[Scan]
initial_time=2016-02-15T17:43:43
final_time=2016-02-15T17:44:03
ip_count=19
run=1030
dataset=1
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.75797E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.20759E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=4.16434E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.9594E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.71038E-10
mult1=-1.00294E-8
mult2=-2.75654E-9
rf_tmon=-4.99309E-3
rf_agc=3.30932E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.52375E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53517E1
cs_ef1b_imon=2.97522E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05071E1
cs_ea1_imon=2.47955E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0218E0
lens1_imon=1.44958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.98843E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.55577E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.97904E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.38213E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=2.87722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=1.88281E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63288E1
os_ef1bup_imon=3.08504E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.20395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=3.06836E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.78472E-10
tplens_vset=1.4E-1
tplens_vmon=1.59837E0
tplens_imon=-1.28996E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.59258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.61948E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.88706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33469E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74368E1
cs_ef2b_imon=3.11944E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54575E-1
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.19625E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59844E0
os_ef2alow_imon=-2.59543E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34097E-1
os_ef2bup_imon=-5.2401E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=2.86923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02006E1
cs_anode2_imon=2.26766E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.07947E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.1562E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=4.00817E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13362E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=2.37379E-1
window_imon=-1.04895E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39254E-4
mask2_vset=0.0E0
mask2_vmon=-1.86222E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.36039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33882E1
os_fil1_imon=4.83157E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49593E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6628E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30793E1
cs_fil1_imon=1.00058E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63206E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66873E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.26374E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.75572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60532E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33647E-1
cs_fil2_imon=-2.03785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.61265E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.51066E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95696E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.139E3	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80019E1	-3.57628E-4	-8.79999E1	-4.76837E-5	5.4121E-3	9.2864E-2	2.73193E1	-3.26708E1	-3.26071E1	2.6771E1	1.70096E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.53148E-2
2.0E0	2.901E3	3.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80019E1	-6.19888E-4	-8.79999E1	3.33786E-4	5.26905E-3	9.29832E-2	2.73004E1	-3.2698E1	-3.26213E1	2.6828E1	1.70064E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.51924E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80019E1	-4.76837E-4	-8.8E1	1.66893E-4	5.14984E-3	9.30548E-2	2.73303E1	-3.26903E1	-3.26122E1	2.67404E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80017E1	-3.8147E-4	-8.80001E1	4.05312E-4	5.57899E-3	9.31263E-2	2.72889E1	-3.26657E1	-3.26086E1	2.6834E1	1.7017E-8	2.51716E-3	2.51716E-3	6.30466E-3	2.50959E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80017E1	-1.43051E-4	-8.79999E1	7.15256E-5	5.17368E-3	9.31501E-2	2.73177E1	-3.26591E1	-3.26176E1	2.68257E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.08504E-2	-8.80016E1	-4.05312E-4	-8.8E1	2.6226E-4	5.29289E-3	9.32932E-2	2.7298E1	-3.26614E1	-3.2603E1	2.67665E1	1.69949E-8	2.52099E-3	2.52099E-3	6.28552E-3	2.50305E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80018E1	-4.76837E-4	-8.80002E1	9.53674E-5	5.14984E-3	9.29832E-2	2.72925E1	-3.26807E1	-3.26326E1	2.67914E1	1.70028E-8	2.52599E-3	2.52599E-3	6.33436E-3	2.51066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80017E1	-1.90735E-4	-8.8E1	3.57628E-4	5.03063E-3	9.27687E-2	2.72805E1	-3.26651E1	-3.26212E1	2.67938E1	1.70028E-8	2.51417E-3	2.51417E-3	6.33977E-3	2.52785E-2
1.2E1	5.4E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.8002E1	-3.09944E-4	-8.8E1	3.57628E-4	5.05447E-3	9.30548E-2	2.73021E1	-3.2647E1	-3.26368E1	2.68376E1	1.69949E-8	2.52647E-3	2.52647E-3	6.35692E-3	2.52051E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80019E1	-3.57628E-4	-8.79998E1	1.90735E-4	4.98295E-3	9.30309E-2	2.73228E1	-3.27051E1	-3.26296E1	2.67968E1	1.70096E-8	2.52209E-3	2.52209E-3	6.3514E-3	2.51177E-2
1.4E1	3.9E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80018E1	-3.33786E-4	-8.80003E1	2.14577E-4	5.14984E-3	9.3317E-2	2.72965E1	-3.26719E1	-3.26468E1	2.6816E1	1.69949E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.52709E-2
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80018E1	-9.53674E-5	-8.80005E1	2.38419E-4	5.29289E-3	9.3174E-2	2.73207E1	-3.26633E1	-3.26254E1	2.67445E1	1.70017E-8	2.51693E-3	2.51693E-3	6.3074E-3	2.5196E-2
1.6E1	2.22E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80019E1	2.14577E-4	-8.80001E1	4.29153E-4	5.34058E-3	9.31501E-2	2.73057E1	-3.26732E1	-3.26325E1	2.68671E1	1.701E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.51709E-2
1.7E1	3.27E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80018E1	-2.6226E-4	-8.80002E1	4.52995E-4	5.36442E-3	9.27687E-2	2.73039E1	-3.26695E1	-3.26352E1	2.67788E1	1.70318E-8	2.51662E-3	2.51662E-3	6.27461E-3	2.51832E-2
1.8E1	1.285E3	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80019E1	-5.24521E-4	-8.80002E1	2.14577E-4	5.48363E-3	9.31025E-2	2.73134E1	-3.2688E1	-3.26502E1	2.68372E1	1.7017E-8	2.52538E-3	2.52538E-3	6.26916E-3	2.52051E-2
1.9E1	2.481E3	4.0E0	7.68E2	5.29E2	-7.286E-2	-8.80017E1	-2.6226E-4	-8.80002E1	-9.53674E-5	5.00679E-3	9.31025E-2	2.72877E1	-3.26212E1	-3.26254E1	2.68182E1	1.70023E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.52489E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80017E1	-5.00679E-4	-8.80001E1	2.6226E-4	4.88758E-3	9.26495E-2	2.73009E1	-3.26705E1	-3.26392E1	2.67856E1	1.70023E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80017E1	-2.14577E-4	-8.80003E1	4.29153E-4	5.126E-3	9.29832E-2	2.73057E1	-3.26384E1	-3.26242E1	2.67607E1	1.7017E-8	2.52209E-3	2.52209E-3	6.28552E-3	2.51395E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80017E1	-3.57628E-4	-8.80004E1	3.8147E-4	4.98295E-3	9.32217E-2	2.73063E1	-3.26992E1	-3.26343E1	2.67972E1	1.69891E-8	2.51709E-3	2.51709E-3	6.28103E-3	2.50959E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80015E1	2.38419E-5	-8.79999E1	1.90735E-4	5.53131E-3	9.29594E-2	2.73249E1	-3.26669E1	-3.26296E1	2.67992E1	1.70028E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.51066E-2