[Scan]
initial_time=2016-02-15T17:53:05
final_time=2016-02-15T17:53:25
ip_count=19
run=1030
dataset=1
scan=83
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.81492E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.84459E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=4.54509E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.79518E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.71623E-10
mult1=-9.56403E-9
mult2=-2.74797E-9
rf_tmon=-4.16571E-3
rf_agc=3.34318E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=4.23002E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=2.96144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02009E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.48488E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01132E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.56382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=2.98703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.05657E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=2.86809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=1.89583E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.24442E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.05766E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.972E-10
tplens_vset=1.4E-1
tplens_vmon=1.61139E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26286E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.52662E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23708E0
ionrepsh_imon=1.88754E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74411E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54728E-1
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60657E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4877E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.86449E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72994E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66441E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.04065E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=3.71897E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.63516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.35397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33881E1
os_fil1_imon=4.46988E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.74639E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6644E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3078E1
cs_fil1_imon=9.99723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61903E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67008E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00922E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.97734E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52388E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2235E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29703E-3
inlet_lpb_pmon=2.51682E-2
chamber_ion_pmon=1.70108E-8
chamber_cvt_pmon=2.52405E-3
foreline_cvt_pmon=2.52405E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07946E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.022E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80014E1	-4.76837E-5	-8.80003E1	7.15256E-5	5.4121E-3	9.2864E-2	2.73086E1	-3.26738E1	-3.26484E1	2.69223E1	1.70246E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.50638E-2
2.0E0	2.907E3	1.0E0	3.16E2	1.6E2	-7.201E-2	-8.80018E1	0.0E0	-8.80004E1	9.53674E-5	5.19753E-3	9.29594E-2	2.73039E1	-3.26849E1	-3.26056E1	2.66549E1	1.70244E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.52709E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80018E1	-4.05312E-4	-8.80002E1	7.15256E-5	5.36442E-3	9.30548E-2	2.73369E1	-3.26591E1	-3.26482E1	2.68959E1	1.69875E-8	2.52647E-3	2.52647E-3	6.31837E-3	2.52051E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80017E1	-3.09944E-4	-8.80001E1	7.15256E-5	5.29289E-3	9.32217E-2	2.72949E1	-3.26813E1	-3.26278E1	2.6676E1	1.69955E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.51924E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80018E1	-4.52995E-4	-8.8E1	-2.14577E-4	5.29289E-3	9.31025E-2	2.73139E1	-3.26402E1	-3.26455E1	2.68586E1	1.70023E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.52489E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80019E1	-4.29153E-4	-8.80001E1	-1.66893E-4	5.29289E-3	9.3174E-2	2.73092E1	-3.26455E1	-3.26183E1	2.67674E1	1.7017E-8	2.51443E-3	2.51443E-3	6.30192E-3	2.52489E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80018E1	-7.39098E-4	-8.80001E1	2.14577E-4	5.4121E-3	9.29117E-2	2.72847E1	-3.26633E1	-3.26122E1	2.67902E1	1.701E-8	2.51203E-3	2.51203E-3	6.31278E-3	2.51709E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80017E1	-1.90735E-4	-8.8E1	2.14577E-4	5.29289E-3	9.30071E-2	2.72943E1	-3.26404E1	-3.2611E1	2.67818E1	1.70023E-8	2.52209E-3	2.52209E-3	6.34588E-3	2.52489E-2
1.2E1	6.9E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80017E1	-6.91414E-4	-8.79999E1	7.15256E-5	5.55515E-3	9.28879E-2	2.72862E1	-3.26526E1	-3.26307E1	2.68314E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52051E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80017E1	-3.8147E-4	-8.79999E1	1.90735E-4	5.79357E-3	9.34839E-2	2.73249E1	-3.26645E1	-3.26326E1	2.6816E1	1.70025E-8	2.51755E-3	2.51755E-3	6.31827E-3	2.51987E-2
1.4E1	4.3E1	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80017E1	-2.14577E-4	-8.80004E1	1.90735E-4	5.53131E-3	9.30071E-2	2.72913E1	-3.26789E1	-3.26753E1	2.68484E1					
1.5E1	4.2E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80018E1	-4.52995E-4	-8.80004E1	4.05312E-4	5.84126E-3	9.31025E-2	2.73357E1	-3.26687E1	-3.26218E1	2.68052E1	1.70023E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.51832E-2
1.6E1	2.08E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.8002E1	-5.00679E-4	-8.80003E1	1.90735E-4	5.67436E-3	9.30309E-2	2.72945E1	-3.26502E1	-3.26331E1	2.678E1	1.7017E-8	2.52538E-3	2.52538E-3	6.32936E-3	2.51177E-2
1.7E1	2.49E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.8002E1	-2.86102E-4	-8.80006E1	2.14577E-4	5.65052E-3	9.2864E-2	2.72943E1	-3.27029E1	-3.26188E1	2.69179E1	1.70028E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.52354E-2
1.8E1	1.066E3	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80019E1	-7.15256E-5	-8.80001E1	4.76837E-5	5.65052E-3	9.26971E-2	2.73027E1	-3.26225E1	-3.26248E1	2.66796E1	1.70173E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.51924E-2
1.9E1	2.279E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.8002E1	-3.8147E-4	-8.80004E1	2.38419E-5	5.65052E-3	9.31263E-2	2.72937E1	-3.26651E1	-3.26236E1	2.67163E1	1.70096E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.51613E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80016E1	-5.00679E-4	-8.80004E1	-4.76837E-5	5.60284E-3	9.29832E-2	2.73141E1	-3.26314E1	-3.26176E1	2.68581E1	1.70318E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.51177E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80017E1	-4.05312E-4	-8.80002E1	2.6226E-4	5.31673E-3	9.30071E-2	2.7288E1	-3.26673E1	-3.26296E1	2.68536E1	1.70096E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.51395E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80016E1	-4.29153E-4	-8.80005E1	3.09944E-4	5.67436E-3	9.29832E-2	2.729E1	-3.26674E1	-3.26316E1	2.68014E1	1.70104E-8	2.51182E-3	2.51182E-3	6.29157E-3	2.50959E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80015E1	-2.86102E-4	-8.80001E1	1.90735E-4	5.74589E-3	9.31978E-2	2.72994E1	-3.26693E1	-3.26286E1	2.66441E1	1.70108E-8	2.52405E-3	2.52405E-3	6.29703E-3	2.51682E-2