[Scan]
initial_time=2016-02-15T17:59:55
final_time=2016-02-15T18:00:14
ip_count=19
run=1030
dataset=2
scan=98
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=1.03685E-9
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=3.05033E-10
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=1.34643E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.62131E-10
mult1=-9.49958E-9
mult2=-2.6747E-9
rf_tmon=-5.73811E-3
rf_agc=3.1459E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=4.19748E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69571E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.97765E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05212E1
cs_ea1_imon=2.49937E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3525E0
lens1_imon=2.55034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.56037E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=2.98342E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.13847E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=1.88953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.21598E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91838E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.04793E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=7.2608E-10
tplens_vset=1.4E-1
tplens_vmon=1.59365E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.48285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.56001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.00412E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=1.88139E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42777E-1
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49371E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=2.86053E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.26371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72871E1
iondef1_imon=1.08998E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68713E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.0533E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=3.10504E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.26483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.65605E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33858E1
os_fil1_imon=4.578E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.3922E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=1.00125E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61537E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66791E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.15753E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51926E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22381E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.53216E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95332E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.18062E-1	-7.98941E-1	-9.13064E0	-9.14183E0	5.22137E-3	9.34362E-2	2.7328E1	-3.26708E1	-3.26523E1	2.66773E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.18157E-1	-7.98631E-1	-9.1306E0	-9.14209E0	5.55515E-3	9.36031E-2	2.73064E1	-3.26731E1	-3.2626E1	2.6631E1	1.70043E-8	2.5216E-3	2.5216E-3	6.28703E-3	2.52179E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.1799E-1	-7.98631E-1	-9.13064E0	-9.14211E0	5.36442E-3	9.32455E-2	2.72949E1	-3.26723E1	-3.26302E1	2.66274E1	1.69849E-8	2.52338E-3	2.52338E-3	6.31902E-3	2.52696E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.18157E-1	-7.98559E-1	-9.1306E0	-9.14209E0	5.31673E-3	9.30548E-2	2.73204E1	-3.26644E1	-3.26343E1	2.67782E1	1.70028E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.52785E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18253E-1	-7.98488E-1	-9.13074E0	-9.14199E0	5.50747E-3	9.32932E-2	2.72901E1	-3.26536E1	-3.26278E1	2.69704E1	1.70023E-8	2.5188E-3	2.5188E-3	6.28006E-3	2.50305E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.17943E-1	-7.98678E-1	-9.13048E0	-9.14207E0	5.53131E-3	9.3317E-2	2.72847E1	-3.2635E1	-3.26224E1	2.68916E1	1.7017E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.18276E-1	-7.98702E-1	-9.13055E0	-9.14197E0	5.43594E-3	9.31263E-2	2.72901E1	-3.26561E1	-3.2626E1	2.68659E1	1.69811E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.52569E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.18133E-1	-7.9875E-1	-9.1306E0	-9.14233E0	5.45979E-3	9.28879E-2	2.72847E1	-3.26512E1	-3.26416E1	2.66406E1	1.70096E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.52051E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.1811E-1	-7.98297E-1	-9.13064E0	-9.14209E0	5.07832E-3	9.32217E-2	2.73093E1	-3.26837E1	-3.26212E1	2.69049E1	1.69949E-8	2.51116E-3	2.51116E-3	6.30192E-3	2.51613E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.18062E-1	-7.98631E-1	-9.13062E0	-9.14195E0	5.53131E-3	9.3174E-2	2.72998E1	-3.26644E1	-3.26543E1	2.67668E1	1.70096E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.5227E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.18348E-1	-7.98869E-1	-9.13093E0	-9.14204E0	5.05447E-3	9.35555E-2	2.73141E1	-3.26645E1	-3.26056E1	2.68304E1	1.69949E-8	2.52428E-3	2.52428E-3	6.33486E-3	2.50305E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.18181E-1	-7.98488E-1	-9.13103E0	-9.14176E0	5.19753E-3	9.3174E-2	2.73285E1	-3.26591E1	-3.26362E1	2.69127E1	1.70096E-8	2.52209E-3	2.52209E-3	6.34037E-3	2.52489E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.18253E-1	-7.9813E-1	-9.13067E0	-9.14211E0	5.36442E-3	9.31025E-2	2.72961E1	-3.26807E1	-3.26032E1	2.68436E1	1.7017E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.52051E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.18014E-1	-7.99155E-1	-9.1305E0	-9.14183E0	5.07832E-3	9.29832E-2	2.7337E1	-3.26903E1	-3.26048E1	2.67824E1	1.70096E-8	2.52647E-3	2.52647E-3	6.30192E-3	2.52489E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.17704E-1	-7.98941E-1	-9.13048E0	-9.14204E0	5.19753E-3	9.32693E-2	2.72837E1	-3.26701E1	-3.26205E1	2.68052E1	1.701E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.52139E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.17657E-1	-7.98941E-1	-9.13055E0	-9.14207E0	4.98295E-3	9.33886E-2	2.73069E1	-3.26573E1	-3.26142E1	2.67728E1	1.70096E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.52051E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.17561E-1	-7.98821E-1	-9.13076E0	-9.14202E0	5.126E-3	9.30309E-2	2.73153E1	-3.26909E1	-3.26206E1	2.67653E1	1.69949E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.17585E-1	-7.98702E-1	-9.13064E0	-9.14211E0	4.8399E-3	9.32455E-2	2.73016E1	-3.2659E1	-3.26366E1	2.68791E1	1.70246E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.5021E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17561E-1	-7.98178E-1	-9.131E0	-9.14211E0	4.93526E-3	9.33409E-2	2.7321E1	-3.26561E1	-3.26413E1	2.67698E1	1.7017E-8	2.52318E-3	2.52318E-3	6.28552E-3	2.51832E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.17537E-1	-7.98845E-1	-9.13076E0	-9.14187E0	5.60284E-3	9.30309E-2	2.72871E1	-3.26573E1	-3.26482E1	2.68713E1	1.701E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.53216E-2