[Scan]
initial_time=2016-02-15T17:45:31
final_time=2016-02-15T17:45:52
ip_count=19
run=1030
dataset=1
scan=66
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.85036E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.32615E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=4.44341E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.90558E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=8.80802E-10
mult1=-1.04333E-8
mult2=-2.76441E-9
rf_tmon=-3.41816E-3
rf_agc=3.54033E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=4.52173E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63902E0
bslens_imon=2.6694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98404E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53474E1
cs_ef1b_imon=2.96826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04775E1
cs_ea1_imon=2.48447E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01809E0
lens1_imon=1.65578E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64687E1
os_ef1alow_imon=2.98806E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.56014E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84266E1
cs_ef1a_imon=2.98671E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.4769E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11308E1
os_restr1_imon=2.86156E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=1.89141E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63865E1
os_ef1bup_imon=3.09308E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25378E0
cs_ionrep_imon=1.22584E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0181E1
cs_anode1_imon=3.0555E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=8.37517E-10
tplens_vset=1.4E-1
tplens_vmon=1.57151E0
tplens_imon=-3.27813E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26537E1
iondef3_imon=1.50509E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58866E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98527E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.58872E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25937E0
ionrepsh_imon=1.89107E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.20019E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.1263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55826E-1
os_ea2_imon=-7.20504E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60932E0
os_ef2alow_imon=-2.57302E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40568E-1
os_ef2bup_imon=-5.29427E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10771E1
os_restr2_imon=2.86793E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.32479E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0172E1
cs_anode2_imon=2.25926E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.09898E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67651E1
iondef4_imon=1.08688E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=2.09104E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=4.3751E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11728E0
cs_ionaccel_imon=-1.88516E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47263E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56193E1
einzel_imon=7.69455E-6
window_vset=0.0E0
window_vmon=1.96195E-1
window_imon=-1.04631E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39047E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.93991E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.81801E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.67686E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.24744E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51751E0
defgridb_imon=6.10293E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33881E1
os_fil1_imon=4.55315E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.84146E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66425E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30797E1
cs_fil1_imon=9.98836E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61952E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66799E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94829E-2
os_fil2_imon=-2.47086E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23044E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69598E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34233E-1
cs_fil2_imon=-2.23039E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.57261E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22406E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.51709E-2
chamber_ion_pmon=1.69811E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.69855E-1
res40_imon=-2.63678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=112
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.052E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80018E1	-1.43051E-4	-8.80003E1	1.19209E-4	5.4121E-3	9.29594E-2	2.73036E1	-3.2629E1	-3.26393E1	2.67831E1	1.70282E-8	2.52363E-3	2.52363E-3	6.32075E-3	2.52608E-2
2.0E0	2.862E3	1.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80018E1	-5.72205E-4	-8.80002E1	2.38419E-5	5.24521E-3	9.32217E-2	2.73117E1	-3.26736E1	-3.26246E1	2.67978E1	1.69938E-8	2.51709E-3	2.51709E-3	6.3074E-3	2.50119E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.8002E1	-1.66893E-4	-8.80001E1	2.38419E-5	5.36442E-3	9.31978E-2	2.7298E1	-3.26552E1	-3.26351E1	2.68432E1	1.70083E-8	2.51758E-3	2.51758E-3	6.33232E-3	2.52198E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80018E1	0.0E0	-8.80002E1	1.90735E-4	5.65052E-3	9.28164E-2	2.7319E1	-3.27118E1	-3.26585E1	2.67456E1	1.70079E-8	2.51557E-3	2.51557E-3	6.33112E-3	2.52139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80018E1	-1.66893E-4	-8.80001E1	1.66893E-4	5.48363E-3	9.31025E-2	2.73186E1	-3.26681E1	-3.26332E1	2.68327E1	1.70318E-8	2.51709E-3	2.51709E-3	6.32858E-3	2.53494E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80017E1	-1.19209E-4	-8.80002E1	7.15256E-5	5.57899E-3	9.32693E-2	2.72901E1	-3.26418E1	-3.26152E1	2.68133E1	1.70163E-8	2.52399E-3	2.52399E-3	6.31894E-3	2.51954E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80018E1	-1.43051E-4	-8.8E1	-1.90735E-4	5.05447E-3	9.31025E-2	2.729E1	-3.26639E1	-3.26493E1	2.67628E1	1.70113E-8	2.52141E-3	2.52141E-3	6.29224E-3	2.51714E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80017E1	-3.8147E-4	-8.79998E1	2.38419E-5	5.19753E-3	9.29356E-2	2.72803E1	-3.26558E1	-3.26363E1	2.68047E1	1.70119E-8	2.51694E-3	2.51694E-3	6.30247E-3	2.51942E-2
1.2E1	6.7E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.8002E1	-5.96046E-4	-8.80001E1	1.43051E-4	5.26905E-3	9.31025E-2	2.73136E1	-3.26744E1	-3.26442E1	2.68384E1	1.7012E-8	2.52074E-3	2.52074E-3	6.3158E-3	2.51586E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80019E1	-2.38419E-5	-8.80003E1	4.52995E-4	5.14984E-3	9.30548E-2	2.7298E1	-3.26626E1	-3.26219E1	2.67555E1					
1.4E1	4.3E1	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80022E1	-1.90735E-4	-8.80004E1	2.38419E-5	5.4121E-3	9.30071E-2	2.73092E1	-3.26815E1	-3.26219E1	2.68094E1	1.70247E-8	2.51919E-3	2.51919E-3	6.33388E-3	2.52858E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.8002E1	4.76837E-5	-8.80005E1	2.38419E-4	5.36442E-3	9.29356E-2	2.72992E1	-3.26845E1	-3.26462E1	2.68012E1	1.70179E-8	2.51921E-3	2.51921E-3	6.33836E-3	2.52036E-2
1.6E1	2.53E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80018E1	-1.43051E-4	-8.80004E1	7.15256E-5	5.36442E-3	9.32932E-2	2.73155E1	-3.26217E1	-3.26009E1	2.67938E1					
1.7E1	3.51E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80017E1	-4.76837E-5	-8.80004E1	2.14577E-4	5.24521E-3	9.32217E-2	2.72971E1	-3.26653E1	-3.263E1	2.67798E1	1.70092E-8	2.5147E-3	2.5147E-3	6.30182E-3	2.53526E-2
1.8E1	1.26E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80018E1	-5.00679E-4	-8.80001E1	4.76837E-4	5.81741E-3	9.3174E-2	2.73057E1	-3.26842E1	-3.26378E1	2.68071E1	1.69828E-8	2.5199E-3	2.5199E-3	6.3282E-3	2.51475E-2
1.9E1	2.357E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80018E1	-2.6226E-4	-8.80005E1	1.90735E-4	5.48363E-3	9.30786E-2	2.73057E1	-3.26508E1	-3.26119E1	2.68136E1	1.70183E-8	2.51623E-3	2.51623E-3	6.34261E-3	2.51258E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.8002E1	4.76837E-5	-8.80005E1	7.15256E-5	5.53131E-3	9.31501E-2	2.72992E1	-3.26874E1	-3.2652E1	2.67722E1	1.70096E-8	2.51771E-3	2.51771E-3	6.35692E-3	2.50741E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.8002E1	-2.38419E-5	-8.80004E1	1.43051E-4	5.36442E-3	9.3317E-2	2.7329E1	-3.26664E1	-3.26372E1	2.67972E1	1.70028E-8	2.51203E-3	2.51203E-3	6.30202E-3	2.51709E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80021E1	-7.15256E-5	-8.80002E1	2.38419E-4	5.8651E-3	9.29594E-2	2.73171E1	-3.26647E1	-3.26101E1	2.67917E1	1.70081E-8	2.51973E-3	2.51973E-3	6.32247E-3	2.52359E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.8002E1	-5.24521E-4	-8.80001E1	0.0E0	5.55515E-3	9.31263E-2	2.73122E1	-3.26567E1	-3.26537E1	2.67651E1	1.69811E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.51709E-2