[Scan]
initial_time=2016-02-15T17:50:25
final_time=2016-02-15T17:50:45
ip_count=19
run=1030
dataset=1
scan=77
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79216E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.10638E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=3.72732E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.91412E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=8.86738E-10
mult1=-9.49958E-9
mult2=-2.81642E-9
rf_tmon=-4.6386E-3
rf_agc=3.32074E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.99339E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05263E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.96144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=2.48875E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04422E0
lens1_imon=1.39649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.98018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.78418E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=2.88179E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.89767E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.22271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=3.05586E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.57217E-10
tplens_vset=1.4E-1
tplens_vmon=1.62669E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.51471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.45402E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=1.89059E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33534E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61858E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.26551E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.97589E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.88753E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=7.52675E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.21528E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33861E1
os_fil1_imon=5.1186E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.88164E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6656E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=9.99873E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61999E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66836E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49648E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22377E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.52139E-2
chamber_ion_pmon=1.70246E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.41583E-1
res40_imon=-2.80691E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.65E2	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80017E1	-4.76837E-4	-8.8E1	1.43051E-4	5.19753E-3	9.32932E-2	2.72979E1	-3.26615E1	-3.26344E1	2.6795E1	1.7017E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.52051E-2
2.0E0	2.83E3	1.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80017E1	-2.14577E-4	-8.79999E1	1.43051E-4	5.22137E-3	9.30786E-2	2.73021E1	-3.26675E1	-3.26386E1	2.68076E1	1.70173E-8	2.51739E-3	2.51739E-3	6.34518E-3	2.53216E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80018E1	-4.76837E-5	-8.80001E1	3.57628E-4	5.29289E-3	9.3317E-2	2.73079E1	-3.26702E1	-3.26495E1	2.67713E1	1.7017E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.50088E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80017E1	-2.86102E-4	-8.79998E1	9.53674E-5	5.34058E-3	9.33886E-2	2.72975E1	-3.26432E1	-3.26553E1	2.6766E1	1.70108E-8	2.51783E-3	2.51783E-3	6.3126E-3	2.50855E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80018E1	-5.24521E-4	-8.80001E1	-7.15256E-5	4.79221E-3	9.29594E-2	2.72835E1	-3.26813E1	-3.2644E1	2.67972E1	1.70083E-8	2.52106E-3	2.52106E-3	6.31321E-3	2.52464E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80018E1	-4.52995E-4	-8.79996E1	2.38419E-4	5.03063E-3	9.29117E-2	2.73008E1	-3.26566E1	-3.26162E1	2.67882E1	1.69738E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.51709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80018E1	-4.76837E-4	-8.80004E1	0.0E0	5.34058E-3	9.33647E-2	2.73311E1	-3.2652E1	-3.26136E1	2.68395E1	1.70092E-8	2.51915E-3	2.51915E-3	6.3074E-3	2.5196E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.8002E1	-6.67572E-4	-8.79999E1	4.76837E-5	5.14984E-3	9.32217E-2	2.73081E1	-3.26603E1	-3.26062E1	2.68353E1	1.69949E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.51832E-2
1.2E1	6.8E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80018E1	-4.29153E-4	-8.80001E1	7.15256E-5	5.03063E-3	9.32932E-2	2.72781E1	-3.26687E1	-3.26266E1	2.67836E1	1.70028E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.53E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80016E1	-2.86102E-4	-8.80002E1	-1.43051E-4	5.29289E-3	9.34601E-2	2.72933E1	-3.26667E1	-3.26331E1	2.6795E1	1.70244E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.52709E-2
1.4E1	4.2E1	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80019E1	-7.15256E-5	-8.80002E1	2.38419E-5	5.10216E-3	9.30548E-2	2.728E1	-3.26376E1	-3.26058E1	2.68178E1	1.70023E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.52051E-2
1.5E1	3.1E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80017E1	-2.6226E-4	-8.80002E1	2.14577E-4	5.26905E-3	9.31263E-2	2.73358E1	-3.26868E1	-3.26154E1	2.67595E1	1.70096E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.52709E-2
1.6E1	2.51E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80015E1	-1.90735E-4	-8.80001E1	2.38419E-4	4.93526E-3	9.30548E-2	2.73488E1	-3.27027E1	-3.26148E1	2.68007E1	1.69955E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.52785E-2
1.7E1	2.65E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80017E1	-3.57628E-4	-8.79998E1	-7.15256E-5	5.55515E-3	9.32455E-2	2.73086E1	-3.26579E1	-3.26396E1	2.69133E1	1.70028E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.53E-2
1.8E1	1.132E3	4.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80018E1	-5.00679E-4	-8.79999E1	9.53674E-5	5.17368E-3	9.30071E-2	2.73154E1	-3.27066E1	-3.26141E1	2.67547E1	1.70023E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.5227E-2
1.9E1	2.393E3	1.0E0	7.68E2	5.29E2	-7.201E-2	-8.80014E1	-4.29153E-4	-8.8E1	2.14577E-4	5.22137E-3	9.27925E-2	2.73159E1	-3.2668E1	-3.26661E1	2.68013E1	1.70122E-8	2.52345E-3	2.52345E-3	6.30255E-3	2.52216E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80015E1	-5.00679E-4	-8.8E1	9.53674E-5	4.93526E-3	9.31501E-2	2.72903E1	-3.26986E1	-3.26119E1	2.67974E1	1.69771E-8	2.51296E-3	2.51296E-3	6.33648E-3	2.51305E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80015E1	-6.67572E-4	-8.80002E1	2.38419E-5	4.93526E-3	9.28879E-2	2.72787E1	-3.2632E1	-3.26476E1	2.67619E1	1.69801E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.50523E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80015E1	-5.48363E-4	-8.8E1	9.53674E-5	5.03063E-3	9.29832E-2	2.72903E1	-3.26649E1	-3.25947E1	2.68296E1	1.70173E-8	2.52599E-3	2.52599E-3	6.32896E-3	2.51924E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80015E1	-4.52995E-4	-8.79998E1	-1.19209E-4	5.07832E-3	9.30309E-2	2.73147E1	-3.2635E1	-3.26056E1	2.67902E1	1.70246E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.52139E-2