[Scan]
initial_time=2016-02-15T17:54:25
final_time=2016-02-15T17:54:45
ip_count=19
run=1030
dataset=1
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.82116E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.33395E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=4.21357E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.8582E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=8.7018E-10
mult1=-9.5959E-9
mult2=-2.73059E-9
rf_tmon=-4.97506E-3
rf_agc=3.31293E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.38607E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=1.99996E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.97765E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=2.51849E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02239E0
lens1_imon=1.59116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=3.00024E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.54869E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84551E1
cs_ef1a_imon=2.97209E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=4.33874E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=2.8946E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15364E1
os_ea1_imon=1.8998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63908E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=1.23899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=3.05376E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=7.78401E-10
tplens_vset=1.4E-1
tplens_vmon=1.61489E0
tplens_imon=-1.46693E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.51613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.88877E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=1.87821E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.11666E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52805E-1
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70933E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64303E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42785E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10585E1
os_restr2_imon=2.86054E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01543E1
cs_anode2_imon=2.25862E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72799E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67511E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.07868E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=3.73304E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56052E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=1.93938E-1
window_imon=-1.08717E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.8639E1
mask2_imon=-9.30788E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.7745E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.39767E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.38871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53548E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33887E1
os_fil1_imon=5.21964E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.77771E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66593E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=9.99675E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62412E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66725E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91401E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.90225E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6977E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32024E-1
cs_fil2_imon=-2.69235E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30419E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22423E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.53148E-2
chamber_ion_pmon=1.7017E-8
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.56513E-1
res40_imon=-2.71707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.76E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80018E1	-4.05312E-4	-8.80002E1	2.38419E-5	5.67436E-3	9.30309E-2	2.73195E1	-3.26524E1	-3.26362E1	2.69055E1	1.69883E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.52569E-2
2.0E0	2.805E3	1.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80018E1	-1.90735E-4	-8.80003E1	1.43051E-4	5.10216E-3	9.31978E-2	2.73273E1	-3.26597E1	-3.2632E1	2.66556E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.50741E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80019E1	-1.90735E-4	-8.8E1	1.90735E-4	5.53131E-3	9.28402E-2	2.72824E1	-3.2664E1	-3.26089E1	2.66286E1	1.70023E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.50959E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80018E1	-3.09944E-4	-8.79998E1	-4.76837E-5	5.17368E-3	9.28402E-2	2.72974E1	-3.26478E1	-3.26142E1	2.67144E1	1.70096E-8	2.52428E-3	2.52428E-3	6.33486E-3	2.51613E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.8002E1	-4.52995E-4	-8.79999E1	1.19209E-4	5.14984E-3	9.30786E-2	2.73004E1	-3.26744E1	-3.26136E1	2.68887E1	1.70244E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.51395E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80017E1	-5.72205E-4	-8.79997E1	7.15256E-5	5.45979E-3	9.29832E-2	2.72811E1	-3.26398E1	-3.26314E1	2.67631E1	1.70246E-8	2.51096E-3	2.51096E-3	6.32896E-3	2.51924E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.8002E1	-6.19888E-4	-8.79999E1	2.86102E-4	5.43594E-3	9.31978E-2	2.72745E1	-3.26717E1	-3.26278E1	2.67175E1	1.69875E-8	2.51334E-3	2.51334E-3	6.29645E-3	2.51832E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80019E1	-5.72205E-4	-8.8E1	-9.53674E-5	5.24521E-3	9.28879E-2	2.73039E1	-3.26326E1	-3.26488E1	2.69043E1	1.70096E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.51613E-2
1.2E1	6.9E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80018E1	-4.52995E-4	-8.79999E1	2.86102E-4	4.95911E-3	9.28164E-2	2.73045E1	-3.2632E1	-3.26188E1	2.67199E1	1.701E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.51924E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80018E1	-4.76837E-5	-8.80001E1	-1.19209E-4	5.17368E-3	9.29832E-2	2.73045E1	-3.26741E1	-3.26146E1	2.67776E1	1.7017E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.51613E-2
1.4E1	3.9E1	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80017E1	-2.6226E-4	-8.79997E1	-9.53674E-5	5.05447E-3	9.29356E-2	2.7298E1	-3.27151E1	-3.26756E1	2.67688E1	1.70244E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.52489E-2
1.5E1	3.1E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80015E1	-3.09944E-4	-8.80001E1	-7.15256E-5	5.38826E-3	9.31025E-2	2.73213E1	-3.26434E1	-3.26398E1	2.67746E1	1.70023E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.51613E-2
1.6E1	2.21E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80016E1	-2.6226E-4	-8.80001E1	-4.76837E-5	5.43594E-3	9.27925E-2	2.73316E1	-3.2652E1	-3.25989E1	2.67704E1	1.69949E-8	2.51443E-3	2.51443E-3	6.33486E-3	2.5227E-2
1.7E1	2.68E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80017E1	-4.76837E-5	-8.80002E1	-2.6226E-4	5.36442E-3	9.27687E-2	2.72812E1	-3.26793E1	-3.26187E1	2.68196E1	1.7017E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.52928E-2
1.8E1	1.095E3	1.0E0	7.27E2	5.0E2	-7.201E-2	-8.80019E1	2.38419E-5	-8.80001E1	0.0E0	5.62668E-3	9.26971E-2	2.73345E1	-3.26524E1	-3.26356E1	2.67463E1	1.70244E-8	2.52428E-3	2.52428E-3	6.29645E-3	2.51395E-2
1.9E1	2.311E3	3.0E0	7.68E2	5.29E2	-7.25507E-2	-8.8002E1	4.52995E-4	-8.80002E1	-9.53674E-5	5.26905E-3	9.27687E-2	2.73198E1	-3.26785E1	-3.26431E1	2.69145E1	1.7017E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.51832E-2
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.8002E1	3.09944E-4	-8.79999E1	-1.66893E-4	5.31673E-3	9.26495E-2	2.73069E1	-3.26759E1	-3.26368E1	2.67151E1	1.70391E-8	2.52707E-3	2.52707E-3	6.31278E-3	2.51924E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.8002E1	-2.14577E-4	-8.8E1	-2.6226E-4	5.26905E-3	9.27687E-2	2.73123E1	-3.26446E1	-3.26404E1	2.68209E1	1.70096E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.51177E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80018E1	-3.33786E-4	-8.80001E1	-3.8147E-4	5.36442E-3	9.30309E-2	2.73393E1	-3.26608E1	-3.26254E1	2.68442E1	1.701E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.52569E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80017E1	-1.43051E-4	-8.80004E1	-2.38419E-5	5.17368E-3	9.32217E-2	2.72799E1	-3.26561E1	-3.26116E1	2.67511E1	1.7017E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.53148E-2