[Scan]
initial_time=2016-02-15T18:05:41
final_time=2016-02-15T18:06:00
ip_count=19
run=1030
dataset=2
scan=111
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=7.67422E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.97034E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=7.91776E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.40423E-10
mult1=-1.01979E-8
mult2=-2.74057E-9
rf_tmon=-5.20938E-3
rf_agc=3.23242E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=3.88622E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05215E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=2.97153E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.49894E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37677E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.55444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.89671E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11063E1
os_restr1_imon=2.86773E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=1.89475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.22783E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=3.05406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20601E0
olens4_imon=7.68387E-10
tplens_vset=1.4E-1
tplens_vmon=1.59217E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98584E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.14407E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=1.8706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34036E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40909E-1
os_ea2_imon=-4.57964E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59335E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63787E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.85944E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.27092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68358E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.01902E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.13437E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-4.355E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.55585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.26527E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33875E1
os_fil1_imon=5.42494E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3951E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66443E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30772E1
cs_fil1_imon=1.00171E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62113E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66959E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.33773E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63086E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.51709E-2
chamber_ion_pmon=1.69811E-8
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07345E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17084E-1	-7.98321E-1	-9.13079E0	-9.14195E0	5.43594E-3	9.31501E-2	2.73193E1	-3.26561E1	-3.26366E1	2.69139E1	1.69727E-8	2.51771E-3	2.51771E-3	6.28006E-3	2.51832E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.17323E-1	-7.9844E-1	-9.13074E0	-9.14204E0	5.31673E-3	9.30071E-2	2.73117E1	-3.26416E1	-3.26164E1	2.68785E1	1.69811E-8	2.52169E-3	2.52169E-3	6.29665E-3	2.52785E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.1687E-1	-7.98059E-1	-9.13069E0	-9.14187E0	4.88758E-3	9.2864E-2	2.73163E1	-3.26708E1	-3.26225E1	2.68218E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.5227E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.1687E-1	-7.9844E-1	-9.13064E0	-9.1419E0	5.34058E-3	9.30071E-2	2.72853E1	-3.26813E1	-3.2614E1	2.67574E1	1.701E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.51494E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17299E-1	-7.98225E-1	-9.13079E0	-9.14202E0	5.17368E-3	9.31263E-2	2.73027E1	-3.26681E1	-3.26278E1	2.67532E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17442E-1	-7.97987E-1	-9.13067E0	-9.14204E0	5.10216E-3	9.32217E-2	2.73057E1	-3.26549E1	-3.26308E1	2.69013E1	1.69875E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.51832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16965E-1	-7.98154E-1	-9.13107E0	-9.14245E0	5.17368E-3	9.33409E-2	2.72998E1	-3.26791E1	-3.26142E1	2.67091E1	1.70096E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.51613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17323E-1	-7.98225E-1	-9.13117E0	-9.14218E0	5.07832E-3	9.32932E-2	2.72892E1	-3.26502E1	-3.26384E1	2.68599E1	1.70104E-8	2.52236E-3	2.52236E-3	6.31269E-3	2.51169E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16965E-1	-7.98082E-1	-9.13105E0	-9.14235E0	5.14984E-3	9.31025E-2	2.73137E1	-3.26456E1	-3.26346E1	2.67662E1	1.69875E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.50741E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17394E-1	-7.98273E-1	-9.13105E0	-9.14207E0	5.26905E-3	9.33886E-2	2.72833E1	-3.26602E1	-3.26142E1	2.67674E1	1.70096E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.52051E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17323E-1	-7.98082E-1	-9.13088E0	-9.14178E0	5.00679E-3	9.3174E-2	2.72968E1	-3.26608E1	-3.26413E1	2.67705E1	1.7017E-8	2.51225E-3	2.51225E-3	6.3514E-3	2.52709E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17108E-1	-7.98416E-1	-9.13093E0	-9.14197E0	5.00679E-3	9.3317E-2	2.73207E1	-3.26705E1	-3.26344E1	2.68442E1	1.70173E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.52569E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17132E-1	-7.98345E-1	-9.13088E0	-9.14173E0	5.45979E-3	9.30309E-2	2.73165E1	-3.26759E1	-3.2623E1	2.67668E1	1.69949E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.50959E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17323E-1	-7.98202E-1	-9.13091E0	-9.14187E0	5.48363E-3	9.33647E-2	2.73165E1	-3.26705E1	-3.26476E1	2.67758E1	1.70096E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.51395E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17227E-1	-7.97963E-1	-9.13081E0	-9.14211E0	5.60284E-3	9.30071E-2	2.72991E1	-3.26843E1	-3.26074E1	2.68028E1	1.70173E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.51494E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17275E-1	-7.98345E-1	-9.13081E0	-9.1419E0	5.36442E-3	9.31263E-2	2.73093E1	-3.26561E1	-3.26176E1	2.67902E1	1.70017E-8	2.52362E-3	2.52362E-3	6.29624E-3	2.5196E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17275E-1	-7.98321E-1	-9.13084E0	-9.14214E0	5.31673E-3	9.3317E-2	2.72909E1	-3.27039E1	-3.2636E1	2.68829E1	1.70246E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.51709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16894E-1	-7.98488E-1	-9.13098E0	-9.14187E0	5.17368E-3	9.32455E-2	2.72939E1	-3.26644E1	-3.26467E1	2.66646E1	1.70028E-8	2.52492E-3	2.52492E-3	6.31817E-3	2.51709E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.17204E-1	-7.98559E-1	-9.13091E0	-9.14216E0	5.53131E-3	9.32217E-2	2.72877E1	-3.26458E1	-3.2623E1	2.66154E1	1.7017E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.52928E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16965E-1	-7.98583E-1	-9.13105E0	-9.14216E0	5.62668E-3	9.31501E-2	2.73081E1	-3.26777E1	-3.25948E1	2.68358E1	1.69811E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.51709E-2