[Scan]
initial_time=2016-02-15T17:49:32
final_time=2016-02-15T17:49:51
ip_count=19
run=1030
dataset=1
scan=75
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.73284E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.05881E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=3.97027E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.87608E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=8.59654E-10
mult1=-1.04147E-8
mult2=-2.78249E-9
rf_tmon=-4.39827E-3
rf_agc=3.41207E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=4.36831E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68155E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=2.99121E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04669E1
cs_ea1_imon=2.47141E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01118E0
lens1_imon=1.35402E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.56957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.97835E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.35185E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11204E1
os_restr1_imon=2.88139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=1.87573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23853E0
cs_ionrep_imon=1.22979E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93289E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=3.05063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.94864E-10
tplens_vset=1.4E-1
tplens_vmon=1.5966E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98487E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.57132E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=1.88281E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.16915E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12223E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58114E-1
os_ea2_imon=-5.60803E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61523E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40468E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10828E1
os_restr2_imon=2.86158E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.31698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.26002E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.11015E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.04575E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.66938E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.88301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.5245E-6
window_vset=0.0E0
window_vmon=1.86409E-1
window_imon=-9.93342E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.86616E1
mask2_imon=-7.88302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=8.05412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.36936E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.97106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.31981E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3387E1
os_fil1_imon=4.52459E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.40326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66726E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=1.00009E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61833E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66947E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57368E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32773E-1
cs_fil2_imon=-2.42013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.77107E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22476E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.51709E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36241E-1
res40_imon=-2.75182E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.062E3	1.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80021E1	-4.52995E-4	-8.79998E1	4.05312E-4	5.48363E-3	9.35555E-2	2.73015E1	-3.26585E1	-3.26242E1	2.68118E1	1.701E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.52354E-2
2.0E0	2.884E3	4.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80019E1	-3.57628E-4	-8.79999E1	9.53674E-5	5.62668E-3	9.32455E-2	2.73075E1	-3.26741E1	-3.26224E1	2.67553E1	1.70318E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.51494E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.10051E-2	-8.80018E1	9.53674E-5	-8.79998E1	-1.19209E-4	5.07832E-3	9.31025E-2	2.73093E1	-3.26518E1	-3.26236E1	2.67854E1	1.70096E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.50741E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80018E1	0.0E0	-8.79999E1	3.33786E-4	5.45979E-3	9.36508E-2	2.73045E1	-3.26663E1	-3.26188E1	2.67806E1	1.69942E-8	2.51581E-3	2.51581E-3	6.31299E-3	2.51737E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80019E1	-1.19209E-4	-8.79997E1	-2.38419E-5	4.88758E-3	9.33886E-2	2.72889E1	-3.26705E1	-3.26146E1	2.68022E1	1.70023E-8	2.5188E-3	2.5188E-3	6.35692E-3	2.5227E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80018E1	-2.38419E-5	-8.79997E1	9.53674E-5	5.07832E-3	9.30786E-2	2.72847E1	-3.26669E1	-3.262E1	2.6795E1	1.701E-8	2.5131E-3	2.5131E-3	6.32356E-3	2.5128E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80018E1	-2.38419E-4	-8.79998E1	-4.76837E-5	5.36442E-3	9.34124E-2	2.72363E1	-3.26736E1	-3.2621E1	2.68424E1	1.7017E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.51177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80018E1	-5.72205E-4	-8.80002E1	2.38419E-4	5.50747E-3	9.30071E-2	2.73285E1	-3.26052E1	-3.26169E1	2.67471E1	1.70108E-8	2.52405E-3	2.52405E-3	6.33341E-3	2.51475E-2
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80014E1	-3.8147E-4	-8.80003E1	4.29153E-4	5.45979E-3	9.30786E-2	2.72486E1	-3.25755E1	-3.26681E1	2.6792E1	1.70083E-8	2.51411E-3	2.51411E-3	6.31321E-3	2.52231E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80019E1	-2.6226E-4	-8.80005E1	2.6226E-4	4.93526E-3	9.29832E-2	2.72775E1	-3.26494E1	-3.26158E1	2.68148E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.52489E-2
1.4E1	4.9E1	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80018E1	-1.19209E-4	-8.80001E1	0.0E0	4.86374E-3	9.30786E-2	2.73074E1	-3.26666E1	-3.26393E1	2.68748E1	1.69875E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.52051E-2
1.5E1	4.2E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80018E1	-2.14577E-4	-8.80003E1	-4.76837E-5	5.00679E-3	9.29356E-2	2.73267E1	-3.26759E1	-3.26543E1	2.67668E1	1.69883E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.51924E-2
1.6E1	2.29E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80019E1	-5.24521E-4	-8.80002E1	1.43051E-4	4.98295E-3	9.27687E-2	2.72971E1	-3.2716E1	-3.26113E1	2.67739E1	1.70244E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.51613E-2
1.7E1	2.99E2	2.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80019E1	-2.6226E-4	-8.80002E1	-2.38419E-5	5.60284E-3	9.3174E-2	2.73069E1	-3.26779E1	-3.26313E1	2.67972E1	1.7017E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.51613E-2
1.8E1	1.139E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80015E1	-1.66893E-4	-8.80003E1	-2.14577E-4	5.19753E-3	9.29356E-2	2.73093E1	-3.26723E1	-3.26242E1	2.6783E1	1.70244E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.52489E-2
1.9E1	2.361E3	2.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80014E1	-4.76837E-4	-8.80001E1	-4.76837E-5	5.22137E-3	9.32217E-2	2.73435E1	-3.26705E1	-3.26332E1	2.68502E1	1.70096E-8	2.52428E-3	2.52428E-3	6.29645E-3	2.51613E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80015E1	6.4373E-4	-8.80002E1	0.0E0	5.48363E-3	9.28879E-2	2.73153E1	-3.26783E1	-3.26314E1	2.67716E1	1.70246E-8	2.52384E-3	2.52384E-3	6.3074E-3	2.52354E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80014E1	0.0E0	-8.80004E1	-3.33786E-4	5.10216E-3	9.27448E-2	2.73216E1	-3.26567E1	-3.26189E1	2.68599E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.51395E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80017E1	1.66893E-4	-8.8E1	-2.38419E-5	5.26905E-3	9.29117E-2	2.72909E1	-3.26567E1	-3.26372E1	2.67937E1	1.69521E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.51709E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80018E1	-4.76837E-5	-8.80003E1	0.0E0	5.43594E-3	9.31978E-2	2.73333E1	-3.26765E1	-3.26218E1	2.681E1	1.701E-8	2.52061E-3	2.52061E-3	6.34518E-3	2.51709E-2