[Scan]
initial_time=2016-02-15T17:48:39
final_time=2016-02-15T17:48:58
ip_count=19
run=1030
dataset=1
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.75244E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.69277E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=4.42028E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.8194E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.90923E-10
mult1=-9.31021E-9
mult2=-2.79185E-9
rf_tmon=-4.61566E-3
rf_agc=3.26838E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.25291E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61146E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.98199E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05252E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.97297E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.48921E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99389E0
lens1_imon=1.56441E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04111E1
cs_ea2_imon=1.56021E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84088E1
cs_ef1a_imon=2.97765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.1014E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=2.87638E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.87745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.22747E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=3.05874E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.95376E-10
tplens_vset=1.4E-1
tplens_vmon=1.621E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26101E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26461E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.48728E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=1.88646E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45114E-1
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60116E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28949E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.86197E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.25578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68117E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.10335E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.93224E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.8875E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.00789E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5369E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3388E1
os_fil1_imon=4.54196E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52124E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66888E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=1.00022E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62071E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66832E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88025E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.38209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22397E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.51924E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.74909E-1
res40_imon=-2.71681E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.058E3	1.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80021E1	-1.90735E-4	-8.80005E1	-2.38419E-5	5.57899E-3	9.30309E-2	2.73057E1	-3.26343E1	-3.26484E1	2.684E1	1.7017E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.5227E-2
2.0E0	2.896E3	2.0E0	3.16E2	1.6E2	-7.24736E-2	-8.8002E1	-1.19209E-4	-8.80001E1	7.15256E-5	5.19753E-3	9.30071E-2	2.73033E1	-3.26603E1	-3.26326E1	2.67914E1	1.701E-8	2.52492E-3	2.52492E-3	6.32896E-3	2.53E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80023E1	1.66893E-4	-8.80003E1	-2.38419E-4	5.4121E-3	9.29356E-2	2.72997E1	-3.26561E1	-3.26212E1	2.67752E1	1.70244E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52928E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80023E1	-3.8147E-4	-8.80002E1	4.52995E-4	5.55515E-3	9.32217E-2	2.73316E1	-3.2682E1	-3.26213E1	2.67966E1	1.70246E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.52569E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.8002E1	-1.90735E-4	-8.80002E1	6.4373E-4	5.29289E-3	9.30071E-2	2.72889E1	-3.26633E1	-3.2638E1	2.68166E1	1.70023E-8	2.51552E-3	2.51552E-3	6.27461E-3	2.50523E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.8002E1	-7.39098E-4	-8.80003E1	1.66893E-4	5.65052E-3	9.32693E-2	2.73105E1	-3.26747E1	-3.2629E1	2.6798E1	1.70096E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.51177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80019E1	-5.24521E-4	-8.80001E1	5.24521E-4	5.74589E-3	9.35316E-2	2.72895E1	-3.26615E1	-3.26194E1	2.68328E1	1.70023E-8	2.52318E-3	2.52318E-3	6.3514E-3	2.51395E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.8002E1	-2.86102E-4	-8.80003E1	1.43051E-4	5.38826E-3	9.3174E-2	2.72991E1	-3.26615E1	-3.26254E1	2.67644E1	1.70023E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.51613E-2
1.2E1	6.8E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80019E1	-4.05312E-4	-8.80005E1	2.86102E-4	5.8651E-3	9.29832E-2	2.73222E1	-3.26608E1	-3.26378E1	2.68088E1	1.70023E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.52489E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80018E1	-4.05312E-4	-8.80006E1	2.14577E-4	5.53131E-3	9.27925E-2	2.73189E1	-3.26669E1	-3.265E1	2.68412E1	1.70318E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.52354E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80017E1	-2.6226E-4	-8.80003E1	2.38419E-4	5.48363E-3	9.29356E-2	2.73237E1	-3.26789E1	-3.2644E1	2.6783E1	1.70023E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.53148E-2
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80019E1	-6.91414E-4	-8.80002E1	1.43051E-4	5.43594E-3	9.28164E-2	2.73151E1	-3.26726E1	-3.26354E1	2.673E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.51832E-2
1.6E1	2.53E2	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80015E1	-1.00136E-3	-8.80005E1	3.33786E-4	5.84126E-3	9.31263E-2	2.73081E1	-3.26482E1	-3.26789E1	2.68064E1	1.70028E-8	2.52599E-3	2.52599E-3	6.31278E-3	2.51709E-2
1.7E1	2.9E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80018E1	-1.00136E-3	-8.80003E1	9.53674E-5	5.34058E-3	9.28402E-2	2.72976E1	-3.26677E1	-3.26225E1	2.67723E1	1.7017E-8	2.52538E-3	2.52538E-3	6.25827E-3	2.51177E-2
1.8E1	1.149E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.8002E1	-6.19888E-4	-8.80003E1	9.53674E-5	4.86374E-3	9.30071E-2	2.72892E1	-3.26629E1	-3.26247E1	2.68004E1	1.70176E-8	2.52131E-3	2.52131E-3	6.29157E-3	2.50748E-2
1.9E1	2.339E3	3.0E0	7.68E2	5.29E2	-7.27053E-2	-8.8002E1	-8.82149E-4	-8.80003E1	-2.38419E-5	5.24521E-3	9.3174E-2	2.73063E1	-3.2662E1	-3.26166E1	2.67995E1	1.70165E-8	2.51952E-3	2.51952E-3	6.33021E-3	2.51185E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80022E1	-9.53674E-4	-8.80002E1	-4.76837E-5	5.22137E-3	9.32693E-2	2.73045E1	-3.26651E1	-3.26032E1	2.6813E1	1.70023E-8	2.52867E-3	2.52867E-3	6.29645E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80023E1	-7.86781E-4	-8.80002E1	2.38419E-5	5.17368E-3	9.32455E-2	2.73104E1	-3.26791E1	-3.26372E1	2.68088E1	1.70028E-8	2.51417E-3	2.51417E-3	6.29128E-3	2.52139E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8002E1	-7.86781E-4	-8.79998E1	0.0E0	4.88758E-3	9.31978E-2	2.73129E1	-3.26272E1	-3.26218E1	2.6795E1	1.7017E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.52709E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.8002E1	-8.10623E-4	-8.8E1	1.19209E-4	5.19753E-3	9.34124E-2	2.73063E1	-3.26461E1	-3.26101E1	2.68117E1	1.701E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.51924E-2