[Scan]
initial_time=2016-02-15T17:55:45
final_time=2016-02-15T17:56:04
ip_count=19
run=1030
dataset=1
scan=89
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.83058E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.21724E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=4.11725E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.82529E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.77798E-10
mult1=-9.86079E-9
mult2=-2.78648E-9
rf_tmon=-3.9116E-3
rf_agc=3.361E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=4.11439E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19765E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=2.9672E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=2.48097E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01944E0
lens1_imon=1.54868E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.55754E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=2.98018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.95525E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.88107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=1.88882E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=1.20678E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93562E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.05586E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.74634E-10
tplens_vset=1.4E-1
tplens_vmon=1.58598E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.48002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.59718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.54402E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=1.89166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61653E-1
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59876E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.8908E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.09281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66842E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.04011E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=3.39901E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56621E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.3437E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39434E-4
mask2_vset=0.0E0
mask2_vmon=-1.86885E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.09494E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.81178E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33891E1
os_fil1_imon=5.72527E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.9386E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66643E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=9.99285E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61585E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66941E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=4.51463E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48509E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.50959E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.24744E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.048E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80018E1	-3.57628E-4	-8.80003E1	-1.19209E-4	5.07832E-3	9.31263E-2	2.7298E1	-3.26773E1	-3.26236E1	2.67705E1	1.70176E-8	2.52448E-3	2.52448E-3	6.29684E-3	2.51379E-2
2.0E0	2.868E3	4.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80016E1	-3.8147E-4	-8.80004E1	2.38419E-5	5.43594E-3	9.31501E-2	2.73005E1	-3.26388E1	-3.2637E1	2.69681E1	1.7017E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.51177E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80017E1	-2.6226E-4	-8.80001E1	1.66893E-4	5.48363E-3	9.30071E-2	2.73257E1	-3.26341E1	-3.26179E1	2.67103E1	1.70248E-8	2.51679E-3	2.51679E-3	6.3126E-3	2.52512E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80017E1	-2.38419E-5	-8.80002E1	-1.19209E-4	5.48363E-3	9.30786E-2	2.73159E1	-3.26385E1	-3.26112E1	2.66727E1	1.70005E-8	2.51411E-3	2.51411E-3	6.29581E-3	2.52696E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80018E1	-4.05312E-4	-8.80003E1	0.0E0	5.43594E-3	9.30309E-2	2.73014E1	-3.26491E1	-3.26279E1	2.68815E1	1.70112E-8	2.51956E-3	2.51956E-3	6.31761E-3	2.52588E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.8002E1	-3.57628E-4	-8.80004E1	1.90735E-4	5.24521E-3	9.3317E-2	2.72957E1	-3.2652E1	-3.26119E1	2.69968E1	1.70165E-8	2.51952E-3	2.51952E-3	6.3074E-3	2.52093E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.8002E1	-2.6226E-4	-8.80003E1	2.38419E-5	5.53131E-3	9.30786E-2	2.72985E1	-3.26849E1	-3.26218E1	2.69836E1	1.69811E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.51924E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80022E1	-3.09944E-4	-8.80003E1	2.6226E-4	5.48363E-3	9.32217E-2	2.73045E1	-3.26861E1	-3.26044E1	2.66749E1	1.70092E-8	2.52027E-3	2.52027E-3	6.30182E-3	2.5263E-2
1.2E1	5.5E1	1.0E0	4.85E2	3.23E2	-7.40192E-2	-8.8002E1	-4.76837E-4	-8.80003E1	2.6226E-4	5.62668E-3	9.32932E-2	2.73069E1	-3.26909E1	-3.26212E1	2.69187E1	1.701E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.52139E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80018E1	-9.53674E-5	-8.8E1	1.43051E-4	5.57899E-3	9.3317E-2	2.7334E1	-3.26596E1	-3.26065E1	2.66556E1	1.7017E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52489E-2
1.4E1	4.7E1	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.8002E1	-2.14577E-4	-8.80002E1	3.09944E-4	5.67436E-3	9.31263E-2	2.73134E1	-3.2694E1	-3.26181E1	2.68073E1	1.70096E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.53368E-2
1.5E1	3.0E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.8002E1	-1.43051E-4	-8.80003E1	3.09944E-4	5.62668E-3	9.33886E-2	2.72997E1	-3.2647E1	-3.2629E1	2.67175E1	1.69999E-8	2.5199E-3	2.5199E-3	6.3232E-3	2.52612E-2
1.6E1	2.32E2	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80019E1	0.0E0	-8.80002E1	3.09944E-4	5.6982E-3	9.31263E-2	2.73021E1	-3.26779E1	-3.26413E1	2.67787E1	1.69949E-8	2.51662E-3	2.51662E-3	6.29098E-3	2.5227E-2
1.7E1	2.68E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80018E1	-9.53674E-5	-8.80001E1	-2.38419E-5	5.48363E-3	9.29594E-2	2.72967E1	-3.26711E1	-3.26134E1	2.68683E1	1.69875E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.52709E-2
1.8E1	1.073E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80018E1	2.14577E-4	-8.79999E1	9.53674E-5	5.14984E-3	9.32217E-2	2.72992E1	-3.26655E1	-3.26673E1	2.67157E1	1.701E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.52354E-2
1.9E1	2.202E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80018E1	-1.66893E-4	-8.80003E1	3.8147E-4	5.60284E-3	9.29356E-2	2.73117E1	-3.26567E1	-3.26422E1	2.66448E1	1.69955E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.52354E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80019E1	-1.66893E-4	-8.80003E1	3.8147E-4	5.24521E-3	9.32932E-2	2.72751E1	-3.26777E1	-3.2623E1	2.6834E1	1.70092E-8	2.51693E-3	2.51693E-3	6.29624E-3	2.52183E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80021E1	-5.00679E-4	-8.80002E1	1.43051E-4	5.03063E-3	9.30786E-2	2.72854E1	-3.26417E1	-3.26353E1	2.70028E1	1.701E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.50852E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80018E1	-3.09944E-4	-8.80003E1	1.90735E-4	5.60284E-3	9.3317E-2	2.73009E1	-3.26615E1	-3.26266E1	2.69902E1	1.70028E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.51924E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80018E1	-4.05312E-4	-8.80001E1	1.19209E-4	5.4121E-3	9.30309E-2	2.73159E1	-3.26398E1	-3.26242E1	2.66842E1	1.70096E-8	2.52647E-3	2.52647E-3	6.30192E-3	2.50959E-2