[Scan]
initial_time=2016-02-15T17:53:32
final_time=2016-02-15T17:53:51
ip_count=19
run=1030
dataset=1
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.80072E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.33705E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=4.54938E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.84495E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=8.93903E-10
mult1=-1.00195E-8
mult2=-2.85848E-9
rf_tmon=-5.29994E-3
rf_agc=3.18344E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.43316E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.67835E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=2.97838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=2.49173E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0029E0
lens1_imon=1.58604E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.55264E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84112E1
cs_ef1a_imon=2.99423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.34935E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=1.89367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=1.22711E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.0573E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.89893E-10
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-8.30488E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2649E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26708E1
iondef2_imon=1.58617E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.51648E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.88826E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55328E-1
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62819E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.26912E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68922E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.0721E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.6664E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.61713E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.40444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52788E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33858E1
os_fil1_imon=4.54196E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.12481E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66597E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=1.00002E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6242E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66958E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53934E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.52569E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3017E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.008E3	0.0E0	1.47E2	4.1E1	-7.44059E-2	-8.80016E1	-5.00679E-4	-8.80002E1	-2.14577E-4	5.4121E-3	9.33886E-2	2.73117E1	-3.26669E1	-3.26242E1	2.6846E1	1.70096E-8	2.52099E-3	2.52099E-3	6.28006E-3	2.53589E-2
2.0E0	2.865E3	7.0E0	3.16E2	1.6E2	-7.44059E-2	-8.80017E1	-1.66893E-4	-8.80003E1	3.57628E-4	5.43594E-3	9.31978E-2	2.73081E1	-3.26711E1	-3.26188E1	2.68815E1	1.70246E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.51494E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80018E1	-4.29153E-4	-8.80002E1	7.15256E-5	5.74589E-3	9.33886E-2	2.73075E1	-3.2649E1	-3.26201E1	2.67277E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52928E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80016E1	-5.00679E-4	-8.80001E1	7.15256E-5	5.14984E-3	9.30548E-2	2.72871E1	-3.26765E1	-3.26248E1	2.67944E1	1.70023E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.52928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80015E1	-3.09944E-4	-8.80003E1	0.0E0	5.24521E-3	9.32932E-2	2.72959E1	-3.26621E1	-3.26529E1	2.68082E1	1.70023E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.52709E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80017E1	-4.76837E-4	-8.8E1	-9.53674E-5	5.31673E-3	9.32455E-2	2.72839E1	-3.26744E1	-3.26148E1	2.69085E1	1.70096E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.5227E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80017E1	-7.86781E-4	-8.80001E1	9.53674E-5	5.62668E-3	9.30548E-2	2.72915E1	-3.26649E1	-3.25906E1	2.69084E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.52489E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80019E1	-7.39098E-4	-8.80001E1	1.43051E-4	5.36442E-3	9.30071E-2	2.72961E1	-3.26747E1	-3.26296E1	2.69433E1	1.70318E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.51709E-2
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80018E1	-3.8147E-4	-8.80005E1	4.76837E-5	5.8651E-3	9.31263E-2	2.72892E1	-3.26478E1	-3.26213E1	2.68737E1	1.70135E-8	2.51972E-3	2.51972E-3	6.32099E-3	2.51445E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80017E1	-5.00679E-4	-8.80002E1	-3.57628E-4	5.74589E-3	9.32932E-2	2.73225E1	-3.26579E1	-3.26212E1	2.69301E1					
1.4E1	5.5E1	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80019E1	-2.6226E-4	-8.80003E1	-3.09944E-4	5.88894E-3	9.33647E-2	2.73429E1	-3.26795E1	-3.25551E1	2.70154E1	1.70096E-8	2.52977E-3	2.52977E-3	6.32936E-3	2.52051E-2
1.5E1	2.8E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80022E1	-6.91414E-4	-8.80003E1	1.43051E-4	5.45979E-3	9.31978E-2	2.72955E1	-3.26621E1	-3.26446E1	2.67764E1	1.70023E-8	2.52757E-3	2.52757E-3	6.32386E-3	2.52709E-2
1.6E1	2.1E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80019E1	-6.67572E-4	-8.80001E1	1.90735E-4	5.48363E-3	9.31263E-2	2.72638E1	-3.27009E1	-3.26142E1	2.66142E1	1.70244E-8	2.51552E-3	2.51552E-3	6.28006E-3	2.53589E-2
1.7E1	2.76E2	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80017E1	-5.24521E-4	-8.80002E1	3.09944E-4	5.22137E-3	9.33409E-2	2.73177E1	-3.26723E1	-3.26194E1	2.68178E1	1.701E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.52785E-2
1.8E1	1.097E3	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80016E1	-3.09944E-4	-8.80001E1	2.86102E-4	5.45979E-3	9.30786E-2	2.72985E1	-3.26711E1	-3.2623E1	2.69373E1	1.70096E-8	2.52647E-3	2.52647E-3	6.3074E-3	2.51832E-2
1.9E1	2.336E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80018E1	0.0E0	-8.80003E1	2.86102E-4	5.34058E-3	9.31025E-2	2.72895E1	-3.26627E1	-3.26392E1	2.67133E1	1.70244E-8	2.52538E-3	2.52538E-3	6.29098E-3	2.53368E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80017E1	-3.8147E-4	-8.80002E1	4.29153E-4	5.45979E-3	9.30071E-2	2.72925E1	-3.26669E1	-3.26062E1	2.6807E1	1.70392E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.52928E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80021E1	-3.33786E-4	-8.80004E1	-9.53674E-5	5.38826E-3	9.3174E-2	2.73375E1	-3.26419E1	-3.26201E1	2.67896E1	1.701E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.52785E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80017E1	-5.48363E-4	-8.80002E1	1.43051E-4	5.50747E-3	9.30071E-2	2.72666E1	-3.26771E1	-3.26699E1	2.68016E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.53368E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80016E1	-6.19888E-4	-8.8E1	-4.76837E-5	5.45979E-3	9.31025E-2	2.73187E1	-3.26708E1	-3.2649E1	2.68922E1	1.70028E-8	2.52276E-3	2.52276E-3	6.29665E-3	2.52569E-2