[Scan]
initial_time=2016-02-15T17:46:25
final_time=2016-02-15T17:46:45
ip_count=19
run=1030
dataset=1
scan=68
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.74737E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.93197E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=4.22716E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.91447E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=8.5156E-10
mult1=-1.02306E-8
mult2=-2.67192E-9
rf_tmon=-4.29227E-3
rf_agc=3.29263E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.57549E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64889E0
bslens_imon=2.57997E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19763E1
lens5a_imon=1.99462E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.97891E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.0225E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.49102E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01771E0
lens1_imon=1.27381E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64598E1
os_ef1alow_imon=2.98111E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.5428E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84065E1
cs_ef1a_imon=2.98111E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.27949E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10951E1
os_restr1_imon=2.86308E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15284E1
os_ea1_imon=1.88975E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63756E1
os_ef1bup_imon=3.08093E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25995E0
cs_ionrep_imon=1.23133E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93436E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01789E1
cs_anode1_imon=3.07245E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=8.09932E-10
tplens_vset=1.4E-1
tplens_vmon=1.59486E0
tplens_imon=-2.48993E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26729E1
iondef3_imon=1.49979E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26874E1
iondef2_imon=1.60403E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=4.46963E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26099E0
ionrepsh_imon=1.8841E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33866E1
lens5b_imon=2.18929E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12927E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.38467E-1
os_ea2_imon=-4.93897E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00638E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71247E1
cs_ef2a_imon=3.20586E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60701E0
os_ef2alow_imon=-2.74599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.39702E-1
os_ef2bup_imon=-5.30109E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.86277E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.3153E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01925E1
cs_anode2_imon=2.2692E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7297E1
iondef1_imon=1.09444E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.08896E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.06048E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=2.95866E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14897E0
cs_ionaccel_imon=-1.89848E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47239E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56473E1
einzel_imon=7.54345E-6
window_vset=0.0E0
window_vmon=1.92948E-1
window_imon=-1.01957E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.3894E-4
mask2_vset=0.0E0
mask2_vmon=-1.86475E1
mask2_imon=-5.76984E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.46549E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.52041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.17977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42203E0
defgridb_imon=6.11538E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33878E1
os_fil1_imon=4.7303E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83785E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6653E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30824E1
cs_fil1_imon=1.00007E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61953E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66853E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10866E-2
os_fil2_imon=-2.51018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.54912E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6292E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33373E-1
cs_fil2_imon=-2.89209E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.27554E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22688E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32555E-3
inlet_lpb_pmon=2.50838E-2
chamber_ion_pmon=1.69992E-8
chamber_cvt_pmon=2.51468E-3
foreline_cvt_pmon=2.51468E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78785E-1
res40_imon=-2.50743E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=802
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.036E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.8002E1	-2.6226E-4	-8.80005E1	-1.66893E-4	5.31673E-3	9.33409E-2	2.72979E1	-3.26969E1	-3.26512E1	2.67625E1	1.70023E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.51395E-2
2.0E0	2.836E3	4.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80018E1	-6.19888E-4	-8.80005E1	0.0E0	5.45979E-3	9.33647E-2	2.7303E1	-3.267E1	-3.26155E1	2.69177E1	1.70443E-8	2.52051E-3	2.52051E-3	6.3074E-3	2.50224E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.8002E1	-3.09944E-4	-8.80005E1	2.14577E-4	5.53131E-3	9.32693E-2	2.73069E1	-3.27015E1	-3.2636E1	2.67992E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80019E1	-4.52995E-4	-8.80008E1	3.09944E-4	5.57899E-3	9.30309E-2	2.73189E1	-3.26825E1	-3.26356E1	2.67493E1	1.70246E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.50424E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80019E1	-4.05312E-4	-8.8E1	-4.76837E-5	5.6982E-3	9.28879E-2	2.72979E1	-3.26609E1	-3.26272E1	2.68268E1	1.69949E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.51613E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80019E1	-9.53674E-5	-8.80003E1	1.19209E-4	5.45979E-3	9.32455E-2	2.73009E1	-3.26615E1	-3.26194E1	2.6801E1	1.70096E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.51832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8002E1	-3.8147E-4	-8.80001E1	7.15256E-5	5.24521E-3	9.29117E-2	2.72865E1	-3.26663E1	-3.26344E1	2.68629E1	1.70017E-8	2.51915E-3	2.51915E-3	6.29624E-3	2.51292E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80018E1	-3.33786E-4	-8.80004E1	7.15256E-5	5.00679E-3	9.31501E-2	2.73075E1	-3.2664E1	-3.26346E1	2.67619E1	1.69955E-8	2.52384E-3	2.52384E-3	6.30202E-3	2.50424E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80017E1	-1.66893E-4	-8.80001E1	-2.38419E-4	5.53131E-3	9.27687E-2	2.73151E1	-3.26506E1	-3.26056E1	2.67841E1	1.70168E-8	2.51693E-3	2.51693E-3	6.32978E-3	2.52183E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80015E1	-3.57628E-4	-8.80001E1	-3.57628E-4	5.76973E-3	9.31025E-2	2.73009E1	-3.26585E1	-3.26312E1	2.67611E1	1.70216E-8	2.51914E-3	2.51914E-3	6.33021E-3	2.52169E-2
1.4E1	4.4E1	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80017E1	-1.90735E-4	-8.80002E1	2.38419E-5	5.60284E-3	9.29117E-2	2.73166E1	-3.26744E1	-3.26282E1	2.67774E1	1.7012E-8	2.52071E-3	2.52071E-3	6.29518E-3	2.50133E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80016E1	-2.14577E-4	-8.80001E1	7.15256E-5	5.14984E-3	9.30309E-2	2.72967E1	-3.26777E1	-3.26314E1	2.68202E1	1.70243E-8	2.52697E-3	2.52697E-3	6.33538E-3	2.51737E-2
1.6E1	2.76E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80018E1	-3.57628E-4	-8.80004E1	3.8147E-4	5.31673E-3	9.3174E-2	2.72915E1	-3.26366E1	-3.26231E1	2.67352E1					
1.7E1	3.51E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80015E1	-9.53674E-5	-8.80003E1	2.6226E-4	5.34058E-3	9.28879E-2	2.73118E1	-3.26564E1	-3.26415E1	2.67763E1	1.70247E-8	2.51814E-3	2.51814E-3	6.31269E-3	2.50959E-2
1.8E1	1.202E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80015E1	-1.90735E-4	-8.80001E1	2.6226E-4	5.22137E-3	9.2721E-2	2.73142E1	-3.25858E1	-3.26416E1	2.68045E1	1.70137E-8	2.51699E-3	2.51699E-3	6.31077E-3	2.51092E-2
1.9E1	2.358E3	5.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80018E1	-3.57628E-4	-8.80002E1	1.90735E-4	4.93526E-3	9.29832E-2	2.7311E1	-3.26608E1	-3.2629E1	2.67902E1					
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80017E1	-6.19888E-4	-8.8E1	5.00679E-4	5.29289E-3	9.30309E-2	2.73145E1	-3.26335E1	-3.26447E1	2.67695E1	1.701E-8	2.52384E-3	2.52384E-3	6.28592E-3	2.50424E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80018E1	-3.57628E-4	-8.8E1	1.43051E-4	5.05447E-3	9.3174E-2	2.73192E1	-3.26866E1	-3.26309E1	2.68201E1	1.70165E-8	2.51384E-3	2.51384E-3	6.31879E-3	2.53005E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.80018E1	-5.48363E-4	-8.79999E1	2.86102E-4	5.00679E-3	9.33886E-2	2.73144E1	-3.26624E1	-3.26108E1	2.68556E1	1.70052E-8	2.51203E-3	2.51203E-3	6.31727E-3	2.52336E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80014E1	-3.57628E-4	-8.79999E1	-1.43051E-4	5.03063E-3	9.27925E-2	2.7297E1	-3.26874E1	-3.26729E1	2.681E1	1.69992E-8	2.51468E-3	2.51468E-3	6.32555E-3	2.50838E-2