[Scan]
initial_time=2016-02-15T18:01:41
final_time=2016-02-15T18:02:01
ip_count=19
run=1030
dataset=2
scan=102
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=8.51953E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=3.18217E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.04108E-9
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=5.22935E-10
mult1=-9.65928E-9
mult2=-2.90293E-9
rf_tmon=-4.30735E-3
rf_agc=3.30406E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=4.11963E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=2.96864E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=2.48416E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.55805E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.97946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.21858E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=1.88466E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.23685E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.05946E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.29513E-10
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26297E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2705E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.01425E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=1.88285E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.20009E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.11172E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41509E-1
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29549E-1
os_ef2bup_imon=-5.12066E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10595E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.32235E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73002E1
iondef1_imon=1.08147E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67227E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.03022E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.95353E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.23349E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=6.48518E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=7.61353E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61209E0
defgridb_imon=6.19317E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33884E1
os_fil1_imon=5.61715E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71345E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66303E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=1.00001E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61627E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66768E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22317E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.52709E-2
chamber_ion_pmon=1.69506E-8
chamber_cvt_pmon=2.52867E-3
foreline_cvt_pmon=2.52867E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.38579E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17394E-1	-7.98345E-1	-9.13064E0	-9.14202E0	5.45979E-3	9.2864E-2	2.72968E1	-3.26803E1	-3.26354E1	2.68406E1	1.701E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.51494E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17585E-1	-7.9844E-1	-9.13064E0	-9.14199E0	5.14984E-3	9.33886E-2	2.73151E1	-3.26531E1	-3.26402E1	2.67569E1	1.701E-8	2.52169E-3	2.52169E-3	6.29128E-3	2.5128E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.17561E-1	-7.98917E-1	-9.1305E0	-9.14187E0	4.98295E-3	9.31025E-2	2.73086E1	-3.26537E1	-3.26756E1	2.67893E1	1.701E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.5128E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.17275E-1	-7.98678E-1	-9.13064E0	-9.14223E0	5.14984E-3	9.33409E-2	2.73189E1	-3.265E1	-3.26224E1	2.67878E1	1.69883E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.50852E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17919E-1	-7.98416E-1	-9.13093E0	-9.14228E0	5.07832E-3	9.31978E-2	2.73081E1	-3.26579E1	-3.26356E1	2.68262E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17275E-1	-7.98631E-1	-9.13079E0	-9.14195E0	5.07832E-3	9.27925E-2	2.73098E1	-3.26638E1	-3.26077E1	2.67631E1	1.70023E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.51395E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17871E-1	-7.97844E-1	-9.13064E0	-9.14209E0	4.95911E-3	9.30071E-2	2.73228E1	-3.26667E1	-3.26231E1	2.68012E1	1.70028E-8	2.51632E-3	2.51632E-3	6.33436E-3	2.50852E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17776E-1	-7.98392E-1	-9.13076E0	-9.14214E0	4.98295E-3	9.29356E-2	2.72931E1	-3.26404E1	-3.2614E1	2.67541E1	1.69955E-8	2.5131E-3	2.5131E-3	6.33977E-3	2.50424E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.17871E-1	-7.98678E-1	-9.13045E0	-9.14192E0	5.4121E-3	9.27925E-2	2.72642E1	-3.26554E1	-3.26104E1	2.68286E1	1.69875E-8	2.52538E-3	2.52538E-3	6.36244E-3	2.51613E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17919E-1	-7.98535E-1	-9.13074E0	-9.14223E0	5.45979E-3	9.2864E-2	2.72962E1	-3.26531E1	-3.26437E1	2.684E1	1.7017E-8	2.52428E-3	2.52428E-3	6.29645E-3	2.52489E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17943E-1	-7.98225E-1	-9.13072E0	-9.14233E0	5.34058E-3	9.30071E-2	2.72871E1	-3.26627E1	-3.26464E1	2.67782E1	1.70096E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.53148E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17776E-1	-7.98416E-1	-9.13069E0	-9.14211E0	5.07832E-3	9.28402E-2	2.73216E1	-3.2682E1	-3.26136E1	2.68389E1	1.70318E-8	2.51739E-3	2.51739E-3	6.29128E-3	2.52354E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.17537E-1	-7.98106E-1	-9.13081E0	-9.14233E0	5.31673E-3	9.27448E-2	2.73045E1	-3.26529E1	-3.26291E1	2.6786E1	1.69875E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.51613E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17561E-1	-7.98345E-1	-9.13095E0	-9.14223E0	5.43594E-3	9.32455E-2	2.72745E1	-3.26494E1	-3.26308E1	2.67159E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.52489E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17418E-1	-7.98154E-1	-9.131E0	-9.14218E0	5.05447E-3	9.3174E-2	2.72962E1	-3.2652E1	-3.26178E1	2.69397E1	1.70092E-8	2.51804E-3	2.51804E-3	6.33538E-3	2.51292E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.17275E-1	-7.98702E-1	-9.13107E0	-9.14252E0	5.05447E-3	9.30309E-2	2.72949E1	-3.26771E1	-3.26182E1	2.69806E1	1.69955E-8	2.51632E-3	2.51632E-3	6.2645E-3	2.52354E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17108E-1	-7.98273E-1	-9.13122E0	-9.14237E0	5.19753E-3	9.30071E-2	2.73387E1	-3.26801E1	-3.262E1	2.70346E1	1.69949E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.17513E-1	-7.98392E-1	-9.13105E0	-9.14261E0	5.126E-3	9.31978E-2	2.72958E1	-3.2655E1	-3.26393E1	2.70242E1	1.69955E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.51494E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.1749E-1	-7.98416E-1	-9.13115E0	-9.14254E0	5.4121E-3	9.31978E-2	2.73249E1	-3.26651E1	-3.26236E1	2.68556E1	1.69955E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.53E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17609E-1	-7.98678E-1	-9.1311E0	-9.14233E0	4.93526E-3	9.3174E-2	2.73002E1	-3.2705E1	-3.26297E1	2.67227E1	1.69506E-8	2.52867E-3	2.52867E-3	6.33486E-3	2.52709E-2