[Scan]
initial_time=2016-02-15T17:42:50
final_time=2016-02-15T17:43:09
ip_count=19
run=1030
dataset=1
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.79211E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.30724E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=4.42064E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.94604E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.89528E-10
mult1=-9.66486E-9
mult2=-2.77813E-9
rf_tmon=-3.37686E-3
rf_agc=3.45479E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=4.40145E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.72731E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.98297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53642E1
cs_ef1b_imon=2.9704E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=2.48522E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02888E0
lens1_imon=1.38941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64529E1
os_ef1alow_imon=2.99163E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.54586E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84432E1
cs_ef1a_imon=2.96792E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.18472E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11041E1
os_restr1_imon=2.88937E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=1.89307E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64157E1
os_ef1bup_imon=3.07585E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.23757E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01691E1
cs_anode1_imon=3.07125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20623E0
olens4_imon=8.45349E-10
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.58621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.68457E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.88104E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74655E1
cs_ef2b_imon=3.11052E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45136E-1
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71187E1
cs_ef2a_imon=3.20252E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60213E0
os_ef2alow_imon=-2.7364E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.05031E-1
os_ef2bup_imon=-5.30885E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10893E1
os_restr2_imon=2.87026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02098E1
cs_anode2_imon=2.27439E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.09847E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68221E1
iondef4_imon=1.07415E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.05134E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=4.31228E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11363E0
cs_ionaccel_imon=-1.77041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47014E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56128E1
einzel_imon=7.85768E-6
window_vset=0.0E0
window_vmon=1.95402E-1
window_imon=-1.2361E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-7.478E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.54798E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.17115E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.14449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33859E1
os_fil1_imon=4.93414E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.23668E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66664E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=1.00085E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61517E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66963E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.50248E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.35193E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59139E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33529E-1
cs_fil2_imon=-2.40222E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.99041E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22495E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.53589E-2
chamber_ion_pmon=1.69949E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97876E-1
res40_imon=-2.73286E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.079E3	1.0E0	1.47E2	4.1E1	-7.38649E-2	-8.8002E1	-2.38419E-4	-8.80001E1	2.38419E-5	5.60284E-3	9.31025E-2	2.73016E1	-3.26661E1	-3.2629E1	2.68088E1	1.70033E-8	2.52025E-3	2.52025E-3	6.31798E-3	2.52646E-2
2.0E0	2.941E3	6.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80017E1	-9.53674E-5	-8.80003E1	-1.66893E-4	5.38826E-3	9.31978E-2	2.73423E1	-3.26467E1	-3.2629E1	2.68136E1	1.70028E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.52139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.43285E-2	-8.80019E1	-6.19888E-4	-8.80004E1	-2.38419E-4	5.36442E-3	9.27925E-2	2.73243E1	-3.2641E1	-3.2635E1	2.67565E1	1.69875E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.52928E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80019E1	-2.38419E-4	-8.80003E1	2.86102E-4	5.26905E-3	9.2721E-2	2.73063E1	-3.26676E1	-3.26162E1	2.67908E1	1.7017E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.52709E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80018E1	-2.38419E-4	-8.80001E1	1.90735E-4	5.26905E-3	9.30548E-2	2.73075E1	-3.26526E1	-3.26472E1	2.67968E1	1.69875E-8	2.52045E-3	2.52045E-3	6.30466E-3	2.52161E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.8002E1	-5.72205E-4	-8.80003E1	-1.19209E-4	5.17368E-3	9.29117E-2	2.73033E1	-3.26646E1	-3.26125E1	2.6786E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80018E1	-3.57628E-4	-8.8E1	2.86102E-4	5.74589E-3	9.34839E-2	2.73033E1	-3.26849E1	-3.26164E1	2.6789E1	1.69949E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80017E1	-4.76837E-4	-8.79999E1	7.15256E-5	5.43594E-3	9.34839E-2	2.72931E1	-3.26747E1	-3.26386E1	2.6822E1	1.7017E-8	2.52757E-3	2.52757E-3	6.31288E-3	2.53368E-2
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80018E1	-5.00679E-4	-8.80001E1	4.05312E-4	5.38826E-3	9.32932E-2	2.72998E1	-3.26803E1	-3.26254E1	2.67547E1	1.69949E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.52489E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80019E1	-5.00679E-4	-8.80003E1	1.43051E-4	5.22137E-3	9.32932E-2	2.73472E1	-3.26669E1	-3.26092E1	2.68286E1	1.70096E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.50741E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80018E1	-5.48363E-4	-8.80001E1	3.57628E-4	5.126E-3	9.34124E-2	2.73069E1	-3.26759E1	-3.26362E1	2.67932E1	1.69883E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.51709E-2
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80018E1	-8.58307E-4	-8.80001E1	1.43051E-4	5.26905E-3	9.29117E-2	2.72937E1	-3.26741E1	-3.26338E1	2.68028E1	1.70168E-8	2.52362E-3	2.52362E-3	6.32418E-3	2.5107E-2
1.6E1	2.43E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.8002E1	-1.00136E-3	-8.8E1	3.57628E-4	5.36442E-3	9.30548E-2	2.73081E1	-3.26735E1	-3.26254E1	2.67944E1	1.70173E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.52785E-2
1.7E1	3.36E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80018E1	-6.19888E-4	-8.80002E1	6.19888E-4	5.48363E-3	9.29117E-2	2.73387E1	-3.26579E1	-3.26476E1	2.67758E1	1.70244E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.52709E-2
1.8E1	1.25E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80016E1	-6.91414E-4	-8.80003E1	3.33786E-4	5.36442E-3	9.33409E-2	2.73219E1	-3.26645E1	-3.26272E1	2.68418E1	1.70096E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52928E-2
1.9E1	2.389E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.8002E1	-1.04904E-3	-8.80005E1	3.33786E-4	5.07832E-3	9.31263E-2	2.72915E1	-3.26844E1	-3.2629E1	2.67487E1	1.70318E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.52051E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-6.91414E-4	-8.80004E1	7.15256E-5	5.72205E-3	9.31025E-2	2.73039E1	-3.26783E1	-3.2617E1	2.6803E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.52709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80013E1	-4.29153E-4	-8.80003E1	2.86102E-4	5.4121E-3	9.32217E-2	2.73216E1	-3.26679E1	-3.26213E1	2.68232E1	1.70173E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.52569E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80016E1	-5.24521E-4	-8.80002E1	-2.38419E-5	5.55515E-3	9.32455E-2	2.72859E1	-3.26494E1	-3.2614E1	2.67836E1	1.70028E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.52785E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80013E1	-2.86102E-4	-8.80002E1	7.15256E-5	5.10216E-3	9.32217E-2	2.7311E1	-3.26478E1	-3.26402E1	2.68221E1	1.69949E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.53589E-2