[Scan]
initial_time=2016-02-15T17:56:12
final_time=2016-02-15T17:56:31
ip_count=19
run=1030
dataset=1
scan=90
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.84367E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.35409E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=4.38082E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.93552E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=8.55088E-10
mult1=-9.54774E-9
mult2=-2.85035E-9
rf_tmon=-4.83687E-3
rf_agc=3.31293E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.37236E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68391E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.0515E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.00441E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=2.49796E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00057E0
lens1_imon=1.35048E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65269E1
os_ef1alow_imon=2.9999E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.55754E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83844E1
cs_ef1a_imon=2.94742E-5
olens2_vset=9.7E-1
olens2_vmon=9.70697E-1
olens2_imon=4.10819E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10782E1
os_restr1_imon=2.86923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=1.88281E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64162E1
os_ef1bup_imon=3.12049E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.24182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93484E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.05307E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=8.22592E-10
tplens_vset=1.4E-1
tplens_vmon=1.60014E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.82488E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=1.87821E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74339E1
cs_ef2b_imon=3.10068E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8525E-1
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.21154E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.68358E0
os_ef2alow_imon=-2.58848E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.99345E-1
os_ef2bup_imon=-5.57025E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10272E1
os_restr2_imon=2.83482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01404E1
cs_anode2_imon=2.2475E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72961E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66214E1
iondef4_imon=1.11075E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.09175E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=3.59881E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17242E0
cs_ionaccel_imon=-1.66407E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.46952E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55716E1
einzel_imon=7.58011E-6
window_vset=0.0E0
window_vmon=1.64978E-1
window_imon=-6.8752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.38942E-4
mask2_vset=0.0E0
mask2_vmon=-1.85823E1
mask2_imon=-9.34263E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.15157E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51481E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33876E1
os_fil1_imon=5.06325E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.58657E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66697E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=9.99565E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61775E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66708E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.41675E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-3.16731E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.62799E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-7.02677E-1
res40_imon=-2.97771E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.017E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.8002E1	-3.8147E-4	-8.80004E1	2.38419E-4	5.62668E-3	9.35316E-2	2.73086E1	-3.26776E1	-3.26086E1	2.66037E1	1.70246E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.5128E-2
2.0E0	2.822E3	1.0E0	3.16E2	1.6E2	-7.24736E-2	-8.8002E1	-4.76837E-5	-8.8E1	0.0E0	5.24521E-3	9.31263E-2	2.73027E1	-3.26456E1	-3.26413E1	2.67789E1	1.70028E-8	2.52599E-3	2.52599E-3	6.31817E-3	2.51709E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80018E1	-3.57628E-4	-8.79999E1	1.43051E-4	5.88894E-3	9.33886E-2	2.73063E1	-3.26845E1	-3.2633E1	2.68736E1	1.69791E-8	2.51693E-3	2.51693E-3	6.29624E-3	2.51514E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.8002E1	-1.66893E-4	-8.80003E1	0.0E0	5.6982E-3	9.33409E-2	2.73177E1	-3.26837E1	-3.26326E1	2.66761E1	1.6982E-8	2.52342E-3	2.52342E-3	6.29684E-3	2.52646E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.8002E1	-2.14577E-4	-8.80001E1	1.90735E-4	5.74589E-3	9.33409E-2	2.73129E1	-3.2653E1	-3.26152E1	2.69007E1	1.70244E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.52489E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.8002E1	-4.05312E-4	-8.79998E1	4.52995E-4	5.26905E-3	9.31263E-2	2.73153E1	-3.26494E1	-3.26206E1	2.68454E1	1.69949E-8	2.52757E-3	2.52757E-3	6.33486E-3	2.51832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.8002E1	-3.33786E-4	-8.80003E1	5.00679E-4	5.55515E-3	9.29117E-2	2.72979E1	-3.26771E1	-3.26296E1	2.68839E1	1.70028E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.51924E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80021E1	-1.66893E-4	-8.80003E1	4.52995E-4	5.74589E-3	9.31263E-2	2.73027E1	-3.26284E1	-3.26272E1	2.69003E1	1.69949E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.51395E-2
1.2E1	5.8E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80021E1	-2.14577E-4	-8.80001E1	3.33786E-4	5.88894E-3	9.2864E-2	2.72865E1	-3.26705E1	-3.2602E1	2.68472E1	1.70318E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.52139E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80021E1	-9.53674E-5	-8.80001E1	2.86102E-4	5.55515E-3	9.32217E-2	2.73213E1	-3.26981E1	-3.26218E1	2.6661E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.52051E-2
1.4E1	4.7E1	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80019E1	-4.05312E-4	-8.8E1	1.19209E-4	5.67436E-3	9.31263E-2	2.72992E1	-3.26697E1	-3.2626E1	2.66334E1	1.7017E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.51177E-2
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.8002E1	-2.86102E-4	-8.80003E1	1.66893E-4	5.22137E-3	9.32455E-2	2.73207E1	-3.26603E1	-3.26254E1	2.6619E1	1.7017E-8	2.5188E-3	2.5188E-3	6.29098E-3	2.51395E-2
1.6E1	2.27E2	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8002E1	-2.6226E-4	-8.80002E1	2.14577E-4	5.26905E-3	9.36031E-2	2.73027E1	-3.26585E1	-3.26104E1	2.67175E1	1.69955E-8	2.50882E-3	2.50882E-3	6.3074E-3	2.52354E-2
1.7E1	2.64E2	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.8002E1	-4.05312E-4	-8.80003E1	2.86102E-4	5.26905E-3	9.32932E-2	2.73165E1	-3.26729E1	-3.26494E1	2.66466E1	1.70168E-8	2.52921E-3	2.52921E-3	6.30182E-3	2.52183E-2
1.8E1	1.035E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80018E1	-4.29153E-4	-8.80003E1	-1.19209E-4	5.22137E-3	9.3317E-2	2.73139E1	-3.26484E1	-3.25953E1	2.66184E1	1.701E-8	2.52707E-3	2.52707E-3	6.30202E-3	2.52139E-2
1.9E1	2.27E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80019E1	2.14577E-4	-8.80002E1	3.33786E-4	5.48363E-3	9.33409E-2	2.73009E1	-3.26615E1	-3.26302E1	2.67211E1	1.701E-8	2.51096E-3	2.51096E-3	6.33977E-3	2.52139E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80021E1	2.38419E-5	-8.80003E1	3.57628E-4	5.29289E-3	9.29832E-2	2.72865E1	-3.26308E1	-3.2623E1	2.698E1	1.69942E-8	2.51136E-3	2.51136E-3	6.32978E-3	2.50847E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80019E1	-9.53674E-5	-8.80005E1	1.66893E-4	5.31673E-3	9.3174E-2	2.72986E1	-3.26573E1	-3.26372E1	2.6855E1	1.70028E-8	2.52707E-3	2.52707E-3	6.29128E-3	2.51494E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.8002E1	2.38419E-5	-8.80006E1	3.09944E-4	5.62668E-3	9.33647E-2	2.72892E1	-3.25965E1	-3.26331E1	2.68626E1	1.701E-8	2.51739E-3	2.51739E-3	6.31009E-3	2.52139E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80019E1	2.38419E-5	-8.80004E1	5.72205E-4	5.19753E-3	9.34362E-2	2.72961E1	-3.26693E1	-3.26374E1	2.66214E1