[Scan]
initial_time=2016-02-15T17:45:03
final_time=2016-02-15T17:45:23
ip_count=19
run=1030
dataset=1
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.746E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.63829E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=4.43447E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.83516E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=9.08911E-10
mult1=-1.021E-8
mult2=-2.7246E-9
rf_tmon=-4.26609E-3
rf_agc=3.2895E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.56548E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53376E1
cs_ef1b_imon=2.97297E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.48849E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99329E0
lens1_imon=1.64372E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64254E1
os_ef1alow_imon=2.99459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.5512E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.98739E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.17185E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.86773E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=1.8861E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63269E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=1.23288E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=3.05406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=8.07476E-10
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-1.51543E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98566E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.47845E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2503E0
ionrepsh_imon=1.88177E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.1936E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73954E-1
os_ea2_imon=-4.21914E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53576E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.86521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.26803E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68123E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.08859E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.61514E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.40804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.73752E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.32513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33855E1
os_fil1_imon=5.28078E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4792E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66378E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=9.99915E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61411E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67083E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00922E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65922E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22323E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.51832E-2
chamber_ion_pmon=1.69949E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45186E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.108E3	7.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80021E1	4.76837E-5	-8.80004E1	1.90735E-4	5.17368E-3	9.29117E-2	2.72985E1	-3.26783E1	-3.26374E1	2.6786E1	1.70244E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.50741E-2
2.0E0	2.899E3	5.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80019E1	-4.52995E-4	-8.80002E1	1.43051E-4	5.48363E-3	9.29832E-2	2.72991E1	-3.26651E1	-3.26314E1	2.68208E1	1.70244E-8	2.52428E-3	2.52428E-3	6.34037E-3	2.52489E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.8002E1	-2.86102E-4	-8.80005E1	-4.76837E-5	5.14984E-3	9.30309E-2	2.73027E1	-3.2636E1	-3.26166E1	2.67746E1	1.70092E-8	2.51359E-3	2.51359E-3	6.3074E-3	2.51514E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.8002E1	-2.6226E-4	-8.80002E1	1.66893E-4	5.03063E-3	9.28402E-2	2.73255E1	-3.26506E1	-3.26506E1	2.67862E1	1.701E-8	2.52061E-3	2.52061E-3	6.28056E-3	2.51494E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80017E1	-1.66893E-4	-8.80001E1	4.05312E-4	4.8399E-3	9.29832E-2	2.72889E1	-3.2633E1	-3.2644E1	2.68314E1	1.701E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.52139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80018E1	-1.66893E-4	-8.80002E1	1.19209E-4	5.57899E-3	9.28879E-2	2.73185E1	-3.26737E1	-3.26235E1	2.6781E1	1.70247E-8	2.52236E-3	2.52236E-3	6.31798E-3	2.51801E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8002E1	9.53674E-5	-8.80003E1	-4.76837E-5	5.53131E-3	9.29594E-2	2.73189E1	-3.26314E1	-3.26104E1	2.681E1	1.70083E-8	2.52802E-3	2.52802E-3	6.29002E-3	2.51074E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.8002E1	2.38419E-5	-8.80003E1	1.43051E-4	5.05447E-3	9.29594E-2	2.73333E1	-3.26314E1	-3.26362E1	2.68142E1	1.70096E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.50959E-2
1.2E1	5.8E1	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80019E1	2.6226E-4	-8.8E1	3.8147E-4	5.26905E-3	9.2721E-2	2.72977E1	-3.26725E1	-3.26457E1	2.67986E1	1.69875E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.5227E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80018E1	-1.90735E-4	-8.80004E1	2.6226E-4	5.6982E-3	9.27687E-2	2.73014E1	-3.27271E1	-3.26572E1	2.6769E1	1.70112E-8	2.51726E-3	2.51726E-3	6.32573E-3	2.52358E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80017E1	-1.66893E-4	-8.80004E1	-3.33786E-4	5.26905E-3	9.3174E-2	2.73409E1	-3.26181E1	-3.26141E1	2.67913E1	1.70158E-8	2.52384E-3	2.52384E-3	6.34301E-3	2.53087E-2
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80018E1	-1.90735E-4	-8.80005E1	-9.53674E-5	5.24521E-3	9.30071E-2	2.7321E1	-3.26673E1	-3.26077E1	2.68111E1	1.70158E-8	2.52384E-3	2.52384E-3	6.27788E-3	2.51194E-2
1.6E1	2.56E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80017E1	-2.38419E-5	-8.80002E1	2.6226E-4	5.53131E-3	9.30309E-2	2.73051E1	-3.26721E1	-3.26232E1	2.68157E1	1.69738E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.51924E-2
1.7E1	3.01E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80018E1	-3.8147E-4	-8.80001E1	9.53674E-5	5.43594E-3	9.30548E-2	2.73255E1	-3.26814E1	-3.26165E1	2.67889E1	1.69968E-8	2.51783E-3	2.51783E-3	6.29703E-3	2.50855E-2
1.8E1	1.23E3	5.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80018E1	-4.76837E-4	-8.80001E1	-1.43051E-4	5.36442E-3	9.28879E-2	2.72788E1	-3.26646E1	-3.26468E1	2.67907E1	1.70083E-8	2.5257E-3	2.5257E-3	6.31321E-3	2.51999E-2
1.9E1	2.348E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.8002E1	-4.05312E-4	-8.80003E1	-1.66893E-4	5.38826E-3	9.30548E-2	2.73063E1	-3.26705E1	-3.26188E1	2.68064E1	1.69942E-8	2.52362E-3	2.52362E-3	6.32978E-3	2.53078E-2
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-5.24521E-4	-8.80003E1	1.66893E-4	5.88894E-3	9.31025E-2	2.72945E1	-3.2639E1	-3.2629E1	2.67984E1	1.7017E-8	2.52428E-3	2.52428E-3	6.30192E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80019E1	-2.14577E-4	-8.80001E1	-2.38419E-5	5.6982E-3	9.31978E-2	2.73139E1	-3.26726E1	-3.26272E1	2.6801E1	1.70246E-8	2.51632E-3	2.51632E-3	6.33436E-3	2.53649E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80019E1	-2.14577E-4	-8.80003E1	-4.76837E-5	5.57899E-3	9.30786E-2	2.73246E1	-3.26815E1	-3.26219E1	2.67908E1	1.69955E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.52139E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.8002E1	-1.90735E-4	-8.80005E1	-2.38419E-5	5.45979E-3	9.29117E-2	2.72835E1	-3.26609E1	-3.26284E1	2.68123E1	1.69949E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.51832E-2