[Scan]
initial_time=2016-02-15T17:52:39
final_time=2016-02-15T17:52:58
ip_count=19
run=1030
dataset=1
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.75836E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.70934E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=4.03512E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.92883E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=8.27098E-10
mult1=-9.51162E-9
mult2=-2.65274E-9
rf_tmon=-4.91498E-3
rf_agc=3.30031E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.11856E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=2.97982E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.48061E-5
lens1_vset=-2.7E0
lens1_vmon=-2.987E0
lens1_imon=1.53453E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.99676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.55612E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85079E1
cs_ef1a_imon=2.98054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=4.34697E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=2.86918E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15347E1
os_ea1_imon=1.88316E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.2128E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.0573E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20606E0
olens4_imon=8.23474E-10
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-3.30742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27071E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.62687E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.87325E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.19534E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29799E-1
os_ea2_imon=-4.47542E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61978E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34955E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=2.86089E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.26299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72745E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.07434E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.14641E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.9816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.33208E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33854E1
os_fil1_imon=4.87833E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.78243E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00008E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61237E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66797E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96467E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.69813E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68378E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22408E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.52354E-2
chamber_ion_pmon=1.70246E-8
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90837E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.98E2	1.0E0	1.47E2	4.1E1	-7.07733E-2	-8.80016E1	-3.09944E-4	-8.80002E1	-4.76837E-5	5.26905E-3	9.25541E-2	2.73198E1	-3.26897E1	-3.26207E1	2.68812E1	1.69666E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.51924E-2
2.0E0	2.831E3	1.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80017E1	-7.15256E-4	-8.80003E1	1.19209E-4	5.45979E-3	9.30071E-2	2.72953E1	-3.26719E1	-3.26064E1	2.67284E1	1.701E-8	2.5131E-3	2.5131E-3	6.29128E-3	2.51924E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80017E1	-1.43051E-4	-8.8E1	2.38419E-4	5.96046E-3	9.29117E-2	2.72987E1	-3.2655E1	-3.26185E1	2.67624E1	1.70092E-8	2.52473E-3	2.52473E-3	6.31858E-3	2.5107E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.08504E-2	-8.80018E1	9.53674E-5	-8.8E1	2.14577E-4	5.34058E-3	9.32455E-2	2.72817E1	-3.265E1	-3.26098E1	2.68929E1	1.69749E-8	2.52342E-3	2.52342E-3	6.3074E-3	2.50959E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80016E1	-4.29153E-4	-8.80002E1	3.8147E-4	5.17368E-3	9.31978E-2	2.73195E1	-3.26981E1	-3.26296E1	2.66706E1	1.70023E-8	2.5188E-3	2.5188E-3	6.29098E-3	2.50741E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80015E1	-7.15256E-4	-8.8E1	2.38419E-5	5.36442E-3	9.30786E-2	2.72883E1	-3.26645E1	-3.2647E1	2.67499E1	1.70023E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.52928E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80018E1	-5.96046E-4	-8.80001E1	1.43051E-4	5.36442E-3	9.33409E-2	2.72901E1	-3.26771E1	-3.26122E1	2.68346E1	1.70244E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.52489E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80019E1	-1.66893E-4	-8.8E1	-7.15256E-5	5.34058E-3	9.30309E-2	2.73069E1	-3.26657E1	-3.26206E1	2.70202E1	1.7017E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.52709E-2
1.2E1	6.5E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80017E1	-3.09944E-4	-8.80003E1	7.15256E-5	5.57899E-3	9.31263E-2	2.72904E1	-3.2664E1	-3.26205E1	2.70599E1	1.69801E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.51613E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80018E1	-2.14577E-4	-8.80002E1	7.15256E-5	5.53131E-3	9.29356E-2	2.72991E1	-3.26326E1	-3.26482E1	2.6953E1	1.70092E-8	2.5147E-3	2.5147E-3	6.31299E-3	2.51292E-2
1.4E1	3.8E1	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80021E1	-3.57628E-4	-8.80003E1	1.90735E-4	5.45979E-3	9.29594E-2	2.73207E1	-3.26338E1	-3.26134E1	2.67001E1	1.70096E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.51613E-2
1.5E1	3.0E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80018E1	-6.19888E-4	-8.8E1	-2.38419E-4	5.79357E-3	9.31025E-2	2.73057E1	-3.26836E1	-3.2596E1	2.68881E1	1.69875E-8	2.51225E-3	2.51225E-3	6.33486E-3	2.5227E-2
1.6E1	2.51E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80021E1	-7.62939E-4	-8.80001E1	-2.14577E-4	5.57899E-3	9.2864E-2	2.7321E1	-3.26585E1	-3.26484E1	2.6855E1	1.70244E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.5227E-2
1.7E1	2.65E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.8002E1	-5.00679E-4	-8.80001E1	-1.19209E-4	5.38826E-3	9.28879E-2	2.73204E1	-3.26531E1	-3.26402E1	2.68292E1	1.70096E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.52709E-2
1.8E1	1.109E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80021E1	-7.86781E-4	-8.80003E1	2.6226E-4	5.38826E-3	9.29356E-2	2.73015E1	-3.27047E1	-3.26579E1	2.6795E1	1.70028E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.52354E-2
1.9E1	2.337E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-3.57628E-4	-8.80002E1	7.15256E-5	5.67436E-3	9.29594E-2	2.73189E1	-3.26777E1	-3.2611E1	2.66971E1	1.7017E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51395E-2
2.0E1	2.4E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-8.10623E-4	-8.79999E1	-1.43051E-4	5.48363E-3	9.28879E-2	2.73004E1	-3.26413E1	-3.26113E1	2.68065E1	1.70318E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51395E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.8002E1	-5.72205E-4	-8.80002E1	-4.76837E-5	5.14984E-3	9.27687E-2	2.73183E1	-3.26867E1	-3.26116E1	2.67595E1	1.70173E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.52354E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80019E1	-7.62939E-4	-8.80001E1	-9.53674E-5	5.43594E-3	9.29594E-2	2.73128E1	-3.26809E1	-3.26054E1	2.67469E1	1.70023E-8	2.5188E-3	2.5188E-3	6.34588E-3	2.52928E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80022E1	-4.76837E-4	-8.79997E1	2.38419E-5	5.22137E-3	9.29117E-2	2.72745E1	-3.27071E1	-3.26092E1	2.68556E1	1.70246E-8	2.51203E-3	2.51203E-3	6.33977E-3	2.52354E-2