[Scan]
initial_time=2016-02-15T17:48:12
final_time=2016-02-15T17:48:32
ip_count=19
run=1030
dataset=1
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82561E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.97751E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=4.13978E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.86229E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=8.82733E-10
mult1=-8.97229E-9
mult2=-2.37008E-9
rf_tmon=-5.81939E-3
rf_agc=3.28937E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.14896E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63369E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.97045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.49678E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98668E0
lens1_imon=1.54639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.55156E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.98378E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.9537E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.88503E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.89691E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=1.22892E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.05946E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=8.64291E-10
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27289E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26205E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.50408E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=1.89475E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40308E-1
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60116E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29549E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.31514E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7239E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.04672E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.55303E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.58829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.5789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.07278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4557E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33867E1
os_fil1_imon=5.23873E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66453E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.98744E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62342E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67159E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.63806E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59735E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22425E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.50638E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9353E-1
res40_imon=-2.69158E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.081E3	0.0E0	1.47E2	4.1E1	-7.44831E-2	-8.80022E1	-4.52995E-4	-8.80003E1	4.76837E-4	5.14984E-3	9.32932E-2	2.73115E1	-3.26573E1	-3.26503E1	2.67248E1	1.70244E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.5227E-2
2.0E0	2.866E3	4.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80018E1	-2.38419E-4	-8.80003E1	3.57628E-4	5.26905E-3	9.32455E-2	2.73039E1	-3.26646E1	-3.26272E1	2.67932E1	1.69955E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.51066E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.8002E1	-7.15256E-4	-8.80001E1	1.90735E-4	5.126E-3	9.3317E-2	2.7321E1	-3.2688E1	-3.26266E1	2.68028E1	1.70168E-8	2.52362E-3	2.52362E-3	6.32418E-3	2.5107E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.8002E1	-3.57628E-4	-8.8E1	2.14577E-4	5.4121E-3	9.33409E-2	2.72883E1	-3.26536E1	-3.2629E1	2.67998E1	1.70318E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.53216E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80022E1	-7.15256E-4	-8.80001E1	2.6226E-4	5.05447E-3	9.34362E-2	2.73189E1	-3.26506E1	-3.26218E1	2.67571E1	1.7017E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.52709E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.8002E1	-1.66893E-4	-8.8E1	9.53674E-5	5.14984E-3	9.3174E-2	2.7308E1	-3.26632E1	-3.26178E1	2.69049E1	1.69955E-8	2.52061E-3	2.52061E-3	6.28592E-3	2.52785E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.8002E1	1.66893E-4	-8.80003E1	1.19209E-4	5.67436E-3	9.32932E-2	2.73057E1	-3.26506E1	-3.26152E1	2.67601E1	1.70023E-8	2.52538E-3	2.52538E-3	6.29645E-3	2.52928E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80019E1	2.38419E-5	-8.80005E1	1.90735E-4	5.19753E-3	9.32455E-2	2.72845E1	-3.26543E1	-3.26101E1	2.69091E1	1.701E-8	2.51417E-3	2.51417E-3	6.26985E-3	2.52569E-2
1.2E1	7.1E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.8002E1	-4.05312E-4	-8.80003E1	2.38419E-4	5.19753E-3	9.32455E-2	2.72843E1	-3.2686E1	-3.26095E1	2.66893E1	1.70096E-8	2.52099E-3	2.52099E-3	6.26916E-3	2.52051E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80021E1	-2.14577E-4	-8.80003E1	0.0E0	5.50747E-3	9.33647E-2	2.73004E1	-3.2636E1	-3.26024E1	2.68064E1	1.69727E-8	2.5188E-3	2.5188E-3	6.29098E-3	2.51177E-2
1.4E1	5.0E1	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.8002E1	-2.38419E-4	-8.80001E1	4.76837E-5	5.38826E-3	9.32217E-2	2.73267E1	-3.26434E1	-3.26182E1	2.678E1	1.70096E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.51832E-2
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80021E1	-9.53674E-5	-8.80003E1	2.6226E-4	5.48363E-3	9.3317E-2	2.73369E1	-3.26549E1	-3.26206E1	2.68052E1	1.69875E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52489E-2
1.6E1	2.75E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.8002E1	-5.48363E-4	-8.8E1	1.43051E-4	5.45979E-3	9.32693E-2	2.73892E1	-3.27774E1	-3.26038E1	2.68322E1	1.69801E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.53148E-2
1.7E1	2.75E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80018E1	-5.00679E-4	-8.79999E1	1.66893E-4	5.24521E-3	9.31263E-2	2.72847E1	-3.2644E1	-3.26392E1	2.67517E1	1.7017E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.51177E-2
1.8E1	1.199E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80021E1	-4.05312E-4	-8.79999E1	3.8147E-4	5.36442E-3	9.32217E-2	2.72733E1	-3.26567E1	-3.26452E1	2.68124E1	1.69875E-8	2.51443E-3	2.51443E-3	6.34588E-3	2.50959E-2
1.9E1	2.338E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80019E1	-1.66893E-4	-8.8E1	9.53674E-5	5.17368E-3	9.29594E-2	2.72931E1	-3.26711E1	-3.26278E1	2.67944E1	1.7017E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.51613E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.8002E1	-4.05312E-4	-8.80002E1	-9.53674E-5	5.45979E-3	9.33409E-2	2.73003E1	-3.27047E1	-3.26158E1	2.67722E1	1.69955E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.51709E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80021E1	-6.67572E-4	-8.79998E1	1.19209E-4	5.45979E-3	9.3317E-2	2.73293E1	-3.2652E1	-3.26154E1	2.67868E1	1.70092E-8	2.51693E-3	2.51693E-3	6.27399E-3	2.50847E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80019E1	-6.91414E-4	-8.79998E1	7.15256E-5	5.53131E-3	9.28164E-2	2.73069E1	-3.26655E1	-3.26685E1	2.68298E1	1.70028E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.50852E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80018E1	-2.14577E-4	-8.80003E1	1.43051E-4	5.29289E-3	9.31025E-2	2.7239E1	-3.26205E1	-3.27289E1	2.67932E1	1.70173E-8	2.52169E-3	2.52169E-3	6.29128E-3	2.50638E-2