[Scan]
initial_time=2016-02-15T18:05:14
final_time=2016-02-15T18:05:33
ip_count=19
run=1030
dataset=2
scan=110
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08699E-4
ql1_vset=
ql1_vmon=-8.17275E-1
ql1_imon=7.83706E-10
ql2_vset=
ql2_vmon=-7.97558E-1
ql2_imon=2.93732E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=8.07941E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=5.57959E-10
mult1=-9.39121E-9
mult2=-2.73258E-9
rf_tmon=-4.69267E-3
rf_agc=3.39825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.96752E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=2.97765E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04611E1
cs_ea1_imon=2.48274E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41031E0
lens1_imon=2.71315E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.54727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83685E1
cs_ef1a_imon=2.97838E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.91757E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=1.88175E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=1.22448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.0519E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=6.9176E-10
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-1.32535E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.51436E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.5993E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.01759E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=1.87007E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59884E-1
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61077E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44566E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.87927E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.26407E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72805E1
iondef1_imon=1.10732E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68653E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.03754E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=3.26061E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0959E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92589E3
multa_neg_imon=7.96917E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.63481E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.59399E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.06497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33878E1
os_fil1_imon=4.36177E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.26006E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66363E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30801E1
cs_fil1_imon=9.99663E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62354E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66668E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02798E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.87833E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63316E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.5196E-2
chamber_ion_pmon=1.69867E-8
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.67411E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.1737E-1	-7.98368E-1	-9.13134E0	-9.14166E0	5.36442E-3	9.31978E-2	2.73175E1	-3.26691E1	-3.26555E1	2.6913E1	1.69883E-8	2.52923E-3	2.52923E-3	6.32896E-3	2.51709E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.1706E-1	-7.98249E-1	-9.13136E0	-9.14197E0	5.4121E-3	9.3174E-2	2.72978E1	-3.26664E1	-3.26138E1	2.68466E1	1.70173E-8	2.52384E-3	2.52384E-3	6.29665E-3	2.50638E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.1737E-1	-7.98368E-1	-9.13103E0	-9.14216E0	5.29289E-3	9.32693E-2	2.72865E1	-3.2638E1	-3.2629E1	2.67788E1	1.69986E-8	2.52154E-3	2.52154E-3	6.31563E-3	2.50741E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.1737E-1	-7.97915E-1	-9.13131E0	-9.14223E0	5.36442E-3	9.31978E-2	2.73104E1	-3.26708E1	-3.26195E1	2.67986E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17323E-1	-7.98011E-1	-9.1311E0	-9.14204E0	5.43594E-3	9.3174E-2	2.72973E1	-3.26861E1	-3.26092E1	2.6786E1	1.69949E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.51177E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.17108E-1	-7.98488E-1	-9.13093E0	-9.14183E0	5.53131E-3	9.34362E-2	2.73117E1	-3.26711E1	-3.26506E1	2.67601E1	1.69883E-8	2.52599E-3	2.52599E-3	6.3074E-3	2.52139E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16965E-1	-7.97844E-1	-9.13134E0	-9.14214E0	5.31673E-3	9.34124E-2	2.73165E1	-3.26609E1	-3.26476E1	2.6831E1	1.69791E-8	2.5147E-3	2.5147E-3	6.29624E-3	2.52407E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17657E-1	-7.98273E-1	-9.13117E0	-9.14211E0	4.93526E-3	9.32932E-2	2.7288E1	-3.26614E1	-3.26178E1	2.67758E1	1.69949E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51177E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.1706E-1	-7.98345E-1	-9.13165E0	-9.14209E0	5.26905E-3	9.31978E-2	2.72971E1	-3.26517E1	-3.25991E1	2.68052E1	1.70318E-8	2.52707E-3	2.52707E-3	6.31278E-3	2.50638E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17204E-1	-7.97939E-1	-9.13165E0	-9.14223E0	5.45979E-3	9.34124E-2	2.73045E1	-3.26464E1	-3.26284E1	2.67325E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.5227E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.17013E-1	-7.98464E-1	-9.13126E0	-9.14233E0	5.29289E-3	9.33409E-2	2.73134E1	-3.26449E1	-3.26366E1	2.67648E1	1.70023E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.5227E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17037E-1	-7.98345E-1	-9.13069E0	-9.1423E0	4.79221E-3	9.32932E-2	2.73027E1	-3.26801E1	-3.2632E1	2.68364E1	1.70096E-8	2.50789E-3	2.50789E-3	6.33486E-3	2.51177E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.17156E-1	-7.98225E-1	-9.13122E0	-9.14226E0	5.29289E-3	9.32932E-2	2.73134E1	-3.26596E1	-3.26437E1	2.68471E1	1.69949E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.51177E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16917E-1	-7.98178E-1	-9.13119E0	-9.14214E0	5.10216E-3	9.32455E-2	2.73081E1	-3.26482E1	-3.26585E1	2.6816E1	1.69955E-8	2.52061E-3	2.52061E-3	6.34518E-3	2.51494E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1737E-1	-7.98321E-1	-9.13115E0	-9.14192E0	5.26905E-3	9.33886E-2	2.73417E1	-3.26591E1	-3.2635E1	2.67253E1	1.7017E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.50523E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17108E-1	-7.97772E-1	-9.13117E0	-9.14197E0	5.26905E-3	9.35316E-2	2.72763E1	-3.26633E1	-3.26236E1	2.67577E1	1.70023E-8	2.52428E-3	2.52428E-3	6.32386E-3	2.51613E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17442E-1	-7.98225E-1	-9.13074E0	-9.14195E0	5.14984E-3	9.35555E-2	2.73045E1	-3.26868E1	-3.26573E1	2.68496E1	1.70096E-8	2.51662E-3	2.51662E-3	6.35692E-3	2.52489E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17323E-1	-7.97987E-1	-9.13081E0	-9.1419E0	5.07832E-3	9.34839E-2	2.73287E1	-3.26756E1	-3.25912E1	2.67346E1	1.69955E-8	2.51525E-3	2.51525E-3	6.35059E-3	2.51494E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09665E0	-8.16941E-1	-7.97772E-1	-9.13134E0	-9.14185E0	5.05447E-3	9.33886E-2	2.73051E1	-3.26795E1	-3.2635E1	2.68196E1	1.70176E-8	2.51709E-3	2.51709E-3	6.29157E-3	2.51379E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.17275E-1	-7.97558E-1	-9.131E0	-9.14226E0	5.17368E-3	9.32932E-2	2.72805E1	-3.26591E1	-3.26494E1	2.68653E1	1.69867E-8	2.52139E-3	2.52139E-3	6.31858E-3	2.5196E-2