[Scan]
initial_time=2016-02-15T18:03:54
final_time=2016-02-15T18:04:14
ip_count=19
run=1030
dataset=2
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=8.25477E-10
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=3.1482E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=8.63922E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.50127E-10
mult1=-9.33101E-9
mult2=-2.73458E-9
rf_tmon=-4.1339E-3
rf_agc=3.32314E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=3.91483E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20243E1
lens5a_imon=1.97377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53511E1
cs_ef1b_imon=2.96132E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.51176E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34837E0
lens1_imon=2.57157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0392E1
cs_ea2_imon=1.55187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.98565E-5
olens2_vset=9.7E-1
olens2_vmon=9.70697E-1
olens2_imon=4.04894E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=2.86401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15589E1
os_ea1_imon=1.89732E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.22979E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.05029E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.5258E-10
tplens_vset=1.4E-1
tplens_vmon=1.58244E0
tplens_imon=-9.71409E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.58514E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.96216E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=1.87361E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74443E1
cs_ef2b_imon=3.12709E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54575E-1
os_ea2_imon=-4.93555E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00764E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.18999E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5967E0
os_ef2alow_imon=-2.55721E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20196E-1
os_ef2bup_imon=-5.16365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=2.86923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02018E1
cs_anode2_imon=2.26662E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.07776E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.98738E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-1.98031E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56144E1
einzel_imon=7.44805E-6
window_vset=0.0E0
window_vmon=2.06102E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33864E1
os_fil1_imon=5.1733E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.23529E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66521E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30805E1
cs_fil1_imon=9.99559E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61503E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6677E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.5823E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6243E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32898E-1
cs_fil2_imon=-2.4375E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.52404E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.51395E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91063E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17323E-1	-7.97963E-1	-9.13095E0	-9.14209E0	5.10216E-3	9.30786E-2	2.73261E1	-3.26771E1	-3.26416E1	2.6825E1	1.70023E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.52709E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17442E-1	-7.98178E-1	-9.13124E0	-9.14214E0	5.4121E-3	9.28879E-2	2.73219E1	-3.26609E1	-3.26434E1	2.66899E1	1.70173E-8	2.51847E-3	2.51847E-3	6.33436E-3	2.51924E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.1718E-1	-7.98321E-1	-9.13138E0	-9.1419E0	5.34058E-3	9.27925E-2	2.73185E1	-3.26713E1	-3.26215E1	2.66471E1	1.70318E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.51832E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.17227E-1	-7.9813E-1	-9.13117E0	-9.14204E0	5.48363E-3	9.30786E-2	2.72845E1	-3.26385E1	-3.26254E1	2.68837E1	1.70181E-8	2.5216E-3	2.5216E-3	6.33297E-3	2.50959E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17347E-1	-7.97939E-1	-9.13131E0	-9.14228E0	5.24521E-3	9.30548E-2	2.73165E1	-3.265E1	-3.26236E1	2.68526E1	1.69858E-8	2.51725E-3	2.51725E-3	6.3245E-3	2.50732E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17275E-1	-7.98321E-1	-9.13095E0	-9.14207E0	5.38826E-3	9.29117E-2	2.73093E1	-3.26512E1	-3.26266E1	2.66256E1	1.70096E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.51613E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17227E-1	-7.9813E-1	-9.13107E0	-9.14199E0	5.43594E-3	9.30548E-2	2.72985E1	-3.26843E1	-3.26332E1	2.66136E1	1.70023E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.50523E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.1749E-1	-7.97987E-1	-9.13115E0	-9.14195E0	5.17368E-3	9.30786E-2	2.72955E1	-3.2644E1	-3.26338E1	2.66502E1	1.69875E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.51832E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.17227E-1	-7.98488E-1	-9.13131E0	-9.1418E0	5.19753E-3	9.29356E-2	2.72961E1	-3.26332E1	-3.26374E1	2.66989E1	1.70023E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.52709E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.17227E-1	-7.98297E-1	-9.13084E0	-9.14183E0	5.38826E-3	9.29117E-2	2.72915E1	-3.26661E1	-3.26136E1	2.68346E1	1.69949E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.53368E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.17394E-1	-7.97939E-1	-9.13074E0	-9.14214E0	5.24521E-3	9.30309E-2	2.73147E1	-3.26488E1	-3.2623E1	2.67109E1	1.70028E-8	2.51847E-3	2.51847E-3	6.33977E-3	2.52569E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17013E-1	-7.98464E-1	-9.13076E0	-9.14237E0	5.24521E-3	9.29117E-2	2.72702E1	-3.2644E1	-3.26272E1	2.68575E1	1.70023E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.5227E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.1706E-1	-7.98774E-1	-9.131E0	-9.14202E0	5.29289E-3	9.30309E-2	2.73327E1	-3.26452E1	-3.26326E1	2.67752E1	1.70096E-8	2.5199E-3	2.5199E-3	6.3514E-3	2.52489E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.17156E-1	-7.9844E-1	-9.13095E0	-9.1418E0	5.43594E-3	9.26733E-2	2.73189E1	-3.26645E1	-3.26056E1	2.67522E1	1.70244E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52489E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17466E-1	-7.9844E-1	-9.13091E0	-9.14199E0	5.55515E-3	9.30309E-2	2.73033E1	-3.26655E1	-3.26195E1	2.6786E1	1.69875E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.50523E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.17132E-1	-7.98273E-1	-9.13072E0	-9.14195E0	4.98295E-3	9.30309E-2	2.73201E1	-3.26693E1	-3.26248E1	2.67601E1	1.69955E-8	2.52599E-3	2.52599E-3	6.31817E-3	2.53432E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17227E-1	-7.98702E-1	-9.13119E0	-9.14221E0	5.24521E-3	9.29832E-2	2.73261E1	-3.26645E1	-3.26056E1	2.68064E1	1.70096E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.51832E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.17156E-1	-7.98416E-1	-9.13107E0	-9.14209E0	5.50747E-3	9.30786E-2	2.73115E1	-3.2648E1	-3.26347E1	2.67393E1	1.70096E-8	2.52977E-3	2.52977E-3	6.31837E-3	2.51832E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.17418E-1	-7.98464E-1	-9.13088E0	-9.14178E0	5.62668E-3	9.31501E-2	2.72799E1	-3.26729E1	-3.26434E1	2.68857E1	1.70247E-8	2.51709E-3	2.51709E-3	6.31798E-3	2.51801E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17227E-1	-7.97963E-1	-9.131E0	-9.14211E0	5.96046E-3	9.32693E-2	2.73261E1	-3.26849E1	-3.25984E1	2.67776E1	1.70096E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.51395E-2