[Scan]
initial_time=2016-02-15T17:42:23
final_time=2016-02-15T17:42:43
ip_count=19
run=1030
dataset=1
scan=59
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.82354E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.71208E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=4.1703E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.90681E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.4945E-10
mult1=-9.80059E-9
mult2=-2.6707E-9
rf_tmon=-4.81885E-3
rf_agc=3.34417E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=4.30965E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.64951E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.99136E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.97693E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.49534E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03294E0
lens1_imon=1.38417E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.56526E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.98847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70793E-1
olens2_imon=4.07374E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=2.88431E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=1.91566E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21004E0
cs_ionrep_imon=1.2318E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.05334E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.833E-10
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.66704E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=1.90448E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.33098E-1
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46968E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68041E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.11624E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=3.68261E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.4477E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.4513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=5.16665E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5693E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66366E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=1.00047E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62204E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66734E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66695E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22362E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.52709E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12751E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.086E3	1.0E0	1.47E2	4.1E1	-7.286E-2	-8.80016E1	-5.24521E-4	-8.80001E1	-2.6226E-4	5.31673E-3	9.28879E-2	2.73051E1	-3.26555E1	-3.26313E1	2.6783E1	1.7017E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.50305E-2
2.0E0	3.043E3	6.0E0	3.16E2	1.6E2	-7.30146E-2	-8.8002E1	-2.38419E-5	-8.80002E1	1.19209E-4	5.29289E-3	9.33647E-2	2.73281E1	-3.26679E1	-3.26419E1	2.68232E1	1.70173E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.51066E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80019E1	-2.86102E-4	-8.80002E1	2.38419E-5	5.26905E-3	9.3317E-2	2.73117E1	-3.26597E1	-3.26314E1	2.67856E1	1.70028E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.52354E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80021E1	-1.90735E-4	-8.80004E1	1.66893E-4	5.34058E-3	9.30309E-2	2.73165E1	-3.26741E1	-3.26212E1	2.68232E1	1.701E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.53E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80019E1	9.53674E-5	-8.79999E1	1.66893E-4	5.19753E-3	9.32455E-2	2.73117E1	-3.26488E1	-3.26446E1	2.6777E1	1.69867E-8	2.52362E-3	2.52362E-3	6.3074E-3	2.51737E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8002E1	-7.15256E-5	-8.79999E1	1.19209E-4	5.53131E-3	9.26971E-2	2.72915E1	-3.26136E1	-3.26278E1	2.67974E1	1.70173E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.5128E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80017E1	-2.6226E-4	-8.8E1	2.6226E-4	5.29289E-3	9.3317E-2	2.72883E1	-3.265E1	-3.26104E1	2.68256E1	1.7017E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.51832E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80017E1	-1.43051E-4	-8.79999E1	4.76837E-5	5.24521E-3	9.33647E-2	2.73195E1	-3.26476E1	-3.2617E1	2.68034E1	1.7017E-8	2.51552E-3	2.51552E-3	6.29098E-3	2.52489E-2
1.2E1	7.9E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80018E1	-3.09944E-4	-8.79999E1	3.33786E-4	5.45979E-3	9.32217E-2	2.72985E1	-3.26765E1	-3.26116E1	2.67914E1	1.70096E-8	2.52538E-3	2.52538E-3	6.32936E-3	2.51613E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80018E1	-3.09944E-4	-8.80002E1	2.86102E-4	5.24521E-3	9.31978E-2	2.72642E1	-3.26488E1	-3.26152E1	2.68214E1	1.70096E-8	2.5188E-3	2.5188E-3	6.29098E-3	2.51177E-2
1.4E1	6.1E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80015E1	-1.43051E-4	-8.80001E1	2.38419E-5	5.57899E-3	9.32217E-2	2.72991E1	-3.26591E1	-3.2611E1	2.67349E1	1.70096E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.50959E-2
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80015E1	-2.86102E-4	-8.79998E1	1.90735E-4	5.53131E-3	9.31501E-2	2.73333E1	-3.26771E1	-3.26056E1	2.67818E1	1.70096E-8	2.52209E-3	2.52209E-3	6.3514E-3	2.5227E-2
1.6E1	2.28E2	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80018E1	-3.09944E-4	-8.79998E1	3.09944E-4	5.26905E-3	9.33647E-2	2.72949E1	-3.26867E1	-3.26266E1	2.68154E1	1.7017E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.53148E-2
1.7E1	3.03E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80021E1	-2.86102E-4	-8.80002E1	2.14577E-4	5.53131E-3	9.3317E-2	2.73309E1	-3.26837E1	-3.26506E1	2.67662E1	1.7017E-8	2.52099E-3	2.52099E-3	6.35692E-3	2.52709E-2
1.8E1	1.225E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80022E1	-3.8147E-4	-8.79999E1	1.43051E-4	5.48363E-3	9.32693E-2	2.73207E1	-3.26188E1	-3.2617E1	2.68118E1	1.69949E-8	2.52428E-3	2.52428E-3	6.29098E-3	2.52051E-2
1.9E1	2.449E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80022E1	-4.05312E-4	-8.80002E1	1.90735E-4	5.19753E-3	9.29594E-2	2.72594E1	-3.25605E1	-3.26038E1	2.67806E1	1.70096E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.52928E-2
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80021E1	4.76837E-5	-8.80001E1	1.43051E-4	5.48363E-3	9.32455E-2	2.73099E1	-3.26777E1	-3.26152E1	2.68184E1	1.7017E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.8002E1	0.0E0	-8.80002E1	2.38419E-4	5.19753E-3	9.31025E-2	2.72868E1	-3.26738E1	-3.26378E1	2.67572E1	1.7017E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.51613E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80018E1	-2.6226E-4	-8.80003E1	3.33786E-4	5.60284E-3	9.28879E-2	2.72853E1	-3.26699E1	-3.26452E1	2.68294E1	1.70246E-8	2.52599E-3	2.52599E-3	6.33436E-3	2.51924E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80018E1	-2.6226E-4	-8.80004E1	7.15256E-5	5.31673E-3	9.31025E-2	2.73045E1	-3.26855E1	-3.26278E1	2.68041E1	1.70023E-8	2.52318E-3	2.52318E-3	6.29098E-3	2.52709E-2