[Scan]
initial_time=2016-02-15T17:43:16
final_time=2016-02-15T17:43:36
ip_count=19
run=1030
dataset=1
scan=61
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.79338E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.30748E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=4.46331E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.93423E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=8.9612E-10
mult1=-9.85557E-9
mult2=-2.62837E-9
rf_tmon=-5.23784E-3
rf_agc=3.33651E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.97289E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=2.97477E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0521E1
cs_ea1_imon=2.49858E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.52116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.53317E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.97838E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=3.9959E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=2.8735E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=1.88105E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28935E0
cs_ionrep_imon=1.24117E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.05694E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=8.14342E-10
tplens_vset=1.4E-1
tplens_vmon=1.60538E0
tplens_imon=-6.86289E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26572E1
iondef2_imon=1.59302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.4651E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24909E0
ionrepsh_imon=1.90773E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.19793E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49921E-1
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00753E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60416E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27147E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=2.85404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.3238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.26587E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72959E1
iondef1_imon=1.07138E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67529E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.00176E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.73447E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.48375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.87812E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.32153E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3384E1
os_fil1_imon=5.3949E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.07675E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66479E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.99994E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66857E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50196E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22518E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.53E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17556E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.094E3	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80018E1	-6.4373E-4	-8.80002E1	1.43051E-4	5.24521E-3	9.31263E-2	2.73034E1	-3.26642E1	-3.26092E1	2.6828E1					
2.0E0	2.995E3	1.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80018E1	-2.86102E-4	-8.8E1	9.53674E-5	5.36442E-3	9.29832E-2	2.73124E1	-3.26903E1	-3.26217E1	2.67511E1	1.69883E-8	2.52384E-3	2.52384E-3	6.31817E-3	2.52569E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80018E1	-7.15256E-5	-8.80003E1	0.0E0	5.126E-3	9.31263E-2	2.73021E1	-3.26638E1	-3.26543E1	2.68233E1	1.70017E-8	2.52362E-3	2.52362E-3	6.31858E-3	2.5107E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.44059E-2	-8.80018E1	-4.05312E-4	-8.80003E1	-1.19209E-4	5.38826E-3	9.30786E-2	2.73141E1	-3.26603E1	-3.26326E1	2.68094E1	1.69962E-8	2.52236E-3	2.52236E-3	6.30212E-3	2.52435E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80017E1	-3.09944E-4	-8.80001E1	-2.86102E-4	5.45979E-3	9.28164E-2	2.73285E1	-3.26272E1	-3.26218E1	2.67848E1	1.70244E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.52709E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80019E1	-4.76837E-4	-8.80003E1	9.53674E-5	5.19753E-3	9.2864E-2	2.72961E1	-3.26711E1	-3.26482E1	2.68635E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.51613E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80019E1	-5.00679E-4	-8.80003E1	1.90735E-4	5.07832E-3	9.29832E-2	2.73246E1	-3.26455E1	-3.26172E1	2.67752E1	1.7017E-8	2.52318E-3	2.52318E-3	6.28552E-3	2.50741E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80018E1	-3.57628E-4	-8.80003E1	1.19209E-4	5.4121E-3	9.30309E-2	2.72967E1	-3.26741E1	-3.26116E1	2.67794E1	1.70096E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51613E-2
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80019E1	-3.33786E-4	-8.80004E1	2.14577E-4	5.38826E-3	9.28402E-2	2.73069E1	-3.26921E1	-3.26101E1	2.68166E1	1.7017E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.52928E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80019E1	-4.76837E-4	-8.80003E1	3.33786E-4	5.74589E-3	9.27687E-2	2.72811E1	-3.26386E1	-3.26603E1	2.67686E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52709E-2
1.4E1	4.5E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80019E1	-3.09944E-4	-8.80003E1	1.90735E-4	5.62668E-3	9.27925E-2	2.72997E1	-3.26615E1	-3.26236E1	2.68226E1	1.70133E-8	2.5199E-3	2.5199E-3	6.30466E-3	2.52051E-2
1.5E1	3.7E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80017E1	-5.96046E-4	-8.8E1	-4.76837E-5	5.48363E-3	9.32455E-2	2.72943E1	-3.26567E1	-3.26272E1	2.67595E1					
1.6E1	2.24E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-5.00679E-4	-8.79999E1	1.43051E-4	5.05447E-3	9.29832E-2	2.73165E1	-3.26549E1	-3.26284E1	2.67728E1	1.7017E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.53148E-2
1.7E1	3.18E2	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.8002E1	-5.24521E-4	-8.80003E1	0.0E0	5.26905E-3	9.26971E-2	2.73003E1	-3.26795E1	-3.26482E1	2.67986E1	1.69727E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.5227E-2
1.8E1	1.225E3	1.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80018E1	-3.8147E-4	-8.80004E1	1.19209E-4	5.67436E-3	9.28402E-2	2.73198E1	-3.27068E1	-3.2636E1	2.6792E1	1.70243E-8	2.5147E-3	2.5147E-3	6.29624E-3	2.5196E-2
1.9E1	2.365E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80016E1	-1.66893E-4	-8.80001E1	2.14577E-4	4.93526E-3	9.32693E-2	2.73153E1	-3.26543E1	-3.26392E1	2.68004E1	1.701E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.52354E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80019E1	-4.76837E-4	-8.80002E1	3.33786E-4	4.91142E-3	9.30309E-2	2.73249E1	-3.26248E1	-3.26248E1	2.67758E1	1.69949E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.50959E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80017E1	-4.29153E-4	-8.8E1	0.0E0	5.17368E-3	9.30548E-2	2.73193E1	-3.26655E1	-3.26354E1	2.68551E1	1.70023E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.50741E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80019E1	7.15256E-5	-8.80001E1	7.15256E-5	5.38826E-3	9.32217E-2	2.73169E1	-3.26726E1	-3.26183E1	2.68292E1	1.70246E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.52354E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.8002E1	-1.43051E-4	-8.80003E1	9.53674E-5	5.17368E-3	9.31025E-2	2.72959E1	-3.26572E1	-3.26609E1	2.67529E1	1.70028E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.53E-2