078E3	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80018E1	-5.24521E-4	-8.80003E1	3.09944E-4	5.43594E-3	9.29832E-2	2.73063E1	-3.26795E1	-3.26266E1	2.67887E1	1.7017E-8	2.51771E-3	2.51771E-3	6.34588E-3	2.53148E-2
2.0E0	2.987E3	5.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80015E1	-9.29832E-4	-8.80005E1	7.15256E-5	5.07832E-3	9.27687E-2	2.73178E1	-3.26934E1	-3.26356E1	2.68128E1	1.70023E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.52709E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80017E1	-3.8147E-4	-8.80002E1	-1.66893E-4	5.10216E-3	9.31263E-2	2.73249E1	-3.26711E1	-3.26152E1	2.6783E1	1.70193E-8	2.52236E-3	2.52236E-3	6.34916E-3	2.5225E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80016E1	-3.33786E-4	-8.80003E1	0.0E0	5.50747E-3	9.31501E-2	2.72939E1	-3.2662E1	-3.26354E1	2.6795E1	1.70096E-8	2.52428E-3	2.52428E-3	6.32386E-3	2.52709E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80018E1	-5.24521E-4	-8.80003E1	1.90735E-4	5.26905E-3	9.30309E-2	2.73005E1	-3.26659E1	-3.26146E1	2.67875E1	1.70028E-8	2.52492E-3	2.52492E-3	6.32896E-3	2.51709E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80018E1	-4.05312E-4	-8.80001E1	-1.90735E-4	5.6982E-3	9.30071E-2	2.72949E1	-3.26998E1	-3.26133E1	2.67797E1	1.69759E-8	2.51575E-3	2.51575E-3	6.31779E-3	2.51062E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80019E1	-3.57628E-4	-8.80003E1	0.0E0	5.62668E-3	9.29117E-2	2.72909E1	-3.26528E1	-3.26186E1	2.68302E1	1.70083E-8	2.5257E-3	2.5257E-3	6.33065E-3	2.52464E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80018E1	-2.86102E-4	-8.80002E1	-2.38419E-5	5.53131E-3	9.28879E-2	2.72886E1	-3.26591E1	-3.26012E1	2.67714E1	1.70108E-8	2.52717E-3	2.52717E-3	6.323E-3	2.5189E-2
1.2E1	6.2E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80019E1	-4.76837E-5	-8.80002E1	0.0E0	5.76973E-3	9.29356E-2	2.72991E1	-3.26585E1	-3.2641E1	2.68166E1	1.69927E-8	2.52106E-3	2.52106E-3	6.3074E-3	2.51999E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80017E1	-5.00679E-4	-8.80003E1	-1.66893E-4	5.53131E-3	9.31025E-2	2.73118E1	-3.2678E1	-3.26435E1	2.68307E1	1.70023E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.51832E-2
1.4E1	4.8E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80017E1	-6.19888E-4	-8.80002E1	-3.09944E-4	5.53131E-3	9.34124E-2	2.7307E1	-3.26753E1	-3.26142E1	2.67686E1	1.70255E-8	2.51615E-3	2.51615E-3	6.30271E-3	2.51988E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80014E1	-3.33786E-4	-8.80005E1	-3.8147E-4	5.55515E-3	9.3627E-2	2.7321E1	-3.2655E1	-3.26253E1	2.68082E1	1.70011E-8	2.51611E-3	2.51611E-3	6.3245E-3	2.52776E-2
1.6E1	2.58E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80017E1	-2.86102E-4	-8.80004E1	-2.86102E-4	5.67436E-3	9.31025E-2	2.73123E1	-3.26639E1	-3.26254E1	2.67974E1	1.69809E-8	2.52661E-3	2.52661E-3	6.30111E-3	2.52088E-2
1.7E1	3.22E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80021E1	-6.67572E-4	-8.80004E1	-1.19209E-4	5.74589E-3	9.29356E-2	2.72957E1	-3.26673E1	-3.26189E1	2.68028E1	1.701E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.5128E-2
1.8E1	1.355E3	1.0E0	7.27E2	5.0E2	-7.32464E-2	-8.8002E1	-4.52995E-4	-8.80003E1	2.6226E-4	5.48363E-3	9.30548E-2	2.73302E1	-3.26805E1	-3.2648E1	2.67734E1	1.70023E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51613E-2
1.9E1	2.433E3	2.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80019E1	2.38419E-5	-8.80004E1	-1.43051E-4	5.84126E-3	9.3317E-2	2.7383E1	-3.27977E1	-3.2649E1	2.68298E1	1.70243E-8	2.51693E-3	2.51693E-3	6.27954E-3	2.5107E-2
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80019E1	-2.14577E-4	-8.80002E1	-1.90735E-4	5.62668E-3	9.30786E-2	2.72997E1	-3.26843E1	-3.26446E1	2.67636E1	1.701E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.51494E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.8002E1	-2.14577E-4	-8.80001E1	-2.14577E-4	5.36442E-3	9.31501E-2	2.73149E1	-3.26498E1	-3.26295E1	2.68196E1	1.70023E-8	2.52757E-3	2.52757E-3	6.32386E-3	2.5227E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.8002E1	-3.33786E-4	-8.8E1	-3.57628E-4	5.34058E-3	9.32455E-2	2.72999E1	-3.26602E1	-3.26301E1	2.67797E1	1.6982E-8	2.52659E-3	2.52659E-3	6.30212E-3	2.52223E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-3.57628E-4	-8.80002E1	-2.14577E-4	5.29289E-3	9.34362E-2	2.73069E1	-3.26663E1	-3.26092E1	2.68178E1	1.69968E-8	2.52197E-3	2.52197E-3	6.34907E-3	2.52305E-2