[Scan]
initial_time=2016-02-15T17:44:36
final_time=2016-02-15T17:44:56
ip_count=19
run=1030
dataset=1
scan=64
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.76568E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.29866E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=4.62806E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.01951E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=9.10509E-10
mult1=-9.16244E-9
mult2=-2.6747E-9
rf_tmon=-5.22741E-3
rf_agc=3.20238E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.57406E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.97874E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05216E1
cs_ea1_imon=2.48668E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99209E0
lens1_imon=1.52476E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.55624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84136E1
cs_ef1a_imon=2.97802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.34053E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=2.87098E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=1.8897E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=1.24153E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=3.05442E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20601E0
olens4_imon=8.24463E-10
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26591E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.59806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98501E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.50122E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.89403E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33477E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49921E-1
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61978E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.32552E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.31659E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.26623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.06974E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.9798E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0929E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.1494E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.48375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33836E1
os_fil1_imon=5.49701E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66373E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30809E1
cs_fil1_imon=9.9872E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66588E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.27767E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61024E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22371E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.51613E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90236E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.05E3	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80019E1	0.0E0	-8.79999E1	9.53674E-5	5.36442E-3	9.34124E-2	2.73116E1	-3.26207E1	-3.26343E1	2.67902E1	1.69949E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.51613E-2
2.0E0	2.877E3	1.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80021E1	-3.33786E-4	-8.8E1	-7.15256E-5	5.22137E-3	9.33647E-2	2.73117E1	-3.26837E1	-3.26332E1	2.67926E1	1.69883E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.5021E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80017E1	-6.19888E-4	-8.80005E1	-2.38419E-4	5.26905E-3	9.32455E-2	2.72877E1	-3.26945E1	-3.26296E1	2.6783E1	1.70244E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.51177E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80019E1	-4.29153E-4	-8.80004E1	1.19209E-4	5.8651E-3	9.33886E-2	2.7312E1	-3.26984E1	-3.2626E1	2.68235E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.50741E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.8002E1	-1.90735E-4	-8.80003E1	9.53674E-5	5.29289E-3	9.30071E-2	2.73117E1	-3.26452E1	-3.26188E1	2.67699E1	1.69955E-8	2.51525E-3	2.51525E-3	6.34518E-3	2.51066E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80018E1	-5.24521E-4	-8.80001E1	4.76837E-5	5.36442E-3	9.32455E-2	2.73051E1	-3.26591E1	-3.26146E1	2.68286E1	1.70173E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.51709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80017E1	-7.39098E-4	-8.80003E1	1.43051E-4	5.43594E-3	9.30071E-2	2.72895E1	-3.26759E1	-3.26044E1	2.6792E1	1.69801E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.5227E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80015E1	-7.62939E-4	-8.80004E1	0.0E0	5.53131E-3	9.3174E-2	2.73169E1	-3.26301E1	-3.26378E1	2.67794E1	1.70096E-8	2.5188E-3	2.5188E-3	6.28552E-3	2.52489E-2
1.2E1	7.8E1	1.0E0	4.85E2	3.23E2	-7.10825E-2	-8.80015E1	-7.15256E-4	-8.80004E1	1.90735E-4	5.07832E-3	9.31978E-2	2.72865E1	-3.26771E1	-3.26272E1	2.68034E1	1.69955E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.50424E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.10051E-2	-8.80016E1	-2.6226E-4	-8.80003E1	1.19209E-4	5.53131E-3	9.29356E-2	2.7265E1	-3.26649E1	-3.26461E1	2.68076E1	1.69942E-8	2.52139E-3	2.52139E-3	6.31299E-3	2.51292E-2
1.4E1	5.2E1	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80016E1	-2.6226E-4	-8.80007E1	-1.43051E-4	5.62668E-3	9.31501E-2	2.73213E1	-3.26747E1	-3.26482E1	2.68106E1	1.70318E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.51494E-2
1.5E1	3.8E1	1.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80017E1	-2.14577E-4	-8.80003E1	2.38419E-5	5.24521E-3	9.32932E-2	2.73039E1	-3.2638E1	-3.26272E1	2.6804E1	1.70028E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.52139E-2
1.6E1	2.43E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80018E1	-5.00679E-4	-8.80002E1	2.86102E-4	5.4121E-3	9.28879E-2	2.72656E1	-3.26113E1	-3.26272E1	2.68388E1	1.69949E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.5227E-2
1.7E1	3.19E2	1.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80019E1	-4.52995E-4	-8.8E1	2.6226E-4	5.60284E-3	9.29832E-2	2.73263E1	-3.26673E1	-3.26189E1	2.67879E1	1.70028E-8	2.51417E-3	2.51417E-3	6.34518E-3	2.52139E-2
1.8E1	1.265E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80017E1	-2.86102E-4	-8.79998E1	3.09944E-4	5.67436E-3	9.31501E-2	2.73231E1	-3.27083E1	-3.2596E1	2.6819E1	1.69949E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.51832E-2
1.9E1	2.386E3	4.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80017E1	2.38419E-5	-8.80003E1	1.19209E-4	6.03199E-3	9.31978E-2	2.73015E1	-3.26795E1	-3.2635E1	2.68016E1	1.70318E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.52139E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80017E1	1.19209E-4	-8.80003E1	1.66893E-4	5.34058E-3	9.31978E-2	2.73243E1	-3.26915E1	-3.26362E1	2.67722E1	1.70023E-8	2.52209E-3	2.52209E-3	6.26371E-3	2.51613E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80018E1	7.15256E-5	-8.80002E1	1.43051E-4	5.48363E-3	9.31025E-2	2.72986E1	-3.26744E1	-3.26107E1	2.68268E1	1.69949E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.51177E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.8002E1	-4.76837E-5	-8.80001E1	1.90735E-4	5.38826E-3	9.30548E-2	2.73157E1	-3.26703E1	-3.25942E1	2.67852E1	1.70173E-8	2.52384E-3	2.52384E-3	6.29665E-3	2.50852E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80017E1	0.0E0	-8.80001E1	1.66893E-4	5.126E-3	9.31263E-2	2.72967E1	-3.26615E1	-3.26591E1	2.68244E1	1.70096E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.51613E-2