[Scan]
initial_time=2016-02-15T18:00:21
final_time=2016-02-15T18:00:41
ip_count=19
run=1030
dataset=2
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09286E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.1799E-1
ql1_imon=8.77762E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.97356E-10
ql3_vset=
ql3_vmon=-9.13072E0
ql3_imon=1.16206E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.83799E-10
mult1=-1.00432E-8
mult2=-2.77029E-9
rf_tmon=-4.82212E-3
rf_agc=3.29788E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.83389E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.97621E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.50002E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37857E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.54867E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84923E1
cs_ef1a_imon=2.98703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.06623E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=1.89078E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=1.22747E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93607E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=3.05442E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.18784E-10
tplens_vset=1.4E-1
tplens_vmon=1.59757E0
tplens_imon=-1.26308E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=3.95441E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=1.8843E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60736E-1
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60777E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.86809E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.26155E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73181E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69403E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.01764E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.28791E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09831E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.2395E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3894E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.55367E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.40444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.27609E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33881E1
os_fil1_imon=4.63206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79154E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66254E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30733E1
cs_fil1_imon=1.00094E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62186E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68758E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22259E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.52139E-2
chamber_ion_pmon=1.69883E-8
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16955E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.17776E-1	-7.98368E-1	-9.13053E0	-9.14204E0	5.07832E-3	9.33409E-2	2.73289E1	-3.26625E1	-3.2604E1	2.68597E1	1.701E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.5128E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.178E-1	-7.98631E-1	-9.13081E0	-9.14218E0	5.17368E-3	9.31263E-2	2.72943E1	-3.2653E1	-3.26236E1	2.68082E1	1.69666E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.52354E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17728E-1	-7.98464E-1	-9.13115E0	-9.14221E0	5.22137E-3	9.32217E-2	2.73123E1	-3.26645E1	-3.26687E1	2.66682E1	1.7017E-8	2.52538E-3	2.52538E-3	6.31288E-3	2.52928E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.178E-1	-7.9844E-1	-9.13079E0	-9.14233E0	5.10216E-3	9.31025E-2	2.72986E1	-3.26549E1	-3.26254E1	2.70286E1	1.69883E-8	2.51203E-3	2.51203E-3	6.3074E-3	2.53E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.18086E-1	-7.98583E-1	-9.13062E0	-9.14235E0	5.05447E-3	9.29594E-2	2.72709E1	-3.26549E1	-3.2599E1	2.69421E1	1.70244E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.17943E-1	-7.98297E-1	-9.13069E0	-9.14207E0	5.14984E-3	9.28879E-2	2.73092E1	-3.26661E1	-3.26101E1	2.69148E1	1.70023E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.5227E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.17704E-1	-7.98583E-1	-9.13103E0	-9.14216E0	5.62668E-3	9.31025E-2	2.73063E1	-3.26242E1	-3.2617E1	2.68683E1	1.70246E-8	2.52599E-3	2.52599E-3	6.3074E-3	2.52785E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.1768E-1	-7.98154E-1	-9.131E0	-9.14235E0	5.05447E-3	9.29117E-2	2.72817E1	-3.26554E1	-3.26074E1	2.68833E1	1.70096E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.50959E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17657E-1	-7.98607E-1	-9.13084E0	-9.14204E0	5.07832E-3	9.29594E-2	2.72871E1	-3.26633E1	-3.26206E1	2.69049E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51613E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.178E-1	-7.98464E-1	-9.13088E0	-9.14195E0	5.34058E-3	9.29594E-2	2.72979E1	-3.26374E1	-3.2635E1	2.66448E1	1.7017E-8	2.52209E-3	2.52209E-3	6.34037E-3	2.51832E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.17728E-1	-7.9844E-1	-9.13072E0	-9.14233E0	5.57899E-3	9.31501E-2	2.73098E1	-3.26785E1	-3.26254E1	2.66436E1	1.7017E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.52051E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.17823E-1	-7.98821E-1	-9.13076E0	-9.14204E0	5.05447E-3	9.32217E-2	2.72941E1	-3.26468E1	-3.26425E1	2.68917E1	1.701E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.51066E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.17561E-1	-7.98416E-1	-9.1311E0	-9.14223E0	5.26905E-3	9.26018E-2	2.73246E1	-3.26744E1	-3.26195E1	2.68661E1	1.69654E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.50523E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.17585E-1	-7.98202E-1	-9.13072E0	-9.1419E0	4.91142E-3	9.2864E-2	2.73364E1	-3.26892E1	-3.26092E1	2.66658E1	1.701E-8	2.51203E-3	2.51203E-3	6.31278E-3	2.52569E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-8.17823E-1	-7.98464E-1	-9.13081E0	-9.14209E0	5.34058E-3	9.31025E-2	2.73075E1	-3.26693E1	-3.26104E1	2.66263E1	1.701E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.52569E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09255E0	-8.17943E-1	-7.98583E-1	-9.13084E0	-9.14197E0	5.10216E-3	9.31263E-2	2.73129E1	-3.2647E1	-3.26735E1	2.66635E1	1.70173E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.51494E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09232E0	-8.1768E-1	-7.98392E-1	-9.13093E0	-9.1423E0	4.88758E-3	9.29832E-2	2.73213E1	-3.27113E1	-3.26146E1	2.68337E1	1.70023E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.53148E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09333E0	-8.17776E-1	-7.98559E-1	-9.13072E0	-9.14207E0	5.26905E-3	9.29832E-2	2.7298E1	-3.26378E1	-3.26095E1	2.68905E1	1.70096E-8	2.51116E-3	2.51116E-3	6.32936E-3	2.52928E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09302E0	-8.18086E-1	-7.98392E-1	-9.13057E0	-9.14202E0	5.72205E-3	9.30786E-2	2.73435E1	-3.26891E1	-3.26416E1	2.68755E1	1.69949E-8	2.51443E-3	2.51443E-3	6.34037E-3	2.5227E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09286E0	-8.1799E-1	-7.98512E-1	-9.13072E0	-9.14185E0	5.29289E-3	9.30071E-2	2.73181E1	-3.2652E1	-3.2629E1	2.69403E1	1.69883E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.52139E-2