[Scan]
initial_time=2016-02-15T18:02:08
final_time=2016-02-15T18:02:27
ip_count=19
run=1030
dataset=2
scan=103
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=8.4399E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=3.0092E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=1.04475E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.26643E-10
mult1=-9.42733E-9
mult2=-2.82041E-9
rf_tmon=-4.4223E-3
rf_agc=3.33456E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=3.97933E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20175E1
lens5a_imon=2.00254E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=2.97874E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=2.50399E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36114E0
lens1_imon=2.62788E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.55048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83439E1
cs_ef1a_imon=2.98703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=4.2119E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=2.87098E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=1.88249E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.21594E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=3.05586E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.45821E-10
tplens_vset=1.4E-1
tplens_vmon=1.621E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.58869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.27675E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=1.87492E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.11468E-1
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61798E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10589E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.07643E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68806E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.04886E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=3.17478E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=6.16073E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93806E3
defgrida_imon=7.02952E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=8.25521E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33877E1
os_fil1_imon=4.18757E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.05583E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66461E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=1.00123E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62083E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67017E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.87833E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58833E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22354E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.52709E-2
chamber_ion_pmon=1.69875E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95932E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.17466E-1	-7.9875E-1	-9.13103E0	-9.14211E0	5.24521E-3	9.33886E-2	2.7288E1	-3.26596E1	-3.26219E1	2.67115E1	1.701E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.51494E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.17132E-1	-7.98416E-1	-9.13088E0	-9.14216E0	5.36442E-3	9.34601E-2	2.72959E1	-3.2656E1	-3.25893E1	2.68699E1	1.70173E-8	2.51525E-3	2.51525E-3	6.34518E-3	2.52569E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.17204E-1	-7.98416E-1	-9.13134E0	-9.14204E0	5.24521E-3	9.3174E-2	2.73063E1	-3.26638E1	-3.2613E1	2.67798E1	1.70092E-8	2.51915E-3	2.51915E-3	6.35223E-3	2.4974E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.17513E-1	-7.98488E-1	-9.13098E0	-9.14216E0	5.48363E-3	9.32932E-2	2.7301E1	-3.2688E1	-3.26337E1	2.68046E1	1.70318E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.51709E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09333E0	-8.17227E-1	-7.98249E-1	-9.13095E0	-9.14207E0	5.22137E-3	9.33647E-2	2.73123E1	-3.26518E1	-3.26206E1	2.67468E1	1.70028E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.53E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.1737E-1	-7.98488E-1	-9.13064E0	-9.14216E0	4.98295E-3	9.32217E-2	2.72809E1	-3.26526E1	-3.26119E1	2.68677E1	1.7017E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09255E0	-8.17609E-1	-7.98464E-1	-9.13076E0	-9.14211E0	5.48363E-3	9.33409E-2	2.73062E1	-3.26319E1	-3.26154E1	2.66433E1	1.70108E-8	2.51886E-3	2.51886E-3	6.3126E-3	2.5272E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09286E0	-8.17323E-1	-7.98607E-1	-9.13112E0	-9.14187E0	5.03063E-3	9.32932E-2	2.72997E1	-3.26753E1	-3.26248E1	2.68376E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09232E0	-8.16703E-1	-7.98416E-1	-9.13126E0	-9.14211E0	4.74453E-3	9.32932E-2	2.72889E1	-3.26639E1	-3.26128E1	2.68447E1	1.69955E-8	2.52008E-3	2.52008E-3	6.32626E-3	2.52354E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09317E0	-8.17204E-1	-7.9875E-1	-9.13084E0	-9.14216E0	5.34058E-3	9.32693E-2	2.73246E1	-3.26678E1	-3.2608E1	2.68753E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09255E0	-8.17037E-1	-7.98011E-1	-9.13084E0	-9.14204E0	5.14984E-3	9.32932E-2	2.73E1	-3.26812E1	-3.26607E1	2.67636E1	1.70141E-8	2.52121E-3	2.52121E-3	6.32057E-3	2.52402E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.17132E-1	-7.98202E-1	-9.13088E0	-9.14183E0	5.19753E-3	9.34839E-2	2.73064E1	-3.26769E1	-3.26317E1	2.68338E1	1.69898E-8	2.52093E-3	2.52093E-3	6.28667E-3	2.5189E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.1718E-1	-7.98416E-1	-9.13084E0	-9.14178E0	5.45979E-3	9.30548E-2	2.73261E1	-3.26669E1	-3.26086E1	2.67583E1	1.70158E-8	2.52029E-3	2.52029E-3	6.34301E-3	2.538E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.17585E-1	-7.98631E-1	-9.13103E0	-9.14202E0	5.76973E-3	9.33647E-2	2.73279E1	-3.26356E1	-3.26434E1	2.68406E1	1.69955E-8	2.52599E-3	2.52599E-3	6.33977E-3	2.53E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.17442E-1	-7.98249E-1	-9.13095E0	-9.14211E0	5.10216E-3	9.36985E-2	2.73369E1	-3.26813E1	-3.2623E1	2.68076E1	1.70244E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.53589E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17585E-1	-7.98607E-1	-9.13107E0	-9.14209E0	5.29289E-3	9.35555E-2	2.72933E1	-3.2659E1	-3.26354E1	2.67668E1	1.70096E-8	2.51225E-3	2.51225E-3	6.32936E-3	2.52051E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17394E-1	-7.98512E-1	-9.13134E0	-9.14197E0	5.84126E-3	9.31025E-2	2.72943E1	-3.26368E1	-3.2623E1	2.68532E1	1.69949E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.52709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.17633E-1	-7.98297E-1	-9.13103E0	-9.1423E0	5.45979E-3	9.32932E-2	2.73225E1	-3.26729E1	-3.26474E1	2.6825E1	1.69875E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52051E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17442E-1	-7.9844E-1	-9.1311E0	-9.14197E0	5.57899E-3	9.31263E-2	2.72799E1	-3.26524E1	-3.26434E1	2.67391E1	1.69891E-8	2.51919E-3	2.51919E-3	6.31798E-3	2.52435E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17299E-1	-7.98631E-1	-9.13093E0	-9.14187E0	5.84126E-3	9.30786E-2	2.72955E1	-3.26488E1	-3.26416E1	2.68806E1	1.69875E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.52709E-2