[Scan]
initial_time=2016-02-15T17:44:10
final_time=2016-02-15T17:44:29
ip_count=19
run=1030
dataset=1
scan=63
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.78549E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.6365E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=4.03166E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.96835E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.96168E-10
mult1=-9.37917E-9
mult2=-2.85834E-9
rf_tmon=-4.47037E-3
rf_agc=3.27448E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=4.2392E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.55388E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19789E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=2.97477E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.0227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=2.47884E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01118E0
lens1_imon=1.56992E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64392E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.56461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.99207E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.05073E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=1.88635E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.25209E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.05118E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=7.84397E-10
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26038E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27011E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.71699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.89343E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7935E-1
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.05523E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.86089E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.29857E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.26659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73508E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.04954E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=3.3772E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.85237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.40829E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.32146E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33846E1
os_fil1_imon=5.35886E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64738E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=9.98822E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61291E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67045E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.97734E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5509E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22395E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.53148E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.16065E-1
res40_imon=-2.74925E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.094E3	1.0E0	1.47E2	4.1E1	-7.12368E-2	-8.8002E1	-2.38419E-4	-8.8E1	-3.33786E-4	5.72205E-3	9.27687E-2	2.73087E1	-3.26476E1	-3.25972E1	2.68034E1	1.69949E-8	2.52099E-3	2.52099E-3	6.29098E-3	2.52928E-2
2.0E0	2.91E3	4.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80021E1	-4.29153E-4	-8.80002E1	2.38419E-5	5.57899E-3	9.28879E-2	2.73045E1	-3.2645E1	-3.26003E1	2.6792E1	1.7017E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.52051E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80023E1	-1.43051E-4	-8.80003E1	-4.76837E-5	5.19753E-3	9.3317E-2	2.73068E1	-3.26868E1	-3.2637E1	2.68046E1	1.70244E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.50305E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80021E1	-3.09944E-4	-8.80003E1	7.15256E-5	4.91142E-3	9.30548E-2	2.73189E1	-3.26729E1	-3.26458E1	2.68328E1	1.701E-8	2.51847E-3	2.51847E-3	6.35059E-3	2.52139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80025E1	-2.38419E-4	-8.80001E1	-1.19209E-4	5.34058E-3	9.32932E-2	2.7288E1	-3.26854E1	-3.26217E1	2.67794E1	1.70023E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.50959E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80023E1	-4.76837E-4	-8.80001E1	-2.14577E-4	5.76973E-3	9.34124E-2	2.73139E1	-3.26402E1	-3.26172E1	2.68094E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.50741E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8002E1	-4.76837E-4	-8.80004E1	0.0E0	5.31673E-3	9.30309E-2	2.72947E1	-3.2648E1	-3.2626E1	2.67907E1	1.70318E-8	2.52538E-3	2.52538E-3	6.30192E-3	2.51177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80018E1	-2.86102E-4	-8.80004E1	-1.90735E-4	5.19753E-3	9.30548E-2	2.72962E1	-3.26502E1	-3.26296E1	2.6813E1	1.70244E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.51395E-2
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80018E1	-8.10623E-4	-8.80004E1	-2.38419E-5	5.10216E-3	9.29832E-2	2.72907E1	-3.26567E1	-3.26386E1	2.68707E1	1.70096E-8	2.52867E-3	2.52867E-3	6.34037E-3	2.50959E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.8002E1	-1.90735E-4	-8.8E1	-9.53674E-5	5.43594E-3	9.32693E-2	2.73193E1	-3.2688E1	-3.26372E1	2.68194E1	1.70096E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.51177E-2
1.4E1	4.5E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80021E1	-5.96046E-4	-8.80003E1	-1.43051E-4	5.45979E-3	9.36985E-2	2.73321E1	-3.26705E1	-3.26524E1	2.67854E1	1.69955E-8	2.5131E-3	2.5131E-3	6.30202E-3	2.5128E-2
1.5E1	3.8E1	1.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80021E1	-4.05312E-4	-8.80003E1	4.76837E-5	5.29289E-3	9.3174E-2	2.73033E1	-3.26422E1	-3.2644E1	2.68142E1	1.70096E-8	2.51935E-3	2.51935E-3	6.32936E-3	2.5238E-2
1.6E1	2.45E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-1.19209E-4	-8.80004E1	2.38419E-5	5.36442E-3	9.32455E-2	2.73148E1	-3.26915E1	-3.26106E1	2.67114E1					
1.7E1	3.09E2	1.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80018E1	-2.86102E-4	-8.80002E1	-2.38419E-5	5.03063E-3	9.31025E-2	2.73146E1	-3.26247E1	-3.26311E1	2.67946E1	1.70043E-8	2.52058E-3	2.52058E-3	6.31761E-3	2.51976E-2
1.8E1	1.238E3	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80019E1	-7.15256E-5	-8.80004E1	1.19209E-4	5.60284E-3	9.30786E-2	2.73147E1	-3.26999E1	-3.26206E1	2.68418E1	1.70158E-8	2.52621E-3	2.52621E-3	6.34301E-3	2.51666E-2
1.9E1	2.478E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80022E1	-8.10623E-4	-8.8E1	2.38419E-5	5.79357E-3	9.30786E-2	2.73069E1	-3.26455E1	-3.26449E1	2.68346E1	1.69875E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.52709E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80018E1	-7.39098E-4	-8.80003E1	9.53674E-5	5.65052E-3	9.3174E-2	2.73051E1	-3.26903E1	-3.26119E1	2.67671E1	1.70173E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.51709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80021E1	-2.38419E-4	-8.80003E1	7.15256E-5	5.14984E-3	9.34601E-2	2.73027E1	-3.26719E1	-3.26199E1	2.67938E1	1.70246E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.53216E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80017E1	1.19209E-4	-8.80002E1	7.15256E-5	5.48363E-3	9.31501E-2	2.72762E1	-3.26767E1	-3.26219E1	2.68178E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52051E-2
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80018E1	-2.6226E-4	-8.80003E1	7.15256E-5	5.55515E-3	9.31501E-2	2.73508E1	-3.27011E1	-3.26038E1	2.67944E1	1.70244E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.53148E-2