[Scan]
initial_time=2016-02-15T17:55:18
final_time=2016-02-15T17:55:38
ip_count=19
run=1030
dataset=1
scan=88
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.83194E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.90861E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=4.49181E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.81698E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.94618E-10
mult1=-9.3575E-9
mult2=-2.6919E-9
rf_tmon=-4.01396E-3
rf_agc=3.38695E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=4.44853E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62315E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=2.98391E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=2.49442E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02652E0
lens1_imon=1.50621E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.54621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84707E1
cs_ef1a_imon=2.98252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.43482E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.88174E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15506E1
os_ea1_imon=1.88458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6389E1
os_ef1bup_imon=3.09338E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25446E0
cs_ionrep_imon=1.21881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.05133E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=8.19314E-10
tplens_vset=1.4E-1
tplens_vmon=1.59306E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.59222E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98466E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.40276E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=1.89449E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39237E-1
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00708E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61349E0
os_ef2alow_imon=-2.64061E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36993E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10984E1
os_restr2_imon=2.85811E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01966E1
cs_anode2_imon=2.26002E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67184E1
iondef4_imon=1.0819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.06392E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=4.1579E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-2.01159E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.79557E-6
window_vset=0.0E0
window_vmon=1.87567E-1
window_imon=-1.01072E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39049E-4
mask2_vset=0.0E0
mask2_vmon=-1.86193E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9258E3
multa_neg_imon=8.88588E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.91797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.22236E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33877E1
os_fil1_imon=4.08439E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.95727E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66427E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=1.00086E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6243E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67071E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.61126E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.71315E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64455E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.4375E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29236E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.52354E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.53038E-1
res40_imon=-2.72054E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.059E3	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80018E1	-4.05312E-4	-8.80004E1	-1.43051E-4	4.93526E-3	9.34124E-2	2.73231E1	-3.26765E1	-3.2638E1	2.66292E1	1.70246E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.51494E-2
2.0E0	2.851E3	2.0E0	3.16E2	1.6E2	-7.18554E-2	-8.8002E1	-3.57628E-4	-8.80003E1	-4.76837E-5	5.36442E-3	9.33886E-2	2.72979E1	-3.26639E1	-3.26524E1	2.66436E1	1.701E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.52139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80019E1	-4.76837E-5	-8.8E1	5.00679E-4	5.36442E-3	9.35078E-2	2.73057E1	-3.26561E1	-3.26404E1	2.67451E1	1.70017E-8	2.51804E-3	2.51804E-3	6.29624E-3	2.51514E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80017E1	-2.38419E-4	-8.80002E1	5.96046E-4	5.34058E-3	9.31263E-2	2.73027E1	-3.26062E1	-3.26128E1	2.69632E1	1.70318E-8	2.51632E-3	2.51632E-3	6.35059E-3	2.53216E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80017E1	-2.86102E-4	-8.80007E1	3.33786E-4	5.6982E-3	9.31978E-2	2.72998E1	-3.26461E1	-3.26354E1	2.69752E1	1.7017E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80019E1	-5.24521E-4	-8.80004E1	4.05312E-4	5.72205E-3	9.3317E-2	2.73213E1	-3.26446E1	-3.26164E1	2.68623E1	1.70096E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.52489E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80017E1	-2.86102E-4	-8.80006E1	-2.38419E-5	5.67436E-3	9.33886E-2	2.73009E1	-3.26735E1	-3.26086E1	2.68082E1	1.701E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.5128E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.50241E-2	-8.80021E1	-1.43051E-4	-8.80005E1	5.48363E-4	5.45979E-3	9.32217E-2	2.72678E1	-3.26524E1	-3.26182E1	2.68471E1	1.70017E-8	2.52585E-3	2.52585E-3	6.32418E-3	2.5107E-2
1.2E1	6.9E1	0.0E0	4.85E2	3.23E2	-7.47923E-2	-8.80018E1	-3.8147E-4	-8.80005E1	4.29153E-4	5.67436E-3	9.34362E-2	2.72986E1	-3.26691E1	-3.25947E1	2.68577E1	1.70246E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.52354E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.45602E-2	-8.80021E1	-2.38419E-4	-8.80005E1	2.38419E-4	5.76973E-3	9.32932E-2	2.72997E1	-3.26494E1	-3.26164E1	2.67139E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51177E-2
1.4E1	4.0E1	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.8002E1	0.0E0	-8.80003E1	2.38419E-4	5.24521E-3	9.33886E-2	2.72901E1	-3.262E1	-3.26326E1	2.68875E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.50959E-2
1.5E1	2.6E1	2.0E0	6.06E2	4.11E2	-7.45602E-2	-8.80019E1	-3.09944E-4	-8.80004E1	2.6226E-4	5.24521E-3	9.30786E-2	2.73237E1	-3.26693E1	-3.26326E1	2.68803E1	1.69955E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.53E-2
1.6E1	2.09E2	0.0E0	6.47E2	4.41E2	-7.47149E-2	-8.80017E1	2.38419E-5	-8.80004E1	3.8147E-4	5.34058E-3	9.31978E-2	2.72853E1	-3.26458E1	-3.26326E1	2.67938E1	1.70243E-8	2.51359E-3	2.51359E-3	6.31299E-3	2.52183E-2
1.7E1	2.59E2	1.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80018E1	1.19209E-4	-8.80005E1	1.90735E-4	5.19753E-3	9.34362E-2	2.73027E1	-3.26708E1	-3.2629E1	2.67992E1	1.70028E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.52785E-2
1.8E1	1.129E3	0.0E0	7.27E2	5.0E2	-7.45602E-2	-8.80017E1	-9.53674E-5	-8.80006E1	7.15256E-5	5.22137E-3	9.34839E-2	2.73315E1	-3.26687E1	-3.26314E1	2.68004E1	1.70096E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.51395E-2
1.9E1	2.246E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80018E1	-1.66893E-4	-8.80005E1	1.43051E-4	5.34058E-3	9.33647E-2	2.73327E1	-3.26657E1	-3.26152E1	2.68094E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52709E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80015E1	-2.86102E-4	-8.80003E1	1.66893E-4	5.43594E-3	9.3317E-2	2.73163E1	-3.26608E1	-3.26349E1	2.68829E1	1.70173E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.52139E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80016E1	-1.90735E-4	-8.80005E1	2.6226E-4	5.91278E-3	9.30309E-2	2.73285E1	-3.26705E1	-3.26296E1	2.66977E1	1.70244E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.52489E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80017E1	-3.33786E-4	-8.80004E1	2.38419E-5	5.6982E-3	9.32217E-2	2.73788E1	-3.27458E1	-3.25841E1	2.66028E1	1.69883E-8	2.52384E-3	2.52384E-3	6.29128E-3	2.51924E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80018E1	1.19209E-4	-8.80006E1	1.19209E-4	5.55515E-3	9.33409E-2	2.73057E1	-3.26726E1	-3.26136E1	2.67184E1	1.701E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.52354E-2