[Scan]
initial_time=2016-02-15T17:49:59
final_time=2016-02-15T17:50:18
ip_count=19
run=1030
dataset=1
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.82253E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.48749E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=4.75395E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.01102E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=8.67689E-10
mult1=-9.4755E-9
mult2=-2.57888E-9
rf_tmon=-5.02913E-3
rf_agc=3.34658E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=4.60196E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.9672E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.50008E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01118E0
lens1_imon=1.49559E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04168E1
cs_ea2_imon=1.5501E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83703E1
cs_ef1a_imon=2.96937E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=4.32515E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=2.8717E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.89555E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.22448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.06055E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=7.87592E-10
tplens_vset=1.4E-1
tplens_vmon=1.59542E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2647E1
iondef3_imon=1.51683E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.58656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.65417E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=1.87325E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34017E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49855E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60837E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36156E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=2.86485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.26047E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.09069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.08968E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=4.17984E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47082E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.20346E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.05246E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.78347E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.51967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.31627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33882E1
os_fil1_imon=4.87833E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.9357E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=9.99117E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62041E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66599E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.7582E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4408E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.51613E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.047E3	2.0E0	1.47E2	4.1E1	-7.286E-2	-8.80019E1	-4.05312E-4	-8.80003E1	7.15256E-5	5.26905E-3	9.29594E-2	2.72909E1	-3.2662E1	-3.26343E1	2.6803E1	1.7017E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51395E-2
2.0E0	2.863E3	3.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80021E1	-3.33786E-4	-8.80005E1	1.90735E-4	5.26905E-3	9.27448E-2	2.73082E1	-3.26658E1	-3.2634E1	2.68687E1	1.70318E-8	2.52815E-3	2.52815E-3	6.32356E-3	2.5128E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80017E1	-4.76837E-5	-8.80001E1	-1.43051E-4	5.55515E-3	9.30786E-2	2.72833E1	-3.26526E1	-3.2613E1	2.67931E1	1.70096E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.52489E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80018E1	-1.90735E-4	-8.79997E1	3.09944E-4	5.10216E-3	9.27687E-2	2.73123E1	-3.26627E1	-3.26236E1	2.67728E1	1.70173E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.53E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80018E1	-4.76837E-5	-8.80005E1	1.43051E-4	5.57899E-3	9.29117E-2	2.73243E1	-3.26681E1	-3.26332E1	2.68262E1	1.70096E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80018E1	-2.14577E-4	-8.80004E1	9.53674E-5	5.22137E-3	9.28879E-2	2.72913E1	-3.26567E1	-3.26074E1	2.67842E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80016E1	-4.29153E-4	-8.80002E1	2.86102E-4	5.38826E-3	9.33409E-2	2.72991E1	-3.26434E1	-3.26254E1	2.67848E1	1.70023E-8	2.51334E-3	2.51334E-3	6.29098E-3	2.52489E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80018E1	-1.90735E-4	-8.80002E1	1.43051E-4	5.43594E-3	9.29832E-2	2.73159E1	-3.26651E1	-3.26206E1	2.67956E1	1.70132E-8	2.52229E-3	2.52229E-3	6.3074E-3	2.51454E-2
1.2E1	6.2E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80018E1	-7.15256E-5	-8.80006E1	4.76837E-5	5.60284E-3	9.30548E-2	2.73021E1	-3.26609E1	-3.25984E1	2.6816E1					
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80019E1	-3.09944E-4	-8.8E1	9.53674E-5	5.43594E-3	9.3174E-2	2.72931E1	-3.26789E1	-3.2617E1	2.68322E1	1.701E-8	2.5131E-3	2.5131E-3	6.30202E-3	2.51709E-2
1.4E1	3.3E1	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80021E1	-2.6226E-4	-8.79997E1	-1.43051E-4	5.29289E-3	9.31263E-2	2.73267E1	-3.26687E1	-3.26543E1	2.67974E1	1.69949E-8	2.52647E-3	2.52647E-3	6.30192E-3	2.52051E-2
1.5E1	2.4E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80018E1	-7.15256E-5	-8.80002E1	-1.19209E-4	5.4121E-3	9.30071E-2	2.72937E1	-3.26729E1	-3.2635E1	2.67331E1	1.69875E-8	2.52099E-3	2.52099E-3	6.34037E-3	2.53148E-2
1.6E1	2.43E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80018E1	-3.09944E-4	-8.80001E1	-2.38419E-4	5.81741E-3	9.32932E-2	2.72961E1	-3.26903E1	-3.26759E1	2.68214E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52051E-2
1.7E1	3.15E2	1.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80018E1	-2.86102E-4	-8.79997E1	-1.90735E-4	5.24521E-3	9.31263E-2	2.72791E1	-3.2659E1	-3.26354E1	2.6789E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.50741E-2
1.8E1	1.222E3	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80016E1	-4.05312E-4	-8.79997E1	1.19209E-4	5.19753E-3	9.31501E-2	2.72839E1	-3.26785E1	-3.26278E1	2.68024E1	1.7017E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.5227E-2
1.9E1	2.393E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80019E1	-4.05312E-4	-8.79999E1	2.6226E-4	5.26905E-3	9.31501E-2	2.72898E1	-3.2667E1	-3.26425E1	2.68431E1	1.70173E-8	2.51954E-3	2.51954E-3	6.33977E-3	2.53E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80019E1	-1.00136E-3	-8.8E1	1.43051E-4	5.24521E-3	9.30786E-2	2.73051E1	-3.26791E1	-3.26343E1	2.67178E1	1.70244E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80019E1	-5.24521E-4	-8.79999E1	2.6226E-4	5.55515E-3	9.32693E-2	2.73275E1	-3.26573E1	-3.26119E1	2.6789E1	1.69949E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.5227E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80021E1	-5.24521E-4	-8.79999E1	0.0E0	5.55515E-3	9.31263E-2	2.73057E1	-3.26938E1	-3.26225E1	2.68412E1	1.69962E-8	2.51814E-3	2.51814E-3	6.3074E-3	2.52646E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80022E1	-1.90735E-4	-8.80003E1	-2.6226E-4	5.31673E-3	9.31978E-2	2.73075E1	-3.26693E1	-3.2647E1	2.68292E1	1.70096E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.51613E-2