[Scan]
initial_time=2016-02-15T17:46:52
final_time=2016-02-15T17:47:12
ip_count=19
run=1030
dataset=1
scan=69
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.77147E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.15919E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=3.86703E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.86977E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=8.69298E-10
mult1=-7.85615E-9
mult2=-3.2916E-9
rf_tmon=-6.7393E-3
rf_agc=3.0047E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=4.19104E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05217E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=2.97418E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.48203E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98287E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64417E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0392E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84904E1
cs_ef1a_imon=2.97904E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=4.17078E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11193E1
os_restr1_imon=2.8661E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=1.88529E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63444E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.21563E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=3.05724E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=7.81882E-10
tplens_vset=1.4E-1
tplens_vmon=1.61194E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24886E1
iondef3_imon=1.48427E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27104E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98594E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.53782E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.89343E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74536E1
cs_ef2b_imon=3.11632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.74631E-1
os_ea2_imon=-4.86476E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62971E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.2483E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10706E1
os_restr2_imon=2.87166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.25167E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74024E1
iondef1_imon=1.08609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68175E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.0871E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.29661E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-1.89343E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=2.11894E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.88069E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.53217E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.27191E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33859E1
os_fil1_imon=4.76206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33375E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66545E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.99026E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61798E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67109E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.0181E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6648E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33397E-1
cs_fil2_imon=-2.11894E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29624E-3
inlet_lpb_pmon=2.5107E-2
chamber_ion_pmon=1.69942E-8
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.99954E-1
res40_imon=-2.66494E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.039E3	0.0E0	1.47E2	4.1E1	-7.12368E-2	-8.8002E1	-2.86102E-4	-8.80001E1	-1.43051E-4	5.14984E-3	9.29594E-2	2.73177E1	-3.26176E1	-3.26254E1	2.68004E1	1.701E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.51924E-2
2.0E0	2.943E3	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80021E1	-4.29153E-4	-8.80001E1	-7.15256E-5	5.17368E-3	9.31978E-2	2.73123E1	-3.26801E1	-3.26218E1	2.68088E1	1.70244E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.50741E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.8002E1	-3.09944E-4	-8.80003E1	-2.6226E-4	5.10216E-3	9.30071E-2	2.73033E1	-3.26831E1	-3.26675E1	2.68653E1	1.7017E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.51832E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80018E1	-4.29153E-4	-8.80001E1	-1.90735E-4	5.36442E-3	9.29117E-2	2.73246E1	-3.26549E1	-3.26089E1	2.67491E1	1.70023E-8	2.52977E-3	2.52977E-3	6.26371E-3	2.51613E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80019E1	-4.29153E-4	-8.80001E1	-2.38419E-5	5.14984E-3	9.31025E-2	2.72732E1	-3.26663E1	-3.2607E1	2.68116E1	1.70246E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.5128E-2
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80018E1	-3.09944E-4	-8.80002E1	-2.38419E-5	5.48363E-3	9.32217E-2	2.73075E1	-3.26236E1	-3.26482E1	2.67535E1	1.69494E-8	2.52364E-3	2.52364E-3	6.29211E-3	2.51365E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80022E1	-4.05312E-4	-8.8E1	-3.57628E-4	5.14984E-3	9.31978E-2	2.72962E1	-3.26555E1	-3.26195E1	2.68082E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52928E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80023E1	-5.96046E-4	-8.8E1	-7.15256E-5	5.10216E-3	9.31025E-2	2.73159E1	-3.26567E1	-3.2614E1	2.68232E1	1.69955E-8	2.52707E-3	2.52707E-3	6.31817E-3	2.52139E-2
1.2E1	7.5E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80018E1	-3.33786E-4	-8.80004E1	-1.19209E-4	5.38826E-3	9.29117E-2	2.72684E1	-3.26446E1	-3.26386E1	2.67674E1	1.70023E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.51613E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80022E1	-1.66893E-4	-8.80003E1	2.38419E-5	5.10216E-3	9.29594E-2	2.73144E1	-3.26695E1	-3.26521E1	2.68372E1	1.70244E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.50741E-2
1.4E1	3.3E1	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80023E1	-5.72205E-4	-8.80005E1	-3.09944E-4	5.19753E-3	9.29594E-2	2.72926E1	-3.26585E1	-3.26335E1	2.67608E1	1.69962E-8	2.52131E-3	2.52131E-3	6.30212E-3	2.5159E-2
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80019E1	-3.09944E-4	-8.80006E1	1.19209E-4	4.95911E-3	9.29832E-2	2.73063E1	-3.26921E1	-3.26319E1	2.68256E1	1.70318E-8	2.52407E-3	2.52407E-3	6.3131E-3	2.52093E-2
1.6E1	2.38E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80021E1	-7.86781E-4	-8.80003E1	-1.19209E-4	5.07832E-3	9.31978E-2	2.72721E1	-3.26669E1	-3.2626E1	2.67966E1	1.69955E-8	2.51954E-3	2.51954E-3	6.29128E-3	2.51709E-2
1.7E1	3.08E2	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80018E1	-6.91414E-4	-8.80006E1	1.19209E-4	4.93526E-3	9.30786E-2	2.72919E1	-3.26621E1	-3.26356E1	2.68142E1	1.7017E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.5227E-2
1.8E1	1.236E3	2.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80019E1	-5.24521E-4	-8.80001E1	9.53674E-5	5.22137E-3	9.32932E-2	2.73105E1	-3.26567E1	-3.26524E1	2.68076E1	1.69949E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.52489E-2
1.9E1	2.391E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80019E1	-2.38419E-4	-8.80003E1	0.0E0	4.95911E-3	9.32455E-2	2.73417E1	-3.26484E1	-3.2606E1	2.68448E1	1.69875E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.51613E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80019E1	-2.14577E-4	-8.80003E1	-1.90735E-4	4.8399E-3	9.3174E-2	2.73177E1	-3.26615E1	-3.26236E1	2.67493E1	1.69883E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.53E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-2.86102E-4	-8.8E1	-9.53674E-5	4.98295E-3	9.32932E-2	2.72927E1	-3.26296E1	-3.26231E1	2.68076E1	1.69949E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.52051E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80018E1	-3.33786E-4	-8.80004E1	7.15256E-5	4.57764E-3	9.29594E-2	2.73112E1	-3.2697E1	-3.26162E1	2.6777E1	1.69883E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.51924E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80018E1	-3.8147E-4	-8.80005E1	4.76837E-5	4.8399E-3	9.31263E-2	2.74024E1	-3.27104E1	-3.24886E1	2.68175E1	1.69942E-8	2.51804E-3	2.51804E-3	6.29624E-3	2.5107E-2