[Scan]
initial_time=2016-02-15T17:57:42
final_time=2016-02-15T17:58:01
ip_count=19
run=1030
dataset=2
scan=93
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.19397E-1
ql1_imon=1.43192E-9
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.42221E-10
ql3_vset=
ql3_vmon=-9.13029E0
ql3_imon=2.76092E-9
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=3.52156E-10
mult1=-1.05351E-8
mult2=-2.63677E-9
rf_tmon=-4.65061E-3
rf_agc=3.39825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.48294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.67474E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=2.97982E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=2.49317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37196E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=2.97405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.83413E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.87242E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=1.8742E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.21413E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.0537E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=6.76286E-10
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.57643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=3.74925E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.85834E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74387E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.80563E-1
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64981E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33153E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=2.86269E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.26263E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.70292E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.9991E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.42651E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.03673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=6.36982E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3386E1
os_fil1_imon=5.1186E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7555E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66274E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=1.00181E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67047E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59912E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59348E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22413E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.51709E-2
chamber_ion_pmon=1.69883E-8
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6621E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.19468E-1	-7.9875E-1	-9.13029E0	-9.14209E0	5.72205E-3	9.30309E-2	2.73034E1	-3.26411E1	-3.26411E1	2.67787E1	1.70173E-8	2.52384E-3	2.52384E-3	6.33436E-3	2.53216E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.1954E-1	-7.98488E-1	-9.13048E0	-9.14209E0	5.65052E-3	9.31025E-2	2.72886E1	-3.26946E1	-3.26364E1	2.67656E1	1.70104E-8	2.52025E-3	2.52025E-3	6.3074E-3	2.52223E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.19659E-1	-7.98249E-1	-9.13041E0	-9.14178E0	5.38826E-3	9.3174E-2	2.73045E1	-3.26544E1	-3.26446E1	2.67535E1	1.69942E-8	2.51804E-3	2.51804E-3	6.31858E-3	2.50626E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.19516E-1	-7.98774E-1	-9.13041E0	-9.14166E0	5.62668E-3	9.26733E-2	2.73159E1	-3.26615E1	-3.26212E1	2.69223E1	1.70033E-8	2.51814E-3	2.51814E-3	6.31798E-3	2.50748E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.19564E-1	-7.98678E-1	-9.13043E0	-9.14192E0	5.57899E-3	9.32455E-2	2.73285E1	-3.26837E1	-3.26224E1	2.67439E1	1.7017E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.52489E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.19254E-1	-7.98202E-1	-9.1306E0	-9.14209E0	5.50747E-3	9.3174E-2	2.73225E1	-3.26561E1	-3.26374E1	2.67157E1	1.7017E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.5227E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.19468E-1	-7.98535E-1	-9.13057E0	-9.14228E0	5.96046E-3	9.30548E-2	2.72965E1	-3.26585E1	-3.2634E1	2.68472E1	1.70244E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.52709E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.19278E-1	-7.98607E-1	-9.13048E0	-9.14245E0	5.74589E-3	9.31263E-2	2.72937E1	-3.26573E1	-3.26344E1	2.67932E1	1.70168E-8	2.52027E-3	2.52027E-3	6.32418E-3	2.51514E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.1923E-1	-7.98655E-1	-9.13048E0	-9.14226E0	5.6982E-3	9.32932E-2	2.72889E1	-3.26506E1	-3.26128E1	2.68142E1	1.69949E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.50959E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.18944E-1	-7.98678E-1	-9.13043E0	-9.14249E0	5.65052E-3	9.32693E-2	2.72927E1	-3.26732E1	-3.26313E1	2.68064E1	1.70023E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.51395E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.19063E-1	-7.98821E-1	-9.1306E0	-9.14204E0	5.4121E-3	9.34124E-2	2.73177E1	-3.26627E1	-3.26302E1	2.6813E1	1.70028E-8	2.5131E-3	2.5131E-3	6.29665E-3	2.50852E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.19206E-1	-7.98392E-1	-9.13067E0	-9.14187E0	5.6982E-3	9.33647E-2	2.73267E1	-3.26663E1	-3.26152E1	2.69662E1	1.69949E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.50959E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.19159E-1	-7.98416E-1	-9.13033E0	-9.14218E0	5.57899E-3	9.31978E-2	2.73087E1	-3.26699E1	-3.26368E1	2.67734E1	1.70318E-8	2.52757E-3	2.52757E-3	6.32936E-3	2.51177E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.19111E-1	-7.97772E-1	-9.13064E0	-9.14209E0	5.50747E-3	9.31263E-2	2.73641E1	-3.26856E1	-3.26107E1	2.66196E1	1.70096E-8	2.51443E-3	2.51443E-3	6.34588E-3	2.52051E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.1923E-1	-7.98106E-1	-9.13041E0	-9.14199E0	5.60284E-3	9.31978E-2	2.73928E1	-3.27738E1	-3.2599E1	2.66646E1	1.70028E-8	2.51954E-3	2.51954E-3	6.30202E-3	2.51709E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.19445E-1	-7.98321E-1	-9.13043E0	-9.14197E0	5.29289E-3	9.31978E-2	2.73189E1	-3.26741E1	-3.2608E1	2.68797E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.51177E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.19278E-1	-7.97772E-1	-9.13062E0	-9.14245E0	5.67436E-3	9.31501E-2	2.72859E1	-3.26603E1	-3.26434E1	2.70154E1	1.70023E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.19087E-1	-7.9844E-1	-9.13038E0	-9.14216E0	5.53131E-3	9.27925E-2	2.7301E1	-3.26567E1	-3.26384E1	2.69223E1	1.7017E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.51395E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.19254E-1	-7.98225E-1	-9.13033E0	-9.14207E0	5.29289E-3	9.27687E-2	2.73393E1	-3.2682E1	-3.25894E1	2.69848E1	1.70246E-8	2.52276E-3	2.52276E-3	6.28592E-3	2.53432E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.19397E-1	-7.98011E-1	-9.13029E0	-9.14226E0	5.26905E-3	9.29356E-2	2.73099E1	-3.26585E1	-3.26254E1	2.70292E1	1.69883E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.51709E-2