[Scan]
initial_time=2016-02-15T17:59:28
final_time=2016-02-15T17:59:47
ip_count=19
run=1030
dataset=2
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=9.65822E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=3.0334E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.51229E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.75287E-10
mult1=-9.25877E-9
mult2=-2.68268E-9
rf_tmon=-4.52444E-3
rf_agc=3.40305E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=3.85046E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19783E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.96252E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.48522E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38436E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.56285E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=2.9809E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.85797E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=2.86881E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=1.89095E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25446E0
cs_ionrep_imon=1.23156E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.04973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.61652E-10
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98604E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.96693E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29634E0
ionrepsh_imon=1.88741E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.19958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.57524E-1
os_ea2_imon=-5.28949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00718E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62158E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.2529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66983E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.03953E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=2.88963E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.94917E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.63647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.56757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3387E1
os_fil1_imon=5.18467E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66763E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30755E1
cs_fil1_imon=1.00034E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61969E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.2176E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.41295E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22233E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.51066E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40065E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68903E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.18324E-1	-7.98392E-1	-9.13072E0	-9.14195E0	5.26905E-3	9.33647E-2	2.73063E1	-3.26561E1	-3.2632E1	2.68166E1					
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.18515E-1	-7.98345E-1	-9.13103E0	-9.14204E0	5.4121E-3	9.33886E-2	2.72985E1	-3.26825E1	-3.26368E1	2.67896E1	1.70246E-8	2.52061E-3	2.52061E-3	6.34518E-3	2.51494E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.18324E-1	-7.98488E-1	-9.13112E0	-9.14192E0	5.76973E-3	9.33409E-2	2.73139E1	-3.26679E1	-3.26319E1	2.68123E1	1.70092E-8	2.5147E-3	2.5147E-3	6.29067E-3	2.50404E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.18229E-1	-7.98917E-1	-9.13069E0	-9.14176E0	5.26905E-3	9.33647E-2	2.73231E1	-3.26651E1	-3.26464E1	2.6798E1	1.70247E-8	2.51498E-3	2.51498E-3	6.29684E-3	2.50748E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.1811E-1	-7.98607E-1	-9.13093E0	-9.14164E0	5.26905E-3	9.31501E-2	2.73151E1	-3.26443E1	-3.26319E1	2.67067E1	1.70023E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.50741E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.18276E-1	-7.9844E-1	-9.13086E0	-9.14195E0	5.03063E-3	9.31025E-2	2.72943E1	-3.26579E1	-3.26392E1	2.68635E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.18205E-1	-7.98464E-1	-9.13072E0	-9.14214E0	5.34058E-3	9.34124E-2	2.73357E1	-3.26326E1	-3.26248E1	2.68034E1	1.69875E-8	2.52209E-3	2.52209E-3	6.28552E-3	2.52051E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.18586E-1	-7.97915E-1	-9.13086E0	-9.14192E0	5.53131E-3	9.31263E-2	2.72903E1	-3.26655E1	-3.26107E1	2.67668E1	1.70023E-8	2.52757E-3	2.52757E-3	6.32386E-3	2.52051E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.18419E-1	-7.98416E-1	-9.13079E0	-9.14199E0	5.31673E-3	9.29594E-2	2.73143E1	-3.26627E1	-3.25881E1	2.67541E1	1.70028E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.52139E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18443E-1	-7.98225E-1	-9.13074E0	-9.14202E0	5.57899E-3	9.31263E-2	2.72856E1	-3.26579E1	-3.26384E1	2.6816E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.52051E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.18419E-1	-7.98345E-1	-9.13043E0	-9.14214E0	5.76973E-3	9.32693E-2	2.72847E1	-3.26488E1	-3.2608E1	2.68394E1	1.70096E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.51832E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.18205E-1	-7.98678E-1	-9.13081E0	-9.14192E0	5.45979E-3	9.29356E-2	2.73051E1	-3.26458E1	-3.26272E1	2.67872E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.50959E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17943E-1	-7.98535E-1	-9.13091E0	-9.14178E0	5.74589E-3	9.34601E-2	2.73087E1	-3.2638E1	-3.26392E1	2.68448E1	1.69949E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.51832E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.1811E-1	-7.98297E-1	-9.13045E0	-9.14187E0	5.48363E-3	9.33647E-2	2.73015E1	-3.26777E1	-3.2608E1	2.67207E1	1.70096E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.51395E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.18086E-1	-7.98559E-1	-9.13064E0	-9.14207E0	5.14984E-3	9.36031E-2	2.73466E1	-3.26687E1	-3.26032E1	2.68947E1	1.69955E-8	2.51203E-3	2.51203E-3	6.33977E-3	2.50424E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.18539E-1	-7.98488E-1	-9.13064E0	-9.14195E0	5.03063E-3	9.33409E-2	2.72957E1	-3.26608E1	-3.26119E1	2.6661E1	1.70096E-8	2.51334E-3	2.51334E-3	6.29645E-3	2.51395E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.18372E-1	-7.98297E-1	-9.13095E0	-9.14202E0	5.4121E-3	9.37939E-2	2.73303E1	-3.26524E1	-3.26038E1	2.68304E1	1.69949E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.51395E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18348E-1	-7.98011E-1	-9.1311E0	-9.14207E0	5.4121E-3	9.33409E-2	2.73225E1	-3.26573E1	-3.26116E1	2.68923E1	1.70023E-8	2.52209E-3	2.52209E-3	6.28006E-3	2.49871E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18253E-1	-7.98368E-1	-9.13095E0	-9.14199E0	5.53131E-3	9.34362E-2	2.72949E1	-3.26711E1	-3.265E1	2.68376E1	1.69949E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.52051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.18253E-1	-7.98297E-1	-9.1311E0	-9.14195E0	5.10216E-3	9.32217E-2	2.73087E1	-3.26807E1	-3.26224E1	2.66983E1	1.70173E-8	2.52276E-3	2.52276E-3	6.29665E-3	2.51066E-2