[Scan]
initial_time=2016-02-15T17:52:12
final_time=2016-02-15T17:52:31
ip_count=19
run=1030
dataset=1
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.74847E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.15513E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.13024E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.8813E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=8.43441E-10
mult1=-9.93304E-9
mult2=-2.80444E-9
rf_tmon=-4.57852E-3
rf_agc=3.36039E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.26948E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67594E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.99814E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.05117E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53614E1
cs_ef1b_imon=2.96826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02343E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0501E1
cs_ea1_imon=2.48548E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9918E0
lens1_imon=1.43091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.9743E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.55812E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=2.98906E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.52745E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11258E1
os_restr1_imon=2.86592E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14891E1
os_ea1_imon=1.87798E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63518E1
os_ef1bup_imon=3.09073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26105E0
cs_ionrep_imon=1.21275E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91843E2
cs_nozzle_imon=1.93433E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02028E1
cs_anode1_imon=3.04913E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=8.88383E-10
tplens_vset=1.4E-1
tplens_vmon=1.6336E0
tplens_imon=-2.77468E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.50979E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26326E1
iondef2_imon=1.58094E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98604E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=4.54915E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28958E0
ionrepsh_imon=1.88302E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.1975E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74462E1
cs_ef2b_imon=3.12093E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65335E-1
os_ea2_imon=-6.80228E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00593E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71118E1
cs_ef2a_imon=3.18066E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62554E0
os_ef2alow_imon=-2.56631E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37772E-1
os_ef2bup_imon=-5.19696E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10682E1
os_restr2_imon=2.86726E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30465E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01849E1
cs_anode2_imon=2.26564E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.09327E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67409E1
iondef4_imon=1.08352E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.04655E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.42393E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11672E0
cs_ionaccel_imon=-1.89187E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47256E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56176E1
einzel_imon=7.57376E-6
window_vset=0.0E0
window_vmon=1.82774E-1
window_imon=-1.03624E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.86204E1
mask2_imon=-7.00702E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.45553E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.69029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50083E3
multb_neg_imon=7.19709E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3187E0
defgridb_imon=6.21369E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3386E1
os_fil1_imon=4.77125E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.27E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66574E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30801E1
cs_fil1_imon=9.99082E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62333E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66947E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85223E-2
os_fil2_imon=-2.41493E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.34229E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33871E-1
cs_fil2_imon=-2.12413E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.73375E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22363E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.52709E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40082E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46367E-1
res40_imon=-2.60993E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=368
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.94E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80016E1	-1.00136E-3	-8.80005E1	2.38419E-4	5.67436E-3	9.33409E-2	2.73075E1	-3.2695E1	-3.2616E1	2.68659E1	1.70249E-8	2.5165E-3	2.5165E-3	6.31761E-3	2.52588E-2
2.0E0	2.917E3	4.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80015E1	-7.39098E-4	-8.80006E1	1.19209E-4	5.6982E-3	9.32217E-2	2.73403E1	-3.2673E1	-3.26419E1	2.67825E1	1.701E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.51924E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80016E1	-3.33786E-4	-8.80001E1	4.05312E-4	5.57899E-3	9.33409E-2	2.73075E1	-3.2638E1	-3.26386E1	2.67656E1	1.70058E-8	2.51434E-3	2.51434E-3	6.31384E-3	2.50192E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80016E1	-2.6226E-4	-8.80001E1	0.0E0	5.76973E-3	9.32932E-2	2.73285E1	-3.26657E1	-3.2626E1	2.68845E1	1.70173E-8	2.51954E-3	2.51954E-3	6.33436E-3	2.52785E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80017E1	-3.09944E-4	-8.80002E1	-4.76837E-5	5.8651E-3	9.31025E-2	2.73057E1	-3.2644E1	-3.2608E1	2.67319E1	1.70017E-8	2.51804E-3	2.51804E-3	6.27954E-3	2.52183E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80016E1	-3.8147E-4	-8.80005E1	7.15256E-5	5.45979E-3	9.33409E-2	2.72833E1	-3.26561E1	-3.25788E1	2.67674E1	1.69955E-8	2.52384E-3	2.52384E-3	6.3074E-3	2.52785E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80018E1	0.0E0	-8.80006E1	1.90735E-4	5.126E-3	9.32455E-2	2.72576E1	-3.26272E1	-3.26609E1	2.68875E1	1.69949E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.52489E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.8002E1	-1.90735E-4	-8.80004E1	-1.90735E-4	5.43594E-3	9.30071E-2	2.73105E1	-3.26939E1	-3.26134E1	2.67133E1	1.70173E-8	2.52276E-3	2.52276E-3	6.32896E-3	2.51494E-2
1.2E1	6.3E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80019E1	-3.09944E-4	-8.80001E1	4.76837E-5	5.57899E-3	9.31263E-2	2.72895E1	-3.26669E1	-3.2584E1	2.68929E1	1.70096E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51613E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80018E1	-5.00679E-4	-8.80003E1	1.19209E-4	5.126E-3	9.31263E-2	2.73484E1	-3.26591E1	-3.26386E1	2.67601E1	1.70023E-8	2.52318E-3	2.52318E-3	6.34037E-3	2.50523E-2
1.4E1	5.6E1	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80021E1	-4.05312E-4	-8.80005E1	-1.19209E-4	5.19753E-3	9.32455E-2	2.73086E1	-3.26944E1	-3.26726E1	2.68094E1	1.70023E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.5227E-2
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80021E1	-6.19888E-4	-8.80003E1	1.19209E-4	5.19753E-3	9.28402E-2	2.73369E1	-3.26741E1	-3.26356E1	2.66851E1	1.701E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.52139E-2
1.6E1	2.13E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80019E1	-9.53674E-4	-8.80005E1	9.53674E-5	5.24521E-3	9.3174E-2	2.73411E1	-3.26567E1	-3.26374E1	2.68863E1	1.69654E-8	2.5188E-3	2.5188E-3	6.34037E-3	2.50305E-2
1.7E1	2.66E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.8002E1	-9.05991E-4	-8.80001E1	2.38419E-5	4.98295E-3	9.29356E-2	2.72997E1	-3.26356E1	-3.26092E1	2.66881E1	1.70023E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.50959E-2
1.8E1	1.156E3	2.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80022E1	-8.34465E-4	-8.80005E1	1.66893E-4	5.126E-3	9.30071E-2	2.72931E1	-3.26609E1	-3.2626E1	2.68725E1	1.7017E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.51395E-2
1.9E1	2.181E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80022E1	-2.14577E-4	-8.80002E1	-1.90735E-4	4.95911E-3	9.26018E-2	2.72823E1	-3.26591E1	-3.26332E1	2.67097E1					
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-7.15461E-2	-8.80023E1	-5.24521E-4	-8.80002E1	-4.76837E-5	5.00679E-3	9.27448E-2	2.73171E1	-3.26452E1	-3.26651E1	2.68971E1	1.70023E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.51832E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80021E1	-4.76837E-4	-8.80003E1	7.15256E-5	5.19753E-3	9.29117E-2	2.7308E1	-3.26791E1	-3.25676E1	2.6673E1	1.7017E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.51613E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.8002E1	-6.91414E-4	-8.80003E1	2.38419E-5	5.24521E-3	9.31025E-2	2.73261E1	-3.27023E1	-3.26158E1	2.68955E1	1.70246E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.52785E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.8002E1	-5.72205E-4	-8.80002E1	4.29153E-4	5.8651E-3	9.27925E-2	2.73249E1	-3.26326E1	-3.26356E1	2.67409E1	1.70096E-8	2.5199E-3	2.5199E-3	6.34037E-3	2.52709E-2