[Scan]
initial_time=2016-02-15T18:03:27
final_time=2016-02-15T18:03:47
ip_count=19
run=1030
dataset=2
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08726E-4
ql1_vset=
ql1_vmon=-8.17156E-1
ql1_imon=7.84731E-10
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=3.19541E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=8.68654E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=5.09369E-10
mult1=-9.38939E-9
mult2=-2.75447E-9
rf_tmon=-3.20546E-3
rf_agc=3.41303E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.36187E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=2.00795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=2.97009E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.49497E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.57787E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83499E1
cs_ef1a_imon=2.97477E-5
olens2_vset=9.7E-1
olens2_vmon=9.70817E-1
olens2_imon=4.14956E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=1.89259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=1.21774E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.05838E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=6.87397E-10
tplens_vset=1.4E-1
tplens_vmon=1.59217E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26401E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26731E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98432E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.05157E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24369E0
ionrepsh_imon=1.89475E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.68547E-1
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00742E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61377E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23543E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.86485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68845E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.03145E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.25501E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=7.26385E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3388E1
os_fil1_imon=4.42784E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.3922E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=9.99819E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67072E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.61694E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22451E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.52928E-2
chamber_ion_pmon=1.7017E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.49992E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17108E-1	-7.9844E-1	-9.13081E0	-9.14233E0	5.17368E-3	9.31501E-2	2.73021E1	-3.26673E1	-3.26231E1	2.68007E1	1.7017E-8	2.51225E-3	2.51225E-3	6.29645E-3	2.5227E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17418E-1	-7.98345E-1	-9.13088E0	-9.14247E0	5.36442E-3	9.35078E-2	2.73143E1	-3.26609E1	-3.26266E1	2.67059E1	1.70028E-8	2.51203E-3	2.51203E-3	6.32896E-3	2.53E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.17299E-1	-7.98535E-1	-9.13095E0	-9.14226E0	5.34058E-3	9.33409E-2	2.73305E1	-3.26396E1	-3.26124E1	2.69361E1	1.69942E-8	2.52139E-3	2.52139E-3	6.3074E-3	2.52183E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16941E-1	-7.98512E-1	-9.13103E0	-9.14228E0	5.55515E-3	9.29356E-2	2.72847E1	-3.26717E1	-3.26164E1	2.67231E1	1.701E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.52569E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17394E-1	-7.98392E-1	-9.13072E0	-9.14228E0	5.38826E-3	9.3317E-2	2.73135E1	-3.26543E1	-3.26386E1	2.68508E1	1.7017E-8	2.51116E-3	2.51116E-3	6.26916E-3	2.53368E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17323E-1	-7.98655E-1	-9.13084E0	-9.14233E0	5.48363E-3	9.32693E-2	2.72919E1	-3.26693E1	-3.26482E1	2.67511E1	1.7017E-8	2.5188E-3	2.5188E-3	6.29098E-3	2.51613E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17513E-1	-7.98321E-1	-9.13076E0	-9.14252E0	5.07832E-3	9.32455E-2	2.72962E1	-3.26732E1	-3.26195E1	2.67493E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52928E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17275E-1	-7.98559E-1	-9.131E0	-9.14223E0	5.43594E-3	9.3317E-2	2.72937E1	-3.2647E1	-3.26314E1	2.69433E1	1.70028E-8	2.52492E-3	2.52492E-3	6.31817E-3	2.51494E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17227E-1	-7.98512E-1	-9.13076E0	-9.1424E0	5.24521E-3	9.31025E-2	2.72654E1	-3.26446E1	-3.26302E1	2.67319E1	1.70023E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.52709E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16989E-1	-7.98726E-1	-9.13103E0	-9.14223E0	4.86374E-3	9.32217E-2	2.73222E1	-3.26805E1	-3.26187E1	2.66538E1	1.70318E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.52489E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16965E-1	-7.98726E-1	-9.13098E0	-9.14237E0	5.45979E-3	9.3317E-2	2.73187E1	-3.2662E1	-3.2629E1	2.69476E1	1.70017E-8	2.51693E-3	2.51693E-3	6.31858E-3	2.50626E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.1706E-1	-7.98321E-1	-9.13053E0	-9.14254E0	5.43594E-3	9.3317E-2	2.72985E1	-3.26837E1	-3.26104E1	2.69746E1	1.70028E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.51709E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17251E-1	-7.98583E-1	-9.13072E0	-9.14221E0	5.24521E-3	9.31025E-2	2.73159E1	-3.26693E1	-3.26242E1	2.6774E1	1.70023E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.5403E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17323E-1	-7.98488E-1	-9.1306E0	-9.14223E0	5.17368E-3	9.34124E-2	2.73424E1	-3.26866E1	-3.26505E1	2.68256E1	1.70023E-8	2.51662E-3	2.51662E-3	6.28006E-3	2.52928E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17323E-1	-7.98392E-1	-9.13086E0	-9.14204E0	5.14984E-3	9.29356E-2	2.72991E1	-3.26452E1	-3.26374E1	2.66779E1	1.69942E-8	2.52027E-3	2.52027E-3	6.3074E-3	2.5263E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17418E-1	-7.98798E-1	-9.13084E0	-9.14221E0	5.38826E-3	9.29832E-2	2.72901E1	-3.26512E1	-3.26645E1	2.69259E1	1.7017E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.53148E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17418E-1	-7.98893E-1	-9.131E0	-9.14209E0	5.34058E-3	9.31025E-2	2.73086E1	-3.26543E1	-3.26036E1	2.67391E1	1.70023E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.52489E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17084E-1	-7.98368E-1	-9.13093E0	-9.1424E0	5.22137E-3	9.32455E-2	2.73183E1	-3.2644E1	-3.26272E1	2.66718E1	1.701E-8	2.52707E-3	2.52707E-3	6.3074E-3	2.52139E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.17204E-1	-7.98512E-1	-9.13079E0	-9.14199E0	5.24521E-3	9.30786E-2	2.73117E1	-3.26554E1	-3.2617E1	2.6667E1	1.70023E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.52928E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.17156E-1	-7.98607E-1	-9.13126E0	-9.14221E0	4.86374E-3	9.31978E-2	2.73363E1	-3.26731E1	-3.26401E1	2.68845E1	1.7017E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.52928E-2