[Scan]
initial_time=2016-02-15T17:51:45
final_time=2016-02-15T17:52:05
ip_count=19
run=1030
dataset=1
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.74664E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.9793E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=4.35376E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.88571E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.89981E-10
mult1=-9.61758E-9
mult2=-2.69582E-9
rf_tmon=-4.42689E-3
rf_agc=3.30967E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.35531E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.68195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20097E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=2.97549E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=2.48019E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01792E0
lens1_imon=1.54639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04159E1
cs_ea2_imon=1.54579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.98775E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.29296E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=2.86701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=1.89403E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=1.22747E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=3.05406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=8.06522E-10
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-1.04678E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26313E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.59193E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=4.53722E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.88682E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.20478E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.50522E-1
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.19939E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.27236E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7278E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.07156E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.8085E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.99323E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.3792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.41886E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.2869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33863E1
os_fil1_imon=4.71616E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.73438E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66466E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=9.98732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61681E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66795E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22422E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.51613E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71906E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.54E2	0.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80019E1	-1.90735E-4	-8.80001E1	1.90735E-4	5.67436E-3	9.29117E-2	2.73284E1	-3.2663E1	-3.26357E1	2.6811E1	1.70028E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.5128E-2
2.0E0	2.94E3	1.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80018E1	-9.53674E-5	-8.80001E1	2.38419E-5	5.48363E-3	9.30786E-2	2.73019E1	-3.26769E1	-3.26343E1	2.68037E1	1.70178E-8	2.51783E-3	2.51783E-3	6.3126E-3	2.51475E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80018E1	-1.19209E-4	-8.80001E1	-9.53674E-5	5.36442E-3	9.32455E-2	2.73116E1	-3.26667E1	-3.26054E1	2.68395E1	1.70083E-8	2.51758E-3	2.51758E-3	6.3074E-3	2.52464E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-3.57628E-4	-8.79998E1	1.19209E-4	5.65052E-3	9.32217E-2	2.72886E1	-3.26402E1	-3.26296E1	2.67535E1	1.69955E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.51494E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80017E1	-4.29153E-4	-8.8E1	2.86102E-4	5.53131E-3	9.30548E-2	2.73039E1	-3.26308E1	-3.26086E1	2.68725E1	1.69955E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.5128E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80015E1	-1.66893E-4	-8.80001E1	9.53674E-5	5.72205E-3	9.32217E-2	2.72986E1	-3.26626E1	-3.26284E1	2.67144E1	1.70244E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.51832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80018E1	-4.76837E-4	-8.80004E1	-2.38419E-5	5.67436E-3	9.29117E-2	2.72829E1	-3.26621E1	-3.26224E1	2.6828E1	1.7017E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.51613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80016E1	-4.05312E-4	-8.80003E1	7.15256E-5	5.57899E-3	9.30309E-2	2.72877E1	-3.26801E1	-3.26248E1	2.68406E1	1.70028E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.52785E-2
1.2E1	7.4E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80017E1	-2.86102E-4	-8.80001E1	2.38419E-5	5.55515E-3	9.33886E-2	2.72973E1	-3.26663E1	-3.26224E1	2.67818E1	1.70096E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.51613E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80017E1	-1.66893E-4	-8.80003E1	-9.53674E-5	5.48363E-3	9.36508E-2	2.73233E1	-3.26704E1	-3.26067E1	2.67717E1	1.70023E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.51395E-2
1.4E1	3.8E1	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80017E1	-3.09944E-4	-8.80004E1	-1.66893E-4	5.57899E-3	9.34839E-2	2.73045E1	-3.26559E1	-3.26298E1	2.67808E1	1.70108E-8	2.51783E-3	2.51783E-3	6.30221E-3	2.5272E-2
1.5E1	3.1E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80018E1	-3.57628E-4	-8.80003E1	1.43051E-4	5.62668E-3	9.35078E-2	2.73189E1	-3.26759E1	-3.26374E1	2.68106E1	1.70005E-8	2.5257E-3	2.5257E-3	6.32483E-3	2.51536E-2
1.6E1	2.44E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80017E1	-5.24521E-4	-8.79999E1	2.86102E-4	5.74589E-3	9.30786E-2	2.72931E1	-3.26458E1	-3.26543E1	2.67974E1	1.70023E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.52489E-2
1.7E1	2.55E2	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80021E1	2.38419E-5	-8.8E1	3.09944E-4	5.31673E-3	9.30786E-2	2.73015E1	-3.26789E1	-3.26585E1	2.68184E1	1.69875E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.5227E-2
1.8E1	1.128E3	1.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80021E1	-3.57628E-4	-8.79998E1	2.38419E-4	5.55515E-3	9.29594E-2	2.73228E1	-3.26408E1	-3.26054E1	2.68292E1	1.70096E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.52489E-2
1.9E1	2.318E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80021E1	-7.15256E-4	-8.80001E1	4.29153E-4	5.05447E-3	9.30548E-2	2.72871E1	-3.26561E1	-3.26549E1	2.67037E1	1.701E-8	2.52169E-3	2.52169E-3	6.29665E-3	2.51066E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80022E1	-4.05312E-4	-8.80002E1	-9.53674E-5	5.126E-3	9.27925E-2	2.73027E1	-3.26554E1	-3.26272E1	2.68274E1	1.70096E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.53148E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.8002E1	-4.76837E-4	-8.80005E1	7.15256E-5	5.45979E-3	9.29594E-2	2.73045E1	-3.26826E1	-3.26113E1	2.68024E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.52709E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8002E1	-6.4373E-4	-8.80005E1	-4.76837E-5	5.34058E-3	9.28879E-2	2.73009E1	-3.26512E1	-3.25924E1	2.67902E1	1.70173E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.52139E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80018E1	-4.52995E-4	-8.80005E1	1.90735E-4	5.53131E-3	9.2864E-2	2.7278E1	-3.26649E1	-3.26313E1	2.68292E1	1.70096E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.51613E-2