[Scan]
initial_time=2016-02-15T17:57:15
final_time=2016-02-15T17:57:34
ip_count=19
run=1030
dataset=2
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.19898E-1
ql1_imon=1.8396E-9
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.85637E-10
ql3_vset=
ql3_vmon=-9.13031E0
ql3_imon=3.95133E-9
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=2.75719E-10
mult1=-9.84219E-9
mult2=-2.78793E-9
rf_tmon=-4.79263E-3
rf_agc=3.32501E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=3.18921E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6453E0
bslens_imon=2.43416E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19843E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53806E1
cs_ef1b_imon=2.99295E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05022E1
cs_ea1_imon=2.48756E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36288E0
lens1_imon=2.64249E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64597E1
os_ef1alow_imon=2.97487E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03833E1
cs_ea2_imon=1.55759E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=2.97557E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.96073E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=2.87965E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15157E1
os_ea1_imon=1.89331E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26747E0
cs_ionrep_imon=1.22393E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93594E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01607E1
cs_anode1_imon=3.04264E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=6.58715E-10
tplens_vset=1.4E-1
tplens_vmon=1.6033E0
tplens_imon=-3.11679E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26496E1
iondef3_imon=1.49612E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.57125E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.47388E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26747E0
ionrepsh_imon=1.87692E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33726E1
lens5b_imon=2.19043E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74235E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.63392E-1
os_ea2_imon=-4.99516E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71466E1
cs_ef2a_imon=3.19833E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63261E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50894E-1
os_ef2bup_imon=-5.43124E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10822E1
os_restr2_imon=2.86784E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.31704E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.24403E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.09927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68017E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.96275E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.23613E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14578E0
cs_ionaccel_imon=-1.92123E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47146E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56202E1
einzel_imon=7.78862E-6
window_vset=0.0E0
window_vmon=1.78879E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39004E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.64237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.96274E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.32817E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49575E0
defgridb_imon=6.09527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33882E1
os_fil1_imon=4.64622E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.08672E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66517E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30777E1
cs_fil1_imon=9.99542E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61903E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66751E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14906E-2
os_fil2_imon=-2.64023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.4082E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.19423E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.16117E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22273E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=2.52856E-2
chamber_ion_pmon=1.70025E-8
chamber_cvt_pmon=2.51701E-3
foreline_cvt_pmon=2.51701E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.69256E-1
res40_imon=-2.77615E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=194
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.19755E-1	-7.98655E-1	-9.13007E0	-9.14216E0	5.24521E-3	9.32932E-2	2.73219E1	-3.26971E1	-3.26397E1	2.68363E1	1.70176E-8	2.52025E-3	2.52025E-3	6.31798E-3	2.52858E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.19468E-1	-7.98631E-1	-9.13043E0	-9.14202E0	5.60284E-3	9.33409E-2	2.73039E1	-3.26693E1	-3.26356E1	2.67752E1	1.70168E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.51737E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.19588E-1	-7.98321E-1	-9.13024E0	-9.14199E0	5.45979E-3	9.34124E-2	2.72962E1	-3.26561E1	-3.26242E1	2.68748E1	1.7017E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.52709E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19659E-1	-7.98631E-1	-9.13038E0	-9.14207E0	5.45979E-3	9.3174E-2	2.73135E1	-3.26573E1	-3.2623E1	2.66364E1	1.69955E-8	2.52492E-3	2.52492E-3	6.33977E-3	2.51709E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.1954E-1	-7.98178E-1	-9.13067E0	-9.14226E0	5.4121E-3	9.35078E-2	2.73003E1	-3.26597E1	-3.26188E1	2.67541E1	1.70318E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.51177E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.19707E-1	-7.98535E-1	-9.13036E0	-9.14226E0	5.4121E-3	9.34839E-2	2.73147E1	-3.26669E1	-3.26128E1	2.66398E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.19635E-1	-7.98512E-1	-9.13041E0	-9.14185E0	5.4121E-3	9.33886E-2	2.73063E1	-3.26735E1	-3.26212E1	2.67539E1	1.70244E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.51832E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.19564E-1	-7.98488E-1	-9.13019E0	-9.14207E0	5.34058E-3	9.35316E-2	2.72721E1	-3.26549E1	-3.26048E1	2.69197E1	1.70096E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.50959E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.19468E-1	-7.98512E-1	-9.13005E0	-9.14214E0	5.03063E-3	9.33886E-2	2.72702E1	-3.26374E1	-3.26116E1	2.69373E1	1.70023E-8	2.51225E-3	2.51225E-3	6.3074E-3	2.52051E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.20065E-1	-7.98106E-1	-9.13033E0	-9.14164E0	5.22137E-3	9.35078E-2	2.73102E1	-3.26334E1	-3.263E1	2.7037E1	1.69811E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.53432E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1985E-1	-7.98082E-1	-9.13012E0	-9.14168E0	5.29289E-3	9.35793E-2	2.7307E1	-3.26489E1	-3.25967E1	2.69602E1	1.70108E-8	2.52197E-3	2.52197E-3	6.33341E-3	2.51062E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.19659E-1	-7.98512E-1	-9.13029E0	-9.14237E0	5.48363E-3	9.36508E-2	2.73122E1	-3.26644E1	-3.26331E1	2.68713E1	1.70083E-8	2.52454E-3	2.52454E-3	6.31321E-3	2.52928E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.19826E-1	-7.98345E-1	-9.1305E0	-9.14199E0	5.31673E-3	9.35555E-2	2.73022E1	-3.26816E1	-3.26283E1	2.68117E1	1.70028E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.52354E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.19468E-1	-7.98178E-1	-9.13081E0	-9.14204E0	5.29289E-3	9.34362E-2	2.73159E1	-3.26236E1	-3.26585E1	2.68917E1	1.69962E-8	2.52448E-3	2.52448E-3	6.33388E-3	2.52858E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.1954E-1	-7.98202E-1	-9.1306E0	-9.14216E0	5.26905E-3	9.34839E-2	2.73796E1	-3.2751E1	-3.25695E1	2.66466E1	1.70096E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.51613E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.19588E-1	-7.98178E-1	-9.13041E0	-9.14211E0	5.6982E-3	9.35078E-2	2.73033E1	-3.26386E1	-3.26248E1	2.66153E1	1.70096E-8	2.52209E-3	2.52209E-3	6.34037E-3	2.51177E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.19612E-1	-7.98059E-1	-9.13043E0	-9.14218E0	5.36442E-3	9.34124E-2	2.73087E1	-3.26789E1	-3.2623E1	2.66358E1	1.70023E-8	2.51935E-3	2.51935E-3	6.31014E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.19397E-1	-7.97892E-1	-9.13012E0	-9.14211E0	5.07832E-3	9.35316E-2	2.73193E1	-3.27233E1	-3.25953E1	2.67349E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.19349E-1	-7.98154E-1	-9.13031E0	-9.14223E0	5.38826E-3	9.32693E-2	2.72867E1	-3.26762E1	-3.26615E1	2.68517E1	1.69875E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.52928E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.19898E-1	-7.98035E-1	-9.13031E0	-9.14218E0	5.67436E-3	9.34124E-2	2.7321E1	-3.2662E1	-3.26496E1	2.68017E1	1.70025E-8	2.51701E-3	2.51701E-3	6.31555E-3	2.52856E-2