[Scan]
initial_time=2016-02-15T17:49:05
final_time=2016-02-15T17:49:25
ip_count=19
run=1030
dataset=1
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.10825E-2
qbias_imon=-3.76343E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.27112E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=4.34232E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.95688E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=8.82733E-10
mult1=-8.78918E-9
mult2=-2.55094E-9
rf_tmon=-4.96304E-3
rf_agc=3.32074E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=4.29511E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.75044E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=2.98043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05294E1
cs_ea1_imon=2.47443E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94162E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.53642E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84371E1
cs_ef1a_imon=2.98982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.25446E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=2.87409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=1.89944E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.07948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2563E0
cs_ionrep_imon=1.21522E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=3.05654E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=8.10158E-10
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-5.76927E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.48739E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03002E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.55821E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=1.89511E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33471E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.07863E-1
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61234E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37572E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10753E1
os_restr2_imon=2.87305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.33173E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.25793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=2.1122E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.54993E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11219E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=2.06102E-1
window_imon=-1.00377E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86466E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=8.18671E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.73752E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33872E1
os_fil1_imon=5.12117E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.45538E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66534E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30797E1
cs_fil1_imon=9.99536E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61874E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66894E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29236E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58833E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.54176E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22409E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.50424E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.22716E-1
res40_imon=-2.67536E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.018E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80018E1	-2.14577E-4	-8.8E1	4.05312E-4	5.36442E-3	9.31263E-2	2.72847E1	-3.26549E1	-3.26224E1	2.66676E1	1.69875E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.50523E-2
2.0E0	2.952E3	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80016E1	-1.90735E-4	-8.80001E1	9.53674E-5	5.43594E-3	9.31263E-2	2.73117E1	-3.26693E1	-3.26627E1	2.68677E1	1.70173E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.52139E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80018E1	-5.96046E-4	-8.79999E1	2.38419E-5	5.17368E-3	9.31263E-2	2.72957E1	-3.26803E1	-3.26236E1	2.67193E1	1.70092E-8	2.51693E-3	2.51693E-3	6.30182E-3	2.50404E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80017E1	-3.09944E-4	-8.79999E1	-1.43051E-4	5.36442E-3	9.30786E-2	2.73219E1	-3.26476E1	-3.26116E1	2.68058E1	1.70173E-8	2.52061E-3	2.52061E-3	6.28056E-3	2.51924E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80014E1	-5.24521E-4	-8.79999E1	2.86102E-4	5.17368E-3	9.26971E-2	2.73003E1	-3.26897E1	-3.26194E1	2.68466E1	1.70062E-8	2.51918E-3	2.51918E-3	6.31012E-3	2.52856E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80017E1	-2.86102E-4	-8.8E1	4.76837E-4	5.31673E-3	9.30309E-2	2.73231E1	-3.26597E1	-3.26266E1	2.67998E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80018E1	-4.29153E-4	-8.80001E1	9.53674E-5	4.93526E-3	9.30071E-2	2.72929E1	-3.26474E1	-3.26389E1	2.67668E1	1.69791E-8	2.52809E-3	2.52809E-3	6.3074E-3	2.5263E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80018E1	-4.05312E-4	-8.79999E1	9.53674E-5	5.05447E-3	9.3174E-2	2.73057E1	-3.2649E1	-3.26095E1	2.67914E1	1.70244E-8	2.52099E-3	2.52099E-3	6.34588E-3	2.51395E-2
1.2E1	6.9E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80018E1	-7.15256E-4	-8.79999E1	3.33786E-4	4.79221E-3	9.31978E-2	2.72552E1	-3.26554E1	-3.26218E1	2.68382E1	1.70023E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.50523E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.8002E1	-8.34465E-4	-8.80003E1	4.05312E-4	4.8399E-3	9.35316E-2	2.73075E1	-3.26909E1	-3.26272E1	2.68178E1	1.70096E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.51613E-2
1.4E1	4.0E1	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80021E1	-4.76837E-4	-8.79999E1	1.43051E-4	4.93526E-3	9.32932E-2	2.73099E1	-3.26969E1	-3.26344E1	2.67956E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52051E-2
1.5E1	4.5E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80018E1	-6.19888E-4	-8.79999E1	2.38419E-4	5.126E-3	9.28402E-2	2.72877E1	-3.26567E1	-3.26554E1	2.67481E1	1.70096E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.5227E-2
1.6E1	2.73E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.8002E1	-2.38419E-4	-8.79999E1	3.57628E-4	4.8399E-3	9.28879E-2	2.73117E1	-3.26092E1	-3.26302E1	2.68526E1	1.70023E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.53368E-2
1.7E1	2.96E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80018E1	-4.05312E-4	-8.8E1	2.38419E-5	5.00679E-3	9.30309E-2	2.72805E1	-3.26699E1	-3.26356E1	2.6658E1	1.70096E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.51832E-2
1.8E1	1.169E3	0.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80018E1	-3.8147E-4	-8.79997E1	2.14577E-4	5.29289E-3	9.30071E-2	2.73267E1	-3.26687E1	-3.26374E1	2.68118E1	1.7017E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.52051E-2
1.9E1	2.413E3	1.0E0	7.68E2	5.29E2	-7.07733E-2	-8.80019E1	-4.05312E-4	-8.79998E1	1.90735E-4	5.14984E-3	9.32693E-2	2.73375E1	-3.26407E1	-3.2626E1	2.67704E1	1.701E-8	2.51739E-3	2.51739E-3	6.35059E-3	2.51494E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.17007E-2	-8.80017E1	-9.53674E-5	-8.80001E1	2.38419E-5	5.55515E-3	9.3317E-2	2.7324E1	-3.26431E1	-3.26319E1	2.67926E1	1.69942E-8	2.51804E-3	2.51804E-3	6.32978E-3	2.53078E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.8002E1	-3.8147E-4	-8.8E1	1.90735E-4	5.38826E-3	9.32217E-2	2.72998E1	-3.26632E1	-3.26248E1	2.67846E1	1.69883E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.51924E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.08504E-2	-8.8002E1	-2.38419E-4	-8.80003E1	9.53674E-5	5.81741E-3	9.32932E-2	2.72943E1	-3.26536E1	-3.26543E1	2.683E1	1.7017E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.50523E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.10825E-2	-8.8002E1	-2.86102E-4	-8.8E1	4.76837E-5	5.84126E-3	9.33886E-2	2.73099E1	-3.2653E1	-3.26158E1	2.68106E1	1.70173E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.50424E-2